Receiver having a suspended motor assembly

Information

  • Patent Grant
  • 10009693
  • Patent Number
    10,009,693
  • Date Filed
    Thursday, January 28, 2016
    8 years ago
  • Date Issued
    Tuesday, June 26, 2018
    6 years ago
Abstract
A receiver including a housing defining a chamber, and a motor assembly that includes a magnet assembly and an armature. The receiver includes a diaphragm operationally attached to the armature. The motor assembly is attached to the housing by a movable suspension structure. A method of reducing vibrations includes providing a housing defining a chamber, providing a motor assembly including a magnet assembly and an armature, providing a diaphragm, providing a movable suspension structure, attaching the diaphragm to the armature, and attaching the motor assembly to an inner wall of the housing by the movable suspension structure.
Description
CROSS-REFERENCE TO RELATED APPLICATION

This application claims the benefit of European Patent Application Serial No. 15153247.0, filed Jan. 30, 2015, and titled “A receiver having a suspended motor assembly,” which is incorporated herein by reference in its entirety.


FIELD OF THE INVENTION

The present invention relates to a receiver comprising a motor assembly with a magnet assembly and an armature, and a diaphragm operationally attached to the armature.


BACKGROUND OF THE INVENTION

Traditionally, a motor assembly is fixedly attached to the receiver housing inside a chamber defined by the housing. However, as production of sound will cause the motor assembly to vibrate, the receiver itself will vibrate during operation which affects the hearing aid due to interaction with other parts of the hearing aid.


SUMMARY OF INVENTION

It is an object of embodiment of the invention to provide an improved receiver.


It is a further object of embodiments of the invention to provide a receiver in which vibrations are reduced compared to traditional receivers.


According to a first aspect, the invention provides a receiver comprising:

    • a housing defining a chamber,
    • a motor assembly comprising:
      • a magnet assembly, and
      • an armature, and
    • a diaphragm operationally attached to the armature,


      wherein the motor assembly is attached to the housing by a movable suspension structure.


The receiver is adapted to transform electrical energy into mechanical energy by movement of the armature whereby sound waves may be created by movement of the diaphragm which is operationally attached to the armature. The housing may comprise an output opening configured to output sound from the chamber.


The receiver may be adapted to form part of any hearing aid, such as a Behind-the-Ear (BTE) device, an In the Ear (ITE) device, a Receiver in the Canal (RIC) device, or any other hearing aid. In the context of the present invention, the term “hearing aid” shall be understood as an electromagnetic device which is adapted to amplify and modulate sound and to output this sound to a user, such as into the ear canal of a user.


The receiver comprises a motor assembly and an armature.


In one embodiment the motor assembly comprises a magnet assembly for providing a magnetic field in an air gap, where the armature comprises a first leg extending in a first direction through the air gap.


It should be understood, that the present invention is not limited to balanced receivers. Also moving coil receivers, electrostatic receivers, and other receivers are within the scope of the invention.


The magnet assembly for providing a magnetic field in an air gap through which the first leg extends may be provided by a first and a second magnet portion positioned on opposite sides of the first leg and defining an air gap between them. In one embodiment, the first and second magnet portions are separate magnets which provide a magnetic field. In an alternative embodiment, the first and second magnet portions are two parts of a single magnet, e.g. formed as a U-shaped magnet, or the magnet assembly may be formed by one magnet and a yoke of a magnetically conducting material.


The armature may be made from any type of material, element and/or assembly able to guide or carry a magnetic flux. The armature may be electrically conducting or not.


The armature may comprise a first leg extending in a first direction through the air gap. The first leg may extend primarily in the longitudinal direction, i.e. the direction in which the armature has the longest extend.


The receiver further comprises a diaphragm which is operationally attached to the armature, such that movement of the armature is transferred to the diaphragm. It will be appreciated that movement of the diaphragm causes sound waves to be generated. In one embodiment, the diaphragm is operationally attached to the armature by means of a diaphragm connecting member, such as a drive pin. Alternatively, the diaphragm may itself be attached to the armature.


The diaphragm may comprise a plastic material, such as a polymer, or alternatively a metal material such as aluminium, nickel, stainless steel, or any other similar material. It should however be understood, that the diaphragm may comprise a plurality of materials. The diaphragm may divide the chamber into two chambers, such as a front volume and a back volume.


