This disclosure relates to a radiation-emitting device.
There is a need to provide a radiation-emitting device with improved characteristics.
We provide a radiation-emitting device including a semiconductor layer sequence having an active layer that emits a primary radiation during operation, a decoupling surface on a surface of the semiconductor layer sequence, a wavelength conversion layer on a side of the semiconductor layer sequence facing away from the decoupling surface, containing at least one conversion material that converts the primary radiation into secondary radiation, and a mirror layer on the side of the wavelength conversion layer facing away from the semiconductor layer sequence, wherein the at least one conversion material is electrically conductive and/or embedded in an electrically conductive matrix material.
We also provide a radiation-emitting device including a semiconductor layer sequence having an active layer that emits a primary radiation during operation, a decoupling surface on a surface of the semiconductor layer sequence, a wavelength conversion layer on a side of the semiconductor layer sequence facing away from the decoupling surface, containing at least one conversion material that converts the primary radiation into secondary radiation, a mirror layer on the side of the wavelength conversion layer facing away from the semiconductor layer sequence, wherein the at least one conversion material is electrically conductive and/or embedded in an electrically conductive matrix material, and the wavelength conversion layer has a roughened surface on the side facing away from the semiconductor layer sequence.
We provide a radiation-emitting device comprising a semiconductor layer sequence with an active layer emitting primary radiation during operation.
The radiation-emitting device may be a semiconductor chip, in particular a light emitting diode chip. The term “active layer” means a layer of the semiconductor layer sequence, in particular an epitaxial semiconductor layer sequence, suitable and intended to generate and emit electromagnetic radiation during operation of the radiation-emitting device.
“Radiation,” “electromagnetic radiation” and “light” mean electromagnetic radiation with at least one wavelength or spectral component in an infrared to ultraviolet wavelength range. For example, the primary radiation can have an ultraviolet to green wavelength range, in particular a blue wavelength range.
The radiation-emitting device may have a decoupling surface, hereinafter also referred to as the radiation decoupling surface, on a surface of the semiconductor layer sequence. The primary radiation generated by the active layer can be radiated with a ratio of at least 50% in the direction of the decoupling surface located on the surface of the semiconductor layer sequence.
The radiation-emitting device may comprise a wavelength conversion layer on the side of the semiconductor layer sequence facing away from the decoupling surface containing at least one conversion material converting the primary radiation into secondary radiation. For example, the secondary radiation may have a green to red wavelength range. The wavelength conversion layer may also contain several conversion materials, some of which generate secondary radiation in the green wavelength range and other secondary radiation in the red wavelength range. The wavelength conversion layer can be formed plane-parallel.
Due to the different optical densities of the semiconductor layer sequence and the ambient air at the radiation decoupling surface, a large part of the primary radiation at the decoupling surface can be reflected back into the radiation-emitting device so that up to 90% of the primary radiation can be converted into secondary radiation by the at least one conversion material in the wavelength conversion layer.
The wavelength conversion layer does not or hardly enlarge the device, for example, the semiconductor chip or the package. CSP (Chip-Size Package) components can thus also be made possible.
The radiation-emitting device may comprise a mirror layer on the side of the wavelength conversion layer facing away from the semiconductor layer sequence. The secondary radiation generated by the conversion material can be reflected by the mirror layer and also decoupled by the decoupling surface of the radiation-emitting device. Accordingly, a mixed light of unconverted primary and converted secondary radiation is emitted at the decoupling surface of the semiconductor layer sequence. This may allow the radiation-emitting device to emit mixed white light.
The term “on” with respect to the layer sequence in the radiation-emitting device means that, for example, the decoupling surface may be in direct contact with the semiconductor layer sequence or additional layers may be present between the decoupling surface and the semiconductor layer sequence. “Direct contact” means a mechanical, but also an electrical contact. Electrical contacting can also take place via an indirect mechanical contact.
The at least one conversion material may be electrically conductive and/or embedded in an electrically conductive matrix material. This means that the wavelength conversion layer contains either an electrically conductive conversion material or an electrically conductive conversion material embedded in a non-electrically conductive matrix material, an electrically conductive conversion material embedded in an electrically conductive matrix material, or a non-electrically conductive conversion material embedded in an electrically conductive matrix material. This maintains the power supply for operation of the radiation-emitting device. Additional current expansion or distribution layers can thus be dispensed with.
