Number | Name | Date | Kind |
---|---|---|---|
5241429 | Holsinger | Aug 1993 | |
5764451 | Katz | Jun 1998 |
Entry |
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Article, "Silicon Micromachined SCALED* Technology", IEEE Transactions on Industrial Electronics, Denny K. Miu and Yu-Chong Tai, vol. 42 No. 3 Jun. 1995, pp.234-239. |
Article, "Silicon Microstructure and Microactuators for Compact Computer Disk Drives", Silicon Microstructure and Microactuators for Compact Computer Disk Drives, Denny K. Miu, pp. 1-12. |