1. Field of the Invention
The present invention generally relates to radiation imaging, and in particular it relates to a radiation tube applicable to X-ray imaging or the like in the field of medical equipment and the field of industrial equipment. An embodiment of the present invention relates to a radiation imaging system using the radiation tube.
2. Description of the Related Art
Generally, in a radiation tube including a control electrode, the trajectory of an electron beam emitted from an electron source is controlled by the control electrode. The electron beam, whose trajectory is controlled by the control electrode, is caused to collide with a target, whereby radiation is generated from the target. An example of this structure and process is described in Japanese Patent Application Laid-Open No. 2009-245727. In the same field of endeavor, Japanese Patent Application Laid-Open No. 2009-205992 discusses a multi-X-ray generation apparatus in which a shield member is arranged behind a transmission type target. In this manner, unnecessary radiation and reflected electrons headed backwards are blocked, and an improvement in heat radiation characteristics from the target is achieved. Japanese Patent Application Laid-Open No. 2012-79449 discusses an X-ray tube manufacturing method that employs a jig configured to directly connect an anode unit and a cathode unit to each other before they are separately fixed to an envelope. With this manufacturing method, the anode unit and the cathode unit can be aligned with each other with high precision.
In a radiation tube having the above-mentioned shield member, in order to cause an electron to collide with the target at a desired position without causing it to collide with the shield member, it is necessary to perform positioning of the control electrode system and the target with high precision.
Usually, a plurality of electrodes constituting the control electrode system are arranged such that the centers of the openings of the electrodes through which electrons pass are aligned in the same axis. The center of gravity of an electron beam, which is an aggregation of electrons, extends along this axis and passes through the openings of the control electrode system and the opening of the shield member before the target is irradiated with the electron beam. Accordingly, it is necessary to accurately perform positioning of the center axis of the openings of the control electrode system (hereinafter referred to as the opening axis) and the center axis of the opening of the shield member (hereinafter referred to as the opening axis).
In a conventional radiation tube, however, as illustrated in
In such a configuration where the cathode unit 10 and the anode unit 20 are separately mounted to the envelope 40, the positional relationship between an opening 14a of the lens electrode 14 in the control electrode system and an opening 21a of the shield member 21 depends on the machining precision of the envelope 40. When the envelope 40 undergoes deformation due to a temperature change during the operation of the radiation tube, the precision in the positional relationship between the opening 14a of the lens electrode 14 and the opening 21a of the shield member 21 deteriorates.
An aspect of the present invention is directed to a radiation tube with a high positional accuracy, which allows a target and a lens electrode constituting the radiation tube to be accurately aligned during the assembly and prevents the target and the lens from being misaligned after the assembly. Another aspect of the present invention is directed to a radiation imaging system capable of obtaining high-precision images by using the radiation tube.
According to an aspect of the present invention, a radiation tube includes a cathode unit including an electron source, and an anode unit including a target configured to be irradiated with electrons emitted from the electron source to emit radiation and a shield member arranged around the target. The cathode unit and the anode unit are joined to each other via a plurality of spacers.
Further features of the present invention will become apparent from the following description of exemplary embodiments with reference to the attached drawings.
Various exemplary embodiments, features, and aspects of the invention will be described in detail below with reference to the drawings.
The electron source 11 may be a thermal electron source consisting of a combination of an electron emitting material and a heater, or may be a cold cathode such as a field emitter. The extraction electrode 13 includes an opening 13a for allowing passage of an electron beam 71 emitted from the electron source 11. The lens electrode 14 includes an opening 14a for allowing passage of the electron beam 71 that has passed through the opening 13a of the extraction electrode 13. As the material for the retaining member 12, the extraction electrode 13, and the lens electrode 14, molybdenum is generally preferred to be used, which is a high-melting-point metal with low vacuum degassing. To insulate the retaining member 12 from the electron source 11, an insulation layer such as an alumina layer is provided between the retaining member 12 and the electron source 11. As the material for the spacers 51 and 52, which are used to join the retaining member 12 and the extraction electrode 13, and the extraction electrode 13 and the lens electrode 14, respectively, an insulation material such as alumina is used.