By attaching the motor assembly to the housing by a movable suspension structure inside the chamber defined by the housing, the motor assembly can move in the chamber, whereby it may be possible to decouple the mass of the motor assembly from the housing and thus isolate movements of the motor assembly from the housing. Consequently, vibration transfer from the receiver may be reduced, whereby the vibration force on the outer surface of the receiver may be reduced.


It should be understood that the movable suspension structure may particularly be the only connection between the motor assembly and an inner wall of the housing, whereby the motor assembly can move in the chamber only attached by the suspension structure. Thus, in one embodiment, the motor assembly is only attached to the housing in the chamber by a movable suspension structure.


In other words, the motor assembly may be floating in the chamber while only being attached to the housing by the movable suspension structure. Thus, the suspension structure is formed as a compliant element which holds the motor assembly in the chamber. The suspension structure may be formed as a single element or of a plurality of elements.


The movable suspension structure may be attached to an inner wall of the housing at a single attachment point or at a plurality of attachments points. This will limit the area at which the motor assembly is attached to the inner wall of the housing, thereby allowing the motor assembly to move more freely in the chamber.


It should be understood, that the movable suspension structure may form part of the motor assembly or may alternatively be a separate element allowing the motor assembly to move within the chamber while at the same time being attached to the housing.


To facilitate dampening of vibration transfer, the motor assembly may be configured for pivotal movement around a pivot axis being substantially perpendicular to the first direction. This may be achieved by arranging the suspension structure at an end face of the motor assembly, and particularly to arrange the suspension structure at an end face which terminates the motor assembly in the first direction. This may allow the motor assembly to pivot around the pivot axis in the first direction, whereby the largest deflection will be at the free end of the motor assembly opposite to the end face at which the motor assembly is movably attached to the housing.


The movable suspension structure may in one embodiment comprise a hinge structure, such as a metal flexure hinge. Flexure hinges provide a balance between large compliance in the first direction and low compliance in the remaining translational degrees of freedom. In one embodiment, the suspension structure may comprise two flexure hinges arranged in parallel at the end face thereby reducing the possibilities of movement of the motor assembly in other directions than around the pivot axis.


Alternatively, a second diaphragm may form the movable suspension structure or form part of the movable suspension structure. In this embodiment, the motor assembly may be rigidly attached to the second diaphragm which may be movably attached to the housing to allow pivotal movement of the motor assembly with the second diaphragm in the housing.


It should be understood, that the movable suspension structure may also comprise other elements, such as spirals and similar elements allowing for pivotal movement of the motor assembly in the housing, such as leaf springs, torsion springs, a membrane suspension, a suspension made from a material having a low stiffness, such as a gel, etc.


The movable suspension structure may be chosen so that the resonance frequency for movement of the motor assembly with the suspension structure is less than 500 Hz, whereby the resonance frequency may be out of the range where vibrations cause problems for hearing aids.


It should be understood, that pivotal suspension is an example of suspension. Other suspensions, such as translational suspensions may also be used; e.g. by providing the suspension structure in the form of two springs at one side of the motor assembly to allow lateral movement of the motor assembly; i.e. movement substantial perpendicular to the first direction.


As the receiver may be exposed to mechanical shocks, e.g. if dropped on the floor, it may be an advantage if the receiver additionally comprises a limiting member configured to decrease relative movement between the housing and the motor assembly. The limiting member may limit deflection to a maximum of 100 μm. It should however be understood, that the characteristics of the limiting member may depend on e.g. the size and/or weight of at least some of the elements of the receiver.


The limiting member may comprise a non-linear spring element, i.e. a spring element having a spring constant which is very small for small displacements and a spring constant being considerably higher for larger displacement thereby limiting the impact of dropping.


Alternatively, the limiting member may be formed as a slot/an opening into which the motor assembly extends or into which an element attached to the motor assembly extends. Movement of the motor assembly can be limited by the size of the slot/opening in the movement direction.


The armature may form an E-shape with three legs extending substantially parallel in the first direction. The first leg may form the central leg of three legs. The two other legs extending in the same direction may be arranged so that they do not extend through the air gap, but in parallel to the air gap.