The radiation-emitting device may have a semiconductor layer sequence with an active layer that emits primary radiation during operation, a decoupling surface on a surface of the semiconductor layer sequence, a wavelength conversion layer on the side of the semiconductor layer sequence facing away from the decoupling surface, that contains at least one conversion material converting the primary radiation into secondary radiation, and a mirror layer on the side of the wavelength conversion layer facing away from the semiconductor layer sequence, wherein the at least one conversion material is electrically conductive and/or is embedded in an electrically conductive matrix material.
In the radiation-emitting device described here, the conversion material in the wavelength conversion layer is not subordinated to the decoupling surface of the radiation-emitting device compared to known radiation-emitting devices with wavelength conversion layers. Rather, the conversion material is integrated into the wavelength conversion layer of the radiation-emitting device so that the decoupling surface is free of conversion material. This means that the conversion material is arranged close to the chip and can also be applied at a wafer level. The conversion material is thus integrated into the chip process. The conversion is thus extremely close to the pump source or the heat sink and can therefore be cooled better than on the side of the semiconductor layer sequence on which the decoupling surface is present. This means that temperature-sensitive conversion materials can also be used at high current densities.
Because the wavelength conversion layer contains either an electrically conductive conversion material and/or an electrically conductive matrix material, it enables the semiconductor layer sequence to be electrically contacted. The electrically conductive wavelength conversion layer can be in direct or indirect electrical contact with the semiconductor layer sequence. In indirect electrical contact, for example, there may be an additional current expansion layer between the semiconductor layer sequence and the wavelength conversion layer. However, such a layer can also be dispensed with due to the electrically conductive example of the wavelength conversion layer.
The wavelength conversion layer can mediate the injection of electrons or holes into the semiconductor layer sequence on the side of the active layer facing away from the decoupling surface. By a further electrical contact, for example, an electrode, oppositely charged charge carriers, holes or electrons can be injected into the semiconductor layer sequence on the side of the active layer facing the radiation decoupling surface. The charge carriers injected into the semiconductor layer sequence from both sides of the active layer can recombine in the active layer while emitting light.
The electrically conductive matrix material may be selected from a group comprising doped and undoped metal oxides, doped and undoped metal halides, electrically conductive polymers, polymers charged with electrically conductive particles, and polymers charged with electrically conductive salts. Electrically conductive polymers are polymers based on conjugated systems, for example, fluorenes or spirofluorenes. Conductive particles with which polymers are charged can be silver particles, for example. Doped or undoped metal oxides may include doped or undoped ITO (indium tin oxide). Such matrix materials are light and temperature stable as well as transparent. Furthermore, they can be structured and thus well processed and applied at a wafer level. By using an electrically conductive matrix, a current expansion layer, for example, an ITO layer commonly used for current distribution, can be omitted.
The refractive index of the electrically conductive matrix material can be variable. This means that the refractive index can be adjusted to the degree of conversion of the wavelength conversion layer. For example, with a polymer matrix material the side chain lengths or the side chains can be changed. For example, CH3 groups can be replaced by benzene groups to increase the refractive index. Furthermore, nanoparticles can be inserted into the matrix material to influence the refractive index of the matrix material. For example, SiO2 particles can produce a slight increase in the refractive index, ZrO particles a stronger increase in the refractive index. If the matrix material has a higher refractive index, this can also be lowered with nanoparticles. Thus, the refractive index of the matrix can be used to adjust the color of the light emitted by the device.
The wavelength conversion layer may have a thickness of ≤30 μm, especially of ≤10 μm, preferably of ≤2 μm. For example, the wavelength conversion layer may contain a matrix material in which the at least one conversion material is embedded and have a thickness of about 10 μm. If the wavelength conversion layer does not contain a matrix material, its thickness can be about 1 μm, for example. The thickness of the wavelength conversion layer can also be used to adjust the refractive index of the wavelength conversion layer to the degree of conversion.
The at least one conversion material may be nanodisperse. Furthermore, the at least one conversion material can be non-scattering. If the conversion material is not electrically conductive, its nanoscale size allows the use of sufficient electrically conductive matrix material for sufficient current transport.
The at least one conversion material in the wavelength conversion layer may have a concentration of ≤100 mol %. Furthermore, the at least one conversion material in the wavelength conversion layer may have a concentration of ≥0.01 mol %. This means that the wavelength conversion layer may consist of or contain at least one conversion material. If the wavelength conversion layer consists of at least one conversion material, is the at least one conversion material electrically conductive. If, in addition to the conversion material, matrix material is also present in the wavelength conversion layer, either the conversion material or the matrix material or both can be electrically conductive. The concentration of at least one conversion material in the wavelength conversion layer can, for example, be 0.08 mol %. This can, for example, produce a bluish color location.