An anode unit 20 includes the target 22 and a shield member 21 that is arranged around the target 22. The target 22 is composed of a target film 22a and a target substrate 22b that is coated with the target film 22a. As the material for the target film 22a, tungsten or molybdenum is used, and the thickness of the target film 22a ranges approximately from 0.1 μm to 20 μm. The target film 22a is irradiated with an electron beam of high energy density. It is, therefore, desirable that the target substrate 22b has high heat conductivity to enhance the heat radiation property. For example, a diamond substrate with a thickness of 0.3 mm to 5 mm is used. Further, to ensure the required positional precision of the target 22, it is desirable that the target substrate 22b has a high rigid structure made from a high rigid material.
Among the components of radiation and reflected electrons generated from the target 22, the shield member 21 shields those headed backwards, i.e., headed for the cathode unit 10, and also radiates the heat generated from the target 22 to the outside of the radiation tube 100. As a material having a radiation shielding function, oxygen-free copper is preferably used. Further, as illustrated in
The anode unit 20 is mounted to an opening provided in the envelope 40, and the cathode unit 10 is joined to the envelope 40 by the support members 61. If the envelope 40 is made from a conductive material, the support members 61 are made from an insulating material. As the conductive material for the envelope 40, SUS304 is preferably used, and, as the insulating material, alumina is preferably used. As the material for the insulating support members 61, alumina is also preferably used. If the envelope 40 is made from a conductive material, the envelope 40 and the anode unit 20 have the same electrical potential. Usually, the target 22 is set to the grounding potential via the shield member 21. Thus, as in the present exemplary embodiment, when the anode unit 20 is mounted to the opening of the envelope 40, and the envelope 40 is made from a conductive material, the target 22 can be set to the grounding potential by grounding the envelope 40. The support members 61 may be mounted to the envelope 40 by being fastened to the inner wall with screws, or by welding. Further, by providing unevenness on the side surfaces of the insulating support members 61 in the longitudinal direction, the support members 61 have a creeping distance larger than their length, which is desirable from the viewpoint of preventing creeping discharge.
In the present exemplary embodiment, the cathode unit 10 and the anode unit 20 are joined to each other through columnar spacers 30. As illustrated in
As illustrated in
In mounting the spacers 30, two or more reference points are provided on the shield member 21 of the anode unit 20, and reference points corresponding to the above-mentioned reference points are provided on one of the retaining member 12, the extraction electrode 13, and the lens electrode 14 of the cathode unit 10. The reference points of the anode unit 20 and the reference points of the cathode unit 10 are provided in pairs, and the respective pairs are joined together by the respective spacers 30 provided in the same number as the pairs. The positional relationship between the shield member 21 and the target 22, and the positional relationship between the retaining member 12, the extraction electrode 13, or the lens electrode 14, and the electron source 11 are guaranteed by machining precision and assembly precision. The optical axis of the electron beam 71 emitted from the electron source 11 is greatly affected by the position of the lens electrode 14, and, therefore, it is desirable to set the reference points of the cathode unit 10 on the lens electrode 14. For this reason, it is beneficial to join the spacers 30 to the lens electrode 14.
In the present exemplary embodiment, only one electron source 11 is provided, the distance between the spacers 30 is small, and the influence of the thermal deformation of the envelope 40 may be considered low. Thus, the cathode unit 10, the anode unit 20, and the spacers 30 are joined and fixed by silver brazing, adhesive or the like. The spacers 30 are made from an insulating material, and it is desirable to use insulating ceramic, specifically, alumina. By providing unevenness on the side surfaces of the spacers 30 in the longitudinal direction, the creeping distance is increased, which is desirable from the viewpoint of preventing creeping discharge.
According to the present exemplary embodiment, the cathode unit 10 and the anode unit 20 can be mounted to the envelope 40 in a state that they are joined together through the spacers 30. Thus, alignment between the opening axis of the lens electrode 14 and the opening axis of the shield member 21 can be performed at a minimum distance, thereby realizing high-precision alignment. In order not to affect the positional relationship between the cathode unit 10 and the anode unit 20 already joined to each other, when mounting them to the envelope 40, a method such as laser welding, which causes less distortion, is used to join the envelope 40 and the anode unit 20. If the shield member 21 and the end portions of the envelope 40 are made from materials that cannot be welded together, it is necessary to previously join a material that allows welding. For example, if the envelope 40 is made from alumina, a Kovar material is previously joined to the opening end portion of the envelope 40 by silver brazing.