The movable suspension structure may be arranged at the part of the E-shaped armature which connects the three legs whereby the legs may pivot around the pivot axis with the largest deflection at the free ends of the three legs.


In an alternative embodiment, the movable suspension structure may be arranged below or above the motor assembly to enable movement of the motor assembly primarily perpendicular to the first direction.


Furthermore, it should be understood, that the first leg may in one embodiment be the sole leg which extends through the air gap provided by the magnet assembly.


The receiver may comprise a coil which may comprise a number of windings defining a coil tunnel through which the first leg may extend. In one embodiment, the coil may form part of the motor assembly.


In embodiments were the armature is E-shaped, the coil tunnel and the air gap may be arranged adjacent to each other so that the first leg can extend though both the coil tunnel and the air gap.


In an alternative embodiment, the armature may form a U-shape with two legs extending substantially parallel in the first direction. The first leg may form one of the two legs. The other leg extending in the same direction may be arranged so that it does not extend through the air gap, but in parallel to the air gap.


In embodiments were the armature is U-shaped, the coil tunnel and the air gap may likewise be arranged adjacent to each other so that the first leg can extend though both the coil tunnel and the air gap. Alternatively, the coil tunnel and the air gap may be arranged above each other so that the first leg can extend through the air gap and so that second leg can extend through the coil tunnel. Thus, the first leg or the second leg forming the other one of the two legs of the U-shaped armature may extend through the coil tunnel.


The movable suspension structure may be arranged at the part of the U-shaped armature which connects the two legs whereby the legs may pivot around the pivot axis with the largest deflection at the free ends of the two legs.


However, as mentioned above, the movable suspension structure may be arranged below or above the motor assembly to enable movement of the motor assembly primarily perpendicular to the first direction.


In an alternative embodiment, the movable suspension structure may be arranged at the magnet assembly.


As mentioned above, the receiver may comprise a second diaphragm being operationally attached to the motor assembly, which in one embodiment may form the movable suspension structure.


A second diaphragm may further introduce a second front volume which may be acoustically connected to the first front volume. It should however be understood, that the two front volumes may in an alternative embodiment be provided with no acoustical connection there between.


The two front volumes may be connected by a common spout section. Alternatively, they may have separate spouts. The connections between the front volumes and the spout(s) may have different properties. As an example, is may be possible to modify the acoustic masse and resistance by changing e.g. the connections or by adding a grid.


The suspension of the motor assembly may reduce the sound output. The application of a second diaphragm may however counteract this reduction.


By suspending the motor assembly, the stiffness of the motor assembly and other parts of the receiver may be reduced. To at least partly counteract this, the receiver may further comprise a stiffening member coupling the magnet assembly to at least one of the diaphragm, the coil, and the second diaphragm.


The stiffening member may increase the motor assembly stiffness enough to ensure that there is no motor assembly resonances below 10 kHz, expect for the desired armature resonance.


The stiffening member may comprise a substantially rigid element, such as a metal plate or block, which may be arranged so that it connects the magnet assembly and the armature to provide a more rigid connection between these parts of the receiver as this may limit the potential movement of the motor assembly in the housing and thereby limit the deflection at the free end of the motor assembly.


By increasing the thickness of the second diaphragm and connecting it directly to the motor assembly, the stiffness my likewise be increased.


The motor assembly may further comprise a positioning element configured for variable positioning of the motor assembly relative to the diaphragm and/or the second diaphragm. This enables optimising of the front and back volumes, as the position of the motor assembly may be varied relative to at least one of the diaphragms.


According to a second aspect, the invention provides a hearing aid comprising a receiver according to the first aspect of the invention, wherein the housing is arranged in a shell formed by the hearing aid.


It should be understood, that a skilled person would readily recognise that any feature described in combination with the first aspect of the invention could also be combined with the second aspect of the invention, and vice versa.


The receiver according to the first aspect of the invention is very suitable for use in a hearing aid according to the second aspect of the invention. The remarks set forth above in relation to the receiver are therefore equally applicable in relation to the hearing aid.


According to a third aspect, the invention provides a method of reducing vibrations in a receiver, the method comprising the steps of:

    • providing a housing defining a chamber,
    • providing a motor assembly comprising a magnet assembly and an armature, and
    • providing a diaphragm,
    • providing a movable suspension structure,
    • attaching the diaphragm to the armature, and
    • attaching the motor assembly to an inner wall of the housing by the movable suspension structure.