The conversion material may be selected from a group comprising quantum dots, quantum dots enclosed in an inorganic matrix, organometallic frameworks (MOFs, metal organic frameworks) and organometallic complexes, in particular Ir based metal organic complexes. Especially, if the wavelength conversion layer does not contain a matrix material, electrically conductive quantum dots can be used as conversion material. Electrically conductive quantum dots enclosed in an inorganic matrix may include, for example, CdSe in a ZnS shell or InGaP in a ZnS shell. Organometallic complexes with or without matrix material can be used well in the wavelength conversion layer as an electrically conductive conversion material. For example, organometallic complexes can be selected that are also used in organic light-emitting diodes. These can be, for example, fluorescent or phosphorescent dyes.
Such conversion materials are particularly light and temperature stable if they are embedded in a suitable matrix material and/or the wavelength conversion layer is encapsulated. The conversion materials can be selected to emit red and/or green light or a mixture thereof as secondary radiation. Furthermore, the conversion materials can be evaporated in a vacuum or applied dissolved in polymer matrix materials.
The wavelength conversion layer may have an absorbing material that absorbs wavelengths in the blue spectral range. This allows absorption of primary radiation in the wavelength conversion layer to be increased by transferring excitation of the absorbing material to the conversion material. An absorbent material may also be chemically bonded to a conversion material. For example, polymers with a blue absorbing backbone or an absorption in the UV range as well as red and/or green emitting side groups can be used. The excitons are generated in the backbone, the emission can then be adjusted to the desired color by the number of side groups. Such polymers can be electrically and optically excited.
The wavelength conversion layer may have a roughened surface on the side facing away from the semiconductor layer sequence. A roughened surface means a structured surface. Between the roughened surface and the mirror layer there can be a planarization layer. With a roughening of the wavelength conversion layer the decoupling can be improved. An additional roughening of the semiconductor layer sequence on the side of the decoupling surface can thus be dispensed with. The advantage of placing the improved decoupling on the side of the wavelength conversion layer facing away from the decoupling surface is that more blue light is directed to the conversion material. The decoupled, unconverted radiation is reflected back at the mirror layer and traverses the wavelength conversion layer once more. This allows the degree of conversion to be increased.
Furthermore, the radiation-emitting device can have an encapsulation surrounding at least the wavelength conversion layer and the mirror layer. The encapsulation can be applied after the mirror layer has been applied and, if necessary, encapsulate the semiconductor layer sequence, the wafer and the wavelength conversion layer. This means that sensitive conversion materials can also be used in the wavelength conversion layer that would otherwise not be usable at all or only with complex secondary encapsulation.
The encapsulation can comprise metallic or dielectric material. For example, the encapsulation can contain or consist of Al2O3 or SiO2.
The encapsulation can have a thickness of less than or equal to 1 μm. In particular, the thickness can be 50 to 500 nm. Such encapsulation can, for example, be applied from the gas phase (by ALD or CVD). Application from the solution is also possible. This allows the wavelength conversion layer and the mirror layer to be encapsulated at wafer level.
Furthermore, the mirror layer can include a metal layer. This can be a silver layer, for example. The mirror layer can be an electrical contact layer. Alternatively, an electrical contact layer can be arranged on the mirror layer in addition to the mirror layer.
The mirror layer can be suitable for reflecting the primary radiation and the secondary radiation in the direction of the decoupling surface. This means that both converted electromagnetic radiation in the form of secondary radiation and non-converted electromagnetic radiation in the form of primary radiation can pass through the wavelength conversion layer and be reflected by the mirror layer. This allows electromagnetic primary radiation incident on the mirror layer to be reflected back into the wavelength conversion layer, thus increasing the conversion probability of the portion of primary radiation that can pass through the wavelength conversion layer in the direction of the mirror layer without conversion. On the other hand, the mirror layer enables the reflection of already converted secondary radiation, which is radiated away from the decoupling surface by the conversion material.
Further advantages and developments of the radiation-emitting device result from examples explained below and in connection with the figures.
In the examples and figures, identical or identical seemingly components are each provided with the same reference signs. The represented components as well as the proportions of the components among each other are not to be regarded as true to scale. Rather, some details of the figures are exaggeratedly large for better understanding.