The radiation tube 100 according to the present exemplary embodiment provides high-precision alignment during the assembly. Even if a positional deviation occurs in the opening 21a of the shield member 21, the cathode unit 10 follows the positional deviation of the anode unit 20 due to the spacers 30. Thus, a deviation in the positional relationship between the opening axis of the shield member 21 and the opening axis of the lens electrode 14 caused as a result of such a positional deviation, can be suppressed smaller than the positional deviation of the opening 21a.
In the present exemplary embodiment described above, the anode unit 20 is mounted to the opening of the envelope 40 and the cathode unit 10 is mounted to the envelope 40 via the insulating support members 61. However, it is also possible to use a reversed mounting arrangement. That is, it is also possible to mount the cathode unit 10 to an opening provided in the envelope 40, and to join the anode unit 20 to the envelope 40 via support members. In this case, if the envelope 40 is a conductive member, the anode unit 20 is joined to the envelope 40 through insulating support members.
In the third exemplary embodiment, the anode unit 20 is inside the envelope 40, and it is, therefore, necessary to provide a window 80 that allows the radiation generated from the target 22 to be transmitted to the outside of the envelope 40. More specifically, in the portion of the envelope 40 that faces the opening 21a of the shield member 21, a window made from, for example, beryllium is provided so that compatibility between the transmission of radiation and the ensuring of vacuum airtightness is achieved.
In the first through third exemplary embodiments, only one electron source is provided. However, in a fourth exemplary embodiment of the present invention, a plurality of electron sources is provided. For the plurality of electron sources, it is possible that the number of extraction electrode openings and of lens electrode openings is one. However, it is desirable that the number is equal to the number of electron sources. If the number is one, the electrons emitted from the plurality of electron sources are collectively controlled. The target is arranged corresponding to the opening of the extraction electrode and that of the lens electrode. If a plurality of electron sources are provided, the number of extraction electrode openings and of lens electrode openings is one, and one target is provided, the configuration is such that the one opening of the lens electrode and the one opening of the shield member are aligned with each other, as in the first through third exemplary embodiments.
In the fourth exemplary embodiment, a configuration will be described, in which an extraction electrode with a plurality of openings and a lens electrode with a plurality of openings are provided, each of the openings of the electrodes corresponds to each of a plurality of electron sources, and each of a plurality of targets is irradiated with electrons. The components other than those described below are similar to the components in the first through third exemplary embodiments, and the description thereof will be omitted.
As an example,
Joining the cathode unit 10 and the anode unit 20 to the spacers 30 is not performed by silver brazing, adhesive or the like but performed by concave-convex fitting and application of a force to pinch the fitting portions. This is due to the fact that there is a plurality of electron sources 11 and that the distance between the two spacers 30 is large, resulting in a great influence of heat changes in the envelope 40.
As illustrated in
The protrusions 30a of the spacer 30 are fitted into recesses each provided in the cathode unit 10 and the anode unit 20. More specifically, as illustrated in
The protrusions 30a of the spacers 30 are formed to be fitted into the recesses serving as the reference points provided in the cathode unit 10 and the anode unit 20, leaving a gap of 0.01 mm to 0.1 mm. As a result, the cathode unit 10 and the anode unit 20 can be joined together with a positional precision of 0.01 mm to 0.1 mm.