It should be understood, that a skilled person would readily recognise that any feature described in combination with the first aspect of the invention could also be combined with the third aspect of the invention, and vice versa.


The receiver according to the first aspect of the invention is very suitable for performing the method steps according to the third aspect of the invention. The remarks set forth above in relation to the receiver are therefore equally applicable in relation to the method.





BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the invention will now be further described with reference to the drawings, in which:



FIG. 1 illustrates an embodiment of a receiver according to the invention,



FIGS. 2a and 2b schematically illustrate different embodiments of a suspension element according to the invention,



FIGS. 3a and 3b illustrate an embodiment of a housing for a receiver,



FIG. 4 illustrates an alternative embodiment of a receiver,



FIGS. 5a-5c schematically illustrate a different embodiment of a suspension element according to the invention,



FIG. 6 illustrates a further alternative embodiment of a receiver, and



FIGS. 7a and 7b schematically illustrate different embodiments of a limiting member according to the invention.





DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

It should be understood that the detailed description and specific examples, while indicating embodiments of the invention, are given by way of illustration only, since various changes and modifications within the spirit and scope of the invention will become apparent to those skilled in the art from this detailed description.



FIG. 1 illustrates an embodiment of a receiver 1 which comprises a housing 2 (see FIGS. 3a/3b) defining a chamber.


Additionally, the receiver 1 comprises a motor assembly 100 which comprises a magnet assembly 4 and an armature 5. In the illustrated embodiment, the armature 5 is E-shaped.


The magnet assembly 4 provides a magnetic field in an air gap. The armature 5 comprises a first leg 5a extending in a first direction through the air gap. The two other legs 5b of the E-shaped armature 5 extend parallel to the first leg 5a outside the air gap.


Furthermore, the receiver 1 comprises a diaphragm 6 which is operationally attached to the armature 5. In the illustrated embodiment, the diaphragm 6 is attached via the drive pin 7.


The motor assembly 100 is attached to the housing 2 by a movable suspension structure 8. By attaching the motor assembly to the housing 2 by the movable suspension structure 8, the motor assembly can move in the chamber, whereby the mass of the motor assembly can be decoupled from the housing to isolate movements of the motor assembly from the housing 2.


In the illustrated embodiment, the movable suspension structure 8 comprises a hinge (not shown) which forms part of a bent plate 9 which is attached to the motor assembly. The bent plate 9 increases rigidity of the movable suspension structure 8.


The receiver 1 further comprises a coil 10 which comprises a number of windings defining a coil tunnel through which the first leg 5a extends. In this embodiment, the coil tunnel and the air gap are arranged adjacent to each other so that the first leg 5a extends though both the coil tunnel and the air gap.


The receiver 1 additionally comprises a stiffening member 11 configured to counteract the decreased stiffness of the receiver. In the illustrated embodiment, the stiffening member 11 comprises a substantially rigid element, in the form of a metal plate which is arranged so that it connects the magnet assembly 4, the coil 10, and the armature 5 to provide a more rigid connection between these parts of the receiver 1.


Additionally, the receiver 1 comprises a limiting member 12 configured to decrease the maximal possible relative movement between the housing 2 and the motor assembly 100. In the illustrated embodiment, the limiting member 12 is formed by two sets of elongated blocks between which the two legs 5b of the E-shaped armature 5 can move thereby limiting the movement of the motor assembly 100 comprising the armature 5.



FIGS. 2a and 2b schematically illustrate different two embodiments of a receiver 1, 101 comprising two different suspension elements 8, 108.


The receiver 1 illustrated in FIG. 2a comprises a moveable suspension structure in the form of a hinge 8, which allows the motor assembly 100 to pivot around a pivot axis being substantially perpendicular to the first direction. At FIG. 2a the pivotal movement is illustrated by the arrow P, whereas the first direction is illustrated by the arrow X. As the suspension structure 8 is arranged at the end face 13 which terminates the motor assembly 100 in the first direction X, the largest deflection of the motor assembly 100 will be at the free end 14 of the motor assembly opposite to the end face at which the motor assembly 100 is movably attached to the housing 2.