The active layer 20 may comprise a conventional pn junction, a double heterostructure or a multiple double heterostructure, a single quantum well structure (SQW structure) or a multiple quantum well structure (MQW structure). The term quantum well structure covers within the application in particular any structure in which charge carriers can experience a quantization of their energy states by inclusion. In particular, the term quantum well structure contains no information about the dimensionality of the quantization. It includes thus quantum troughs, quantum wires and quantum dots and any combination of these structures.
The semiconductor layer sequence 10 can include further functional layers and functional regions in addition to the active layer 20 such as p- or n-doped charge carrier transport layers, i.e., electron or hole transport layers, undoped or p- or n-doped intermediate layers, buffer layers or protective layers.
The semiconductor layer sequence 10 can in particular be a thin-film LED chip.
The primary radiation can be decoupled by a decoupling surface 11 on a surface of the epitaxial semiconductor layer sequence 10.
A wavelength conversion layer 30 is arranged on the side of the semiconductor layer sequence 10 facing away from the decoupling surface 11. In this example, a current expansion layer 60 is arranged between the wavelength conversion layer 30 and the semiconductor layer sequence 10. The current expansion layer 60, for example, comprises or consists of ITO. The wavelength conversion layer 30 comprises a conversion material contained in the wavelength conversion layer with up to 100 mol %. If the wavelength conversion layer 30 consists of at least one conversion material only, the at least one conversion material is electrically conductive. This is, for example, quantum dots, quantum dots embedded in inorganic matrix materials such as CdSe in ZnS or InGaP in ZnS, organometallic frameworks or organic fluorescent or phosphorescent dyes. The conversion material is selected to emit secondary radiation in the red and green wavelength ranges. Furthermore, the conversion material is nanodisperse and non-scattering.
The wavelength conversion layer 30 can alternatively contain a matrix material in addition to the at least one conversion material. Possible combinations are electrically conductive conversion material and non-electrically conductive matrix material, electrically conductive conversion material and electrically conductive matrix material or non-electrically conductive conversion material and electrically conductive matrix material. As electrically conductive matrix material, conductive polymers based on conjugated systems, in particular fluorenes or spirofluorenes, polymers charged with conductive particles or salts, as well as metal oxides or metal halides that can each be doped, can be used. Such matrix materials are easy to structure and can therefore be used and processed for further chip processes. The refractive index of the wavelength conversion layer can be adjusted to the desired color of the secondary radiation by accordingly selecting the appropriate wavelength conversion layer thickness and the matrix material. In polymers, for example, the matrix material can be selected by suitable side chains so that the desired refractive index can be set.
The primary radiation emitted by the semiconductor layer sequence that is either decoupled in the direction of the wavelength conversion layer or reflected back at the decoupling surface 11 and thus reaches the wavelength conversion layer 30, is at least partially converted in the wavelength conversion layer. This achieves a high degree of conversion of the primary radiation into secondary radiation.
On the wavelength conversion layer also the mirror layer 40 is arranged that, for example, contains or consists of silver. The secondary radiation as well as unconverted primary radiation can be reflected at the mirror layer 40, if necessary converted in the wavelength conversion layer and decoupled from the device via the decoupling surface 11. For an external observer, this creates a mixed-color luminous impression of primary and secondary radiation.
The mirror layer 40 also serves to electrically contact the semiconductor layer sequence 10. Alternatively, a contact layer can still be present on the mirror layer (not shown). Also not shown is a further electrode opposite the mirror layer or a further contact layer that contacts the semiconductor layer sequence 10. Charge carriers, i.e., electrons and holes can be emitted via the mirror layer or further contact layer and the further electrode into the semiconductor layer sequence 10 and thus into the active layer 20, where they can recombine to generate the primary radiation.
The examples shown in
In addition, an absorbing material that absorbs wavelengths in the blue spectral range may be present in the wavelength conversion layer 30 as an additional material or as a matrix material in the examples shown in
A radiation-emitting device such as the one exemplarily shown in
By adjusting the refractive index by suitable selection of a matrix material, the layer thickness of the wavelength conversion layer 30 and the concentration of the conversion material in the wavelength conversion layer 30, the decoupling into the wavelength conversion layer 30 and thus the degree of conversion can be controlled. This ultimately allows the color of the secondary radiation and thus also the color of the mixed light emitted by the radiation-emitting device to be influenced.
Our devices are not limited by the description based on the examples. Rather, this disclosure includes each new feature and each combination of features that in particular includes each combination of features in the appended claims, even if the feature or combination itself is not explicitly stated in the claims or examples.