The flat portions 30b of the spacers 30 are to be brought into contact with the flat portions provided around the recesses serving as the reference points provided in the cathode unit 10 and the anode unit 20, so that the parallelism between the cathode unit 10 and the anode unit 20 can be maintained at a level not higher than a fixed level. The parallelism is set to be 0.02 mm to 0.1 mm. The parallelism can be expressed as the parallelism of the surface of the lens electrode 14 on the anode unit 20 side when the surface of the anode unit 20 on the cathode unit 10 side is used as the reference surface. The gaps between the recesses serving as the reference points provided in the cathode unit 10 and the anode unit 20, and the protrusions 30a of the spacers 30 can serve as play for allowing shape changes during the operation of the radiation tube 100. In some cases, the size of such gaps is insufficient even if it is 0.1 mm, and shearing stress is applied to the spacers 30. Taking into account such cases, as illustrated in
Further, in the fourth exemplary embodiment, it is desirable that the anode unit 20 includes the shield member 21 formed of the tungsten layer 21b and the copper layer 21c, as in the above-described exemplary embodiments. As illustrated in
In the fourth exemplary embodiment, the cathode unit 10 is joined to the envelope 40 through the support members 61. It is desirable that each of the support members 61 has a columnar shape having a protrusion at one end thereof and the protrusion is fitted into a recess provided in the retaining member 12. In this case, by leaving a gap of 0.5 mm to 2 mm in the fitting portion between the support members 61 and the cathode unit 10, the required play can be secured.
A case will be described where the multi-radiation source according to the fourth exemplary embodiment is applied to a radiation imaging system for mammography that performs tomosynthesis imaging. In tomosynthesis imaging, radiation is applied from different angles to the same region on the irradiation surface of a subject. That is, radiation is applied at angles in a number equal to the number of radiation sources each formed of a pair of an electron source and a target. In this case, front openings 23 of the shield member 21 are formed such that the radiations emitted from the respective targets 22 are applied to the same region on the irradiation surface. That is, the columnar openings 23 are formed such that the direction of the center axis thereof differs according to the arrangement positions of the openings 23. For example, when the center axis of the opening 23 arranged at the center of the anode unit 20 matches the axis along which an electron beam passes, the closer the openings 23 are formed to both end portions of the anode unit 20, the further the center axis is inclined toward the center side. As a result, the center axes of cone-shaped radiation beams emitted from the respective radiation sources can cross each other at a single point on the irradiation surface.
Referring to
As illustrated in
A system control apparatus 202 (e.g., a programmed microprocessor or general computer) controls the radiation generation apparatus 200 and a radiation detection apparatus 201 in conjunction with each other. The drive circuit 101 outputs various control signals to the radiation tube 100 under the control of the system control apparatus 202. The control signals allows the radiation emitted from the radiation generation apparatus 200 to be transmitted through a subject 204 and then detected by a detection apparatus 206. The detection apparatus 206 converts the detected radiation to an image signal, and outputs the image signal to a signal processing unit 205. Under the control of the system control apparatus 202, the signal processing unit 205 performs predetermined signal processing on the image signal, and outputs the processed image signal to the system control apparatus 202. Based on the processed image signal, the system control apparatus 202 outputs to a display apparatus 203 a display signal for displaying an image on the display apparatus 203. The display apparatus 203 displays on the display an image based on the display signal as a captured image of the subject 204. A typical example of the radiation is an X-ray, and the radiation tube 100 and the radiation imaging system according to the fifth exemplary embodiment can be utilized as an X-ray generation unit and an X-ray imaging system. The X-ray imaging system can be used for the nondestructive inspection of an industrial product and for the pathological diagnosis of a human body and an animal.
According to the above-described exemplary embodiments, the radiation tube 100 provides high-precision alignment between the control electrode system and the target, and suppresses the positional deviation during the operation, so that high-precision captured images can be obtained.
In the exemplary embodiments of the present invention, the cathode unit and the anode unit are joined together through a plurality of spacers, so that, during the assembly, the cathode unit and the anode unit can be mounted to the envelope in a state where the units have been joined together. More specifically, the radiation tube is assembled in a state where the opening axis of the lens electrode included in the cathode unit and the opening axis of the shield member included in the anode unit are directly aligned with each other, so that high-precision alignment can be maintained. Further, even if a positional deviation occurs in one of the cathode unit and the anode unit due to thermal deformation of the envelope during the operation of the radiation tube, the other unit follows the positional deviation via the spacers, so that a relative positional deviation between the units can be reduced.
While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. The scope of the following claims is to be accorded the broadest interpretation so as to encompass all such modifications and equivalent structures and functions.
This application claims the benefit of Japanese Patent Application No. 2013-029691 filed Feb. 19, 2013, which is hereby incorporated by reference herein in its entirety.
Number | Date | Country | Kind |
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2013-029691 | Feb 2013 | JP | national |