The receiver 101 illustrated in FIG. 2b comprises a moveable suspension structure in the form of two springs 108, which allows the motor assembly 100 to move in a direction Y being substantially perpendicular to the first direction X. FIGS. 3a and 3b illustrate an embodiment of a housing 2 for a receiver 201. The receiver 201 comprises a diaphragm 6 being operationally attached to the armature (not shown). Additionally, the receiver 201 comprises a second diaphragm 15 which forms part of the movable suspension structure, as shown in more details in FIG. 4.


As illustrated in FIG. 4, the receiver 201 comprises a second diaphragm 15 which forms part of the movable suspension structure. The motor assembly is rigidly attached to the second diaphragm 15 which is movably attached to the housing 2 to allow pivotal movement of the motor assembly with the second diaphragm 12 in the housing 2.



FIG. 5a schematically illustrates the embodiment of the receiver 201 comprising two diaphragms 6, 15 where the second diaphragm 15 is rigidly attached to the motor assembly 100. FIGS. 5b and 5c schematically illustrate a receiver 201 where the second diaphragm 15 forms part of the suspension element 8 in two different ways.


In FIG. 5b, the motor assembly 100 is attached to the housing 2 by the movable suspension structure 8 comprising a hinge which allows the motor assembly 100 to pivot around a pivot axis being substantially perpendicular to the first direction. Additionally, the motor assembly 100 is rigidly attached to the second diaphragm 15 which is movably attached to the housing 2 by two springs 108 allows the motor assembly 100 to move in a direction substantially perpendicular to the first direction. Consequently, the maximal pivotal movement enabled by the hinge 8 may be limited by the springs 108.


In FIG. 5c, the motor assembly 100 is rigidly attached to the second diaphragm 15 which is movably attached to the housing 2 by the movable suspension structure 8 comprising a hinge. This allows the motor assembly 100 and the second diaphragm to pivot around a pivot axis being substantially perpendicular to the first direction.



FIG. 6 illustrates a receiver 301 comprising an alternative movable suspension structure 308 comprising two metal flexure hinges. The two flexure hinges 308 arranged in parallel at the end face 13 reduces the possibilities of movement of the motor assembly in other directions than around the pivot axis being perpendicular to the first direction illustrated by the arrow X.



FIGS. 7a and 7b schematically illustrate two different embodiments of a limiting member 12, 112 according to the invention. In FIG. 7a, a part of the motor assembly 100 including the armature 5 extends into a slot 16 between two parts of the housing 2 whereby movement of the motor assembly 100 is limited. In the illustrated embodiment, the slot 16 is formed in a separate element 2′ which is fixedly attached to the housing 2 whereby the slot 16 cannot move relative to the housing 2 thereby providing the required limitation of the movements of the motor assembly 100. It should be understood, that the slot in an alternative embodiment may form part of the inner wall of the housing.


In FIG. 7b, a part of the armature 5 extends into a slot 16 between two parts of the housing 2 which likewise limits movement of the motor assembly 100.

