Number | Date | Country | Kind |
---|---|---|---|
10-155301 | May 1998 | JP |
Number | Name | Date | Kind |
---|---|---|---|
5014727 | Aigo | May 1991 | A |
5175124 | Winebarger | Dec 1992 | A |
5336371 | Chung et al. | Aug 1994 | A |
5849091 | Skrovan et al. | Dec 1998 | A |
6048405 | Skrovan et al. | Apr 2000 | A |
Number | Date | Country |
---|---|---|
55-153332 | Nov 1980 | JP |
58-7831 | Jan 1983 | JP |
4-40270 | Feb 1992 | JP |
9-307155 | Nov 1997 | JP |
Entry |
---|
Kern, Handbook of Semiconductor Wafer Cleaning Technology, Noyes Publications, p. 78, 1993. |