This application claims priority of DE 10 2017 101 729.1, the subject matter of which is incorporated herein by reference.
Number | Date | Country | Kind |
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10 2017 101 729.1 | Jan 2017 | DE | national |
Filing Document | Filing Date | Country | Kind |
---|---|---|---|
PCT/EP2018/051867 | 1/25/2018 | WO | 00 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO2018/138213 | 8/2/2018 | WO | A |
Number | Name | Date | Kind |
---|---|---|---|
7355284 | Negley | Apr 2008 | B2 |
7923741 | Zhai | Apr 2011 | B1 |
8033706 | Kelly | Oct 2011 | B1 |
8093610 | Wilm | Jan 2012 | B2 |
8328375 | Diekmann | Dec 2012 | B2 |
8598604 | Eisert | Dec 2013 | B2 |
8637883 | Chakraborty | Jan 2014 | B2 |
8962361 | Petersen | Feb 2015 | B2 |
8965148 | Illek | Feb 2015 | B2 |
9076933 | Liepold | Jul 2015 | B2 |
9082944 | Wirth | Jul 2015 | B2 |
9150784 | Stoll | Oct 2015 | B1 |
9324919 | Lee | Apr 2016 | B2 |
9324920 | Sabathil | Apr 2016 | B2 |
9634191 | Keller | Apr 2017 | B2 |
9709225 | Stoll | Jul 2017 | B2 |
9741910 | Haiberger | Aug 2017 | B1 |
9842972 | Bergenek | Dec 2017 | B2 |
9909722 | Inoue | Mar 2018 | B2 |
9945989 | Setz | Apr 2018 | B2 |
10190046 | Romer | Jan 2019 | B2 |
10230024 | O'Brien | Mar 2019 | B2 |
10418530 | Windisch | Sep 2019 | B2 |
10421904 | Fitzmorris | Sep 2019 | B2 |
10472735 | Kelso | Nov 2019 | B2 |
10475967 | Anc | Nov 2019 | B2 |
10475968 | Zheng | Nov 2019 | B1 |
10483439 | Halbritter | Nov 2019 | B2 |
10522718 | Tangring | Dec 2019 | B2 |
10590339 | Piquette | Mar 2020 | B2 |
10597512 | Hohn | Mar 2020 | B2 |
10662310 | Tchoul | May 2020 | B2 |
10718491 | Raring | Jul 2020 | B1 |
10840403 | Kurtin | Nov 2020 | B2 |
10847684 | Frischeisen | Nov 2020 | B2 |
11011683 | O'Brien | May 2021 | B2 |
11069844 | Haiberger | Jul 2021 | B2 |
20020153835 | Fujiwara | Oct 2002 | A1 |
20050274967 | Martin | Dec 2005 | A1 |
20060124951 | Sakata | Jun 2006 | A1 |
20070080361 | Malm | Apr 2007 | A1 |
20070284567 | Pokrovskiy | Dec 2007 | A1 |
20070285000 | Lim | Dec 2007 | A1 |
20080121918 | DenBaars | May 2008 | A1 |
20080123339 | Bierhuizen | May 2008 | A1 |
20080128727 | Erchak | Jun 2008 | A1 |
20080149166 | Beeson | Jun 2008 | A1 |
20080315228 | Krames | Dec 2008 | A1 |
20090039272 | Krummacher | Feb 2009 | A1 |
20090050919 | Weijers | Feb 2009 | A1 |
20090050925 | Kuramoto | Feb 2009 | A1 |
20090057698 | Okamura | Mar 2009 | A1 |
20090086508 | Bierhuizen | Apr 2009 | A1 |
20090091258 | Heuser | Apr 2009 | A1 |
20090121250 | DenBaars | May 2009 | A1 |
20090272996 | Chakraborty | Nov 2009 | A1 |
20100038669 | McKenzie | Feb 2010 | A1 |
20100258831 | Jagt | Oct 2010 | A1 |
20100264438 | Suenaga | Oct 2010 | A1 |
20100308346 | Cheng | Dec 2010 | A1 |
20110006329 | Fujita | Jan 2011 | A1 |
20110090703 | Ishimori | Apr 2011 | A1 |
20110133628 | Klein | Jun 2011 | A1 |
20110234118 | Kim | Sep 2011 | A1 |
20110248623 | Ichikawa | Oct 2011 | A1 |
20110284494 | Von Malm | Nov 2011 | A1 |