Claims
  • 1. A miniature receiver comprising: a housing defining a chamber of the miniature receiver suitable for use in a hearing aid;a motor assembly including a magnet assembly and an armature having at least a first leg and a second leg extending substantially parallel in a first direction; anda diaphragm operationally attached to the armature,wherein the motor assembly is attached at an end face thereof to a movable suspension structure to allow a free end of the motor assembly opposite to the end face thereof to move inside the chamber,wherein the movable suspension structure is attached to an inner wall of the housing at a single attachment point,wherein the motor assembly is configured for pivotal movement around a pivot axis that is substantially perpendicular to the first direction,wherein the movable suspension structure is configured for decoupling the mass of the motor assembly from the housing, the movable suspension structure is configured to isolate movement of the motor assembly from the housing, and the movable suspension structure is configured for reducing vibration transfer from the miniature receiver.
  • 2. A receiver according to claim 1, further comprising a limiting member configured to decrease relative movement between the housing and the motor assembly.
  • 3. A receiver according to claim 1, wherein the magnet assembly is configured for providing a magnetic field in an air gap, and wherein the first leg extends through the air gap.
  • 4. A receiver according to claim 3, wherein the armature forms an E-shape with three legs extending substantially parallel in the first direction, and wherein the first leg forms the central leg of the three legs.
  • 5. A receiver according to claim 4, wherein the first leg extends through a coil tunnel.
  • 6. A receiver according to claim 1, wherein the armature forms a U-shape with two legs extending substantially parallel in the first direction.
  • 7. A receiver according to claim 6, wherein the first leg or a second leg, forming the other one of the two legs of the U-shaped armature, extends through a coil tunnel.
  • 8. A receiver according to claim 1, further comprising a second diaphragm being operationally attached to the motor assembly.
  • 9. A receiver according to claim 1, further comprising a stiffening member coupling the magnet assembly to at least one of the diaphragm, the coil, and the second diaphragm.
  • 10. A hearing aid comprising a receiver according to claim 1, wherein the housing is arranged in a shell formed by the hearing aid.
  • 11. A method of reducing vibrations in a receiver, the method comprising the steps of: providing a housing defining a chamber of the miniature receiver suitable for use in a hearing aid,providing a motor assembly including a magnet assembly and an armature having at least a first leg and a second leg extending substantially parallel in a first direction,providing a diaphragm,providing a movable suspension structure,attaching the diaphragm to the armature,attaching the motor assembly at an end face thereof to the movable suspension structure to allow a free end of the motor assembly opposite to the end face thereof to move inside the chamber, andattaching the movable suspension structure to an inner wall of the housing at a single attachment point such that the motor assembly is configured for pivotal movement around a pivot axis that is substantially perpendicular to the first direction,wherein the movable suspension structure is configured for decoupling the mass of the motor assembly from the housing, the movable suspension structure is configured to isolate movement of the motor assembly from the housing, and the movable suspension structure is configured for reducing vibration transfer from the miniature receiver.
Priority Claims (1)
Number Date Country Kind
15153247 Jan 2015 EP regional
US Referenced Citations (140)
Number Name Date Kind
3313892 Cross Apr 1967 A
3560667 Carlson Feb 1971 A
3588383 Carlson Jun 1971 A
3617653 Tibbetts Nov 1971 A
4126769 Broersma Nov 1978 A
5193116 Mostardo Mar 1993 A
5647013 Salvage Jul 1997 A
5809158 van Halteren Sep 1998 A
5913815 Ball Jun 1999 A
6075870 Geschiere Jun 2000 A
