Claims
- 1. A method for applying a protective coating on a quartz crucible for use in silicon crystallization processes, comprising the steps:
arranging said crucible within deposition range of a plasma jet apparatus, supplying said plasma jet apparatus with a powered form of a thermodynamically stable coating material that is not reactive with molten silicon, vitreous silica or graphite in the temperature range of said silicon crystallization processes, and depositing with said plasma jet apparatus a protective layer of said coating material on the surface of said crucible.
- 2. A method for applying a protective coating according to claim 1, said coating material comprising at least one from among the group of materials consisting of oxides of alkaline earth elements, oxides of transition metals, lanthanide sesquioxides, aluminum oxide, and binary, tertiary and quaternary metal oxides.
- 3. A method for applying a protective coating according to claim 2, said oxides of alkaline earth elements comprising beryllium oxide, magnesium oxide, calcium oxide, strontium oxide, and barium oxide.
- 4. A method for applying a protective coating according to claim 2, said oxides of transition elements comprising titanium oxide, zirconium oxide, and hafnium oxide.
- 5. A method for applying a protective coating according to claim 2, said binary, tertiary, and quaternary metal oxides comprising magnesium zirconate, calcium zirconate, strontium zirconate, barium zirconate, zirconium oxides stabilized by yttria, and zirconium oxides stabilized by calcia.
- 6. A method for applying a protective coating according to claim 1, said surface of said crucible comprising at least the inner surface.
- 7. A method for applying a protective coating according to claim 1, said plasma jet comprising an arc plasma torch.
- 8. A method for applying a protective coating according to claim 1, said powdered form comprising particles ranging in size between about 5 μm and about 100 μm.
- 9. A method for applying a protective coating according to claim 1, said protective layer when completed being between about 0.001 inches and about 0.010 inches thick.
- 10. A method for applying a protective coating according to claim 1, said temperature range extending to about 1400° Centigrade.
- 11. A method for applying a protective coating on a quartz crucible for use in silicon crystallization processes, comprising the steps:
arranging said crucible within deposition range of a plasma jet apparatus, supplying said plasma jet apparatus with a powered form of a thermodynamically stable coating material, said coating material comprising at least one from the group of materials consisting of oxides of alkaline earth elements, oxides of transition metals, lanthanide sesquioxides, aluminum oxide, and binary, tertiary and quaternary metal oxides, and depositing with said plasma jet apparatus a protective layer of said coating material on the surface of said crucible.
- 12. A method for applying a protective coating according to claim 11, said oxides of alkaline earth elements comprising beryllium oxide, magnesium oxide, calcium oxide, strontium oxide, and barium oxide.
- 13. A method for applying a protective coating according to claim 11, said oxides of transition elements comprising titanium oxide, zirconium oxide, and hafnium oxide.
- 14. A method for applying a protective coating according to claim 11, said binary, tertiary, and quaternary metal oxides comprising magnesium zirconate, calcium zirconate, strontium zirconate, barium zirconate, zirconium oxides stabilized by yttria, and zirconium oxides stabilized by calcia.
- 15. A method for applying a protective coating according to claim 11, said plasma jet comprising an arc plasma torch with a temperature range extending to about 1400° Centigrade.
- 16. A method for applying a protective coating according to claim 15, said powdered form comprising particles ranging in size between about 5 μm and about 100 μm, said protective layer when completed being between about 0.001 inches and about 0.010 inches thick.
- 17. A method for applying a protective coating on a quartz crucible for use in silicon crystallization processes, comprising the steps:
arranging said crucible within deposition range of an arc plasma torch apparatus with a temperature range extending to about 1400° Centigrade, supplying said arc plasma torch apparatus with a powered form of a thermodynamically stable coating material comprising at least one from among the group of materials consisting of oxides of alkaline earth elements, oxides of transition metals, lanthanide sesquioxides, aluminum oxide, and binary, tertiary and quaternary metal oxides, said powdered form comprising particles ranging in size between about 5 μm and about 100 μm, and depositing with said arc plasma torch apparatus a protective layer of said material on the surface of said crucible, said protective layer when completed being between about 0.001 inches and about 0.010 inches thick.
- 18. A method for applying a protective coating according to claim 11, said oxides of alkaline earth elements comprising beryllium oxide, magnesium oxide, calcium oxide, strontium oxide, and barium oxide.
- 19. A method for applying a protective coating according to claim 11, said oxides of transition elements comprising titanium oxide, zirconium oxide, and hafnium oxide.
- 20. A method for applying a protective coating according to claim 11, said binary, tertiary, and quaternary metal oxides comprising magnesium zirconate, calcium zirconate, strontium zirconate, barium zirconate, zirconium oxides stabilized by yttria, and zirconium oxides stabilized by calcia.
Parent Case Info
[0001] This application relates, incorporates by referenced, and claims priority for all purposes to pending U.S. applications s/n No. 60/248880, filed Nov. 15, 2000, and s/n No. 60/259,553, filed Jan. 3, 2001.
Provisional Applications (2)
|
Number |
Date |
Country |
|
60248880 |
Nov 2000 |
US |
|
60259553 |
Jan 2001 |
US |