20120032211 | Schindler | Feb 2012 | A1 |
20120120649 | Catalano | May 2012 | A1 |
20120170303 | Meir | Jul 2012 | A1 |
20130011617 | Tasaki | Jan 2013 | A1 |
20130051421 | Traut | Feb 2013 | A1 |
20130154478 | Ohe | Jun 2013 | A1 |
20130322114 | Nishitani | Dec 2013 | A1 |
20130341634 | Heikman | Dec 2013 | A1 |
20140016754 | Sugiyama | Jan 2014 | A1 |
20140042467 | Livesay | Feb 2014 | A1 |
20140070243 | Kim | Mar 2014 | A1 |
20140168571 | Hyun | Jun 2014 | A1 |
20150003042 | Strau | Jan 2015 | A1 |
20150028365 | Kurtin | Jan 2015 | A1 |
20150123156 | Eberhardt | May 2015 | A1 |
20150167906 | Tomiyama | Jun 2015 | A1 |
20150221623 | Tischler | Aug 2015 | A1 |
20150252963 | Stoll | Sep 2015 | A1 |
20150357790 | Jeoung | Dec 2015 | A1 |
20160056347 | Kubat | Feb 2016 | A1 |
20160064621 | Yoneda | Mar 2016 | A1 |
20160087167 | Kundaliya | Mar 2016 | A1 |
20160170120 | Shani | Jun 2016 | A1 |
20160172533 | Song | Jun 2016 | A1 |
20160195244 | Harada | Jul 2016 | A1 |
20160197248 | Ishizaki | Jul 2016 | A1 |
20160201880 | Park | Jul 2016 | A1 |
20160218254 | Jacobson | Jul 2016 | A1 |
20170005245 | Hsu | Jan 2017 | A1 |
20170012179 | von Malm | Jan 2017 | A1 |
20170117444 | Stoll | Apr 2017 | A1 |
20170125644 | Tsuchiya | May 2017 | A1 |
20170125648 | Cui | May 2017 | A1 |
20170133561 | von Malm | May 2017 | A1 |
20170162747 | Aoyagi | Jun 2017 | A1 |
20180031922 | Kamada | Feb 2018 | A1 |
20180033920 | Steltenpol | Feb 2018 | A1 |
20180039006 | Gotou | Feb 2018 | A1 |
20180045395 | Kamada | Feb 2018 | A1 |
20180046031 | Kamada | Feb 2018 | A1 |
20180182934 | Lin-Lefebvre | Jun 2018 | A1 |
20190081219 | Chen | Mar 2019 | A1 |
20190097095 | Yamanaka | Mar 2019 | A1 |
20190172983 | Schricker | Jun 2019 | A1 |
20190198738 | Nakabayashi | Jun 2019 | A1 |
20190219248 | Patent | Jul 2019 | A1 |
20190252581 | Iwakura | Aug 2019 | A1 |
20190373700 | Meir | Dec 2019 | A1 |
20200006602 | O'Brien | Jan 2020 | A1 |
20200028047 | Su | Jan 2020 | A1 |
20200044126 | Tangring | Feb 2020 | A1 |
20200058831 | Dirscherl | Feb 2020 | A1 |
20200152822 | Dirscherl | May 2020 | A1 |
20200158937 | Chang | May 2020 | A1 |
20200271282 | Aketa | Aug 2020 | A1 |
20210050489 | Lim | Feb 2021 | A1 |
20210083152 | Biebersdorf | Mar 2021 | A1 |
Number | Date | Country |
---|---|---|
10 2005 061 828 | Jan 2007 | DE |
10 2008 012 407 | Aug 2009 | DE |
10 2009 051 748 | May 2011 | DE |
2 339 656 | Jun 2011 | EP |
2009095007 | Aug 2009 | WO |
2014108289 | Jul 2014 | WO |
Entry |
---|
Young Chul Shin et al., “Effects of Nanometer-Scale Photonic Crystal Structures on the Light Extraction From GaN Light-Emitting Diodes,” IEEE Journal of Quantum Electronics, vol. 46, No. 9, Sep. 2010, pp. 1375-1380. |
Erich Kinder et al., “Fabrication of All-Inorganic Nanocrystal Solids through Matrix Encapsulation of Nanocrystal Arrays,” Journal of the American Chemical Society, vol. 133, 2011, pp. 20488-20499. |
Number | Date | Country | |
---|---|---|---|
20190386182 A1 | Dec 2019 | US |