Patent Application
20250164293
The present disclosure relates to sensors for pressure and temperature, and more particularly to Fabry-Pérot cavity optical sensors for pressure and temperature.
Fabry-Pérot cavity sensors can measure pressure, temperature, or both. The sensor includes a diaphragm that responds to a change in temperature or pressure, a base connected to the diaphragm, an optical cavity, and an optical fiber that may conduct light reflected off of a surface of the diaphragm. An interrogator may be provided for detecting a deflection of the diaphragm. Changes in size of the cavity change the interference of reflected light in the interrogator, which can be calibrated to infer temperature or pressure or both.
The conventional techniques have been considered satisfactory for their intended purpose. However, there is an ever present need for improved systems and methods for Fabry-Pérot cavity optical sensors. This disclosure provides a solution for this need.
A Fabry-Pérot sensor assembly includes an optical element defining a Fabry-Pérot optical cavity therein. A sensor ferrule is affixed to the optical element. The sensor ferrule is configured to physically connect to an optical fiber, optically aligning and spacing the optical fiber with the optical cavity. The sensor ferrule defines a bore for receiving the optical fiber. The bore extends along a longitudinal axis that extends to the optical element. The optical cavity is a second optical member defined between a first optical member and a third optical member spaced apart from the first optical member along the longitudinal axis. At least one of the first optical member and the third optical member includes a radiused surface bounding the optical cavity and spanning across the optical cavity laterally relative to the longitudinal axis.
The radiused surface can be defined on the first optical member. The radiused surface can be defined on the third optical member. The first optical member can also include a radiused surface bounding the optical cavity and spanning across the optical cavity laterally relative to the longitudinal axis. The third optical member can include a contoured outer surface spanning the third optical member laterally relative to the longitudinal axis.
The third optical member can be a diaphragm configured to deflect more than the first optical member under external pressure changes. The optical fiber can be affixed within the sensor ferrule optically aligned with the optical cavity along the axis. An interrogator can be optically connected to the optical fiber. The interrogator can be configured to illuminate the cavity through the optical fiber, to receive reflected spectrum from the cavity, and to measure temperature and/or pressure of the cavity based on the reflected spectrum. An optical path can pass from the bore, through the first optical member, through the optical cavity, reflects off of the third optical member and passes back through the optical cavity and through the first optical member into the bore and back into the fiber. The third optical member can be an endplate with an at least partially mirrored surface for increasing signal reflections in the optical cavity and back into the optical fiber. The first optical member can be a main sensor body, wherein the ferrule can be affixed to the main sensor body. An anti-reflective coating can be included on at least one surface of the optical element.
The optical element can include MgAl2O4 spinel ceramic or single crystal, aluminum oxynitride Al23N27O5 ceramic or single crystal, LaGd doped hafnium or zirconium oxide ceramic (La0.8Gd1.2Hf2O7 ceramic or LaGdZr2O7 ceramic), or Nd doped yttrium aluminum garnet (Nd:YAG) ceramic or single crystal. At least one of the first and third optical members can be MgAl2O4 spinel ceramic or single crystal. At least one of the first and third optical members can be aluminum oxynitride Al23N27O5 ceramic or single crystal. At least one of the first and third optical members can be La0.8Gd1.2Hf2O7 ceramic. At least one of the first and third optical members can be LaGdZr2O7 ceramic. At least one of the first and third optical members can be Nd:YAG ceramic or single crystal.
A method of making a Fabry-Pérot optical cavity includes using a machining and/or grinding process to remove material from a first optical member to form a radiused surface spanning the optical cavity therein, leaving a cavity rim of the optical member surrounding the cavity peripherally. The method includes affixing a third optical member to the cavity rim to enclose the cavity.
These and other features of the systems and methods of the subject disclosure will become more readily apparent to those skilled in the art from the following detailed description of the preferred embodiments taken in conjunction with the drawings.
So that those skilled in the art to which the subject disclosure appertains will readily understand how to make and use the devices and methods of the subject disclosure without undue experimentation, preferred embodiments thereof will be described in detail herein below with reference to certain figures, wherein:
Reference will now be made to the drawings wherein like reference numerals identify similar structural features or aspects of the subject disclosure. For purposes of explanation and illustration, and not limitation, a partial view of an embodiment of a sensor assembly in accordance with the disclosure is shown in
The Fabry-Pérot sensor, i.e. etalon, assembly 100 includes an optical element 102 defining a Fabry-Pérot optical cavity 104 therein. A sensor ferrule 106 is affixed to the optical element 102. The sensor ferrule 106 is physically connected to an optical fiber 108 which may have its own fiber ferrule, thereby aligning the optical fiber 108 optically with the cavity 104 thereby ensuring optical alignment with the optical element 102. The optical element 102 can include MgAl2O4 spinel ceramic or single crystal, aluminum oxynitride Al23N27O5 ceramic or single crystal, La0.8Gd1.2Hf2O7 ceramic, LaGdZr2O7 ceramic, or Nd doped yttrium aluminum garnet (Nd:YAG) ceramic or single crystal and the sensor ferrule 106 optionally includes MgAl2O4 spinel ceramic or single crystal, aluminum oxynitride Al23N27O5 ceramic or single crystal, La0.8Gd1.2Hf2O7 ceramic, LaGdZr2O7 ceramic, or Nd doped yttrium aluminum garnet (Nd:YAG) ceramic or single crystal. The optical fiber 108 is affixed within a bore 110 the ferrule 106 optically aligned with the cavity 104. Additionally, bore 110 may also accommodate a fiber ferrule on the sensor end of the optical fiber 108 in order to facilitate optical alignment and spacing of the core of the optical fiber 108 with the optical element 102. An interrogator 112 is optically connected to the optical fiber 108, i.e. to an end of the optical fiber 108 opposite then end of the optical fiber 108 that is connected to the sensor ferrule 106. The interrogator 112 is thus configured to illuminate the optical cavity 104 through the optical fiber 108, to receive reflected spectrum from the cavity 104, and to measure temperature and/or pressure exhibited on the optical element 102 based on the reflected spectrum.
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The systems and methods as disclosed herein provide potential benefits including the following. They facilitate accurate manufacturing from sensor to sensor. The methods and systems of the present disclosure, as described above and as shown in the drawings, provide for facilitating the manufacture of Fabry-Pérot sensors for optically based temperature and pressure measurements. While the apparatus and methods of the subject disclosure have been shown and described with reference to preferred embodiments, those skilled in the art will readily appreciate that changes and/or modifications may be made thereto without departing from the scope of the subject disclosure.