6208237 Saiki Mar 2001 B1
6211775 Lee Apr 2001 B1
6466682 An Oct 2002 B2
6526153 Tibbetts Feb 2003 B2
6658134 van Hal Dec 2003 B1
6788796 Miles et al. Sep 2004 B1
6810128 Kaneda Oct 2004 B2
6831577 Furst Dec 2004 B1
6853290 Jorgensen et al. Feb 2005 B2
6859542 Johannsen et al. Feb 2005 B2
6888408 Furst et al. May 2005 B2
6914992 van Halteren et al. Jul 2005 B1
6919519 Ravnkilde et al. Jul 2005 B2
6930259 Jorgensen et al. Aug 2005 B1
6943308 Ravnkilde et al. Sep 2005 B2
6974921 Jorgensen et al. Dec 2005 B2
7008271 Jorgensen Mar 2006 B2
7012200 Moller Mar 2006 B2
7062058 Steeman et al. Jun 2006 B2
7062063 Hansen et al. Jun 2006 B2
7072482 Van Doorn et al. Jul 2006 B2
7076079 Chung Jul 2006 B2
7088839 Geschiere et al. Aug 2006 B2
7110560 Stenberg Sep 2006 B2
7110564 Son Sep 2006 B2
7136496 van Halteren et al. Nov 2006 B2
7142682 Mullenborn et al. Nov 2006 B2
7164776 Miller Jan 2007 B2
7181035 van Halteren et al. Feb 2007 B2
7190803 van Halteren Mar 2007 B2
7206428 Geschiere et al. Apr 2007 B2
7221767 Mullenborn et al. May 2007 B2
7221769 Jorgensen May 2007 B1
7227968 van Heltren et al. Jun 2007 B2
7239714 de Blok et al. Jul 2007 B2
7245734 Niederdraenk Jul 2007 B2
7254248 Johannsen et al. Aug 2007 B2
7286680 Steeman et al. Oct 2007 B2
7292700 Engbert et al. Nov 2007 B1
7292876 Bosh et al. Nov 2007 B2
7336794 Furst et al. Feb 2008 B2
7376240 Hansen et al. May 2008 B2
7403630 Jorgensen et al. Jul 2008 B2
7408444 Dufosse Aug 2008 B2
7415121 Mögelin et al. Aug 2008 B2
7425196 Jorgensen et al. Sep 2008 B2
7454025 Saiki Nov 2008 B2
7460681 Geschiere et al. Dec 2008 B2
7466835 Stenberg et al. Dec 2008 B2
7492919 Engbert et al. Feb 2009 B2
7548626 Stenberg et al. Jun 2009 B2
7657048 van Halteren et al. Feb 2010 B2
7684575 van Halteren et al. Mar 2010 B2
7706561 Wilmink et al. Apr 2010 B2
7715583 Van Halteren et al. May 2010 B2
7728237 Pedersen et al. Jun 2010 B2
7809151 Van Halteren et al. Oct 2010 B2
7822218 Van Halteren Oct 2010 B2
7899203 Van Halteren et al. Mar 2011 B2
7912240 Madaffari Mar 2011 B2
7946890 Bondo et al. May 2011 B1
7953241 Jorgensen et al. May 2011 B2
7961553 Kang Jun 2011 B2
7961899 Van Halteren et al. Jun 2011 B2
7970161 van Halteren Jun 2011 B2
7995789 Tsangaris Aug 2011 B2
8098854 van Halteren et al. Jan 2012 B2
8101876 Andreasen et al. Jan 2012 B2
8103039 van Halteren et al. Jan 2012 B2
8160283 Saltykov Apr 2012 B2
8160290 Jorgensen et al. Apr 2012 B2
8170249 Halteren May 2012 B2
8189804 Hruza May 2012 B2
8189820 Wang May 2012 B2
8223996 Beekman et al. Jul 2012 B2
8233652 Jorgensen et al. Jul 2012 B2
8259963 Stenberg et al. Sep 2012 B2
8259976 van Halteren Sep 2012 B2
8259977 Jorgensen et al. Sep 2012 B2
8280082 van Halteren et al. Oct 2012 B2
8284966 Wilk et al. Oct 2012 B2
8313336 Bondo et al. Nov 2012 B2
8315422 van Halteren et al. Nov 2012 B2
8331595 van Halteren Dec 2012 B2
8369552 Engbert et al. Feb 2013 B2
8379899 van Halteren et al. Feb 2013 B2
8416980 Kang Apr 2013 B2
8509468 van Halteren et al. Aug 2013 B2
8526651 Lafort et al. Sep 2013 B2
8526652 Ambrose et al. Sep 2013 B2
8712084 Mocking Apr 2014 B2
9432774 Bolsman Aug 2016 B2
9485585 McCratic Nov 2016 B2
20020061113 van Halteren May 2002 A1
20020146141 Geschiere Oct 2002 A1
20040258260 Thompson Dec 2004 A1
20050111688 Wilmink May 2005 A1
20050147272 Hyre Jul 2005 A1
20050152574 Van Banning Jul 2005 A1
20050276434 Kobayashi Dec 2005 A1
20070058833 Van Halteren Mar 2007 A1
20100014700 Zhou Jan 2010 A1
20100103778 Kang Apr 2010 A1
20100284561 Miller et al. Nov 2010 A1
20110182453 van Hal et al. Jul 2011 A1
20110189880 Bondo et al. Aug 2011 A1
20110299708 Bondo et al. Dec 2011 A1
20110299712 Bondo et al. Dec 2011 A1
20110311069 Ambrose et al. Dec 2011 A1
20120014548 van Halteren Jan 2012 A1
20120027245 van Halteren et al. Feb 2012 A1
20120033849 Kang Feb 2012 A1
20120140966 Mocking et al. Jun 2012 A1
20120155683 van Halteren Jun 2012 A1
20120155694 Reeuwijk Jun 2012 A1
20120255805 van Halteren Oct 2012 A1
20130028451 de Roo Jan 2013 A1
20130136284 van Hal et al. May 2013 A1
20130142370 Engbert et al. Jun 2013 A1
20130163799 Van Halteren Jun 2013 A1
20130195295 van Halteren et al. Aug 2013 A1
20130195311 Sahyoun Aug 2013 A1
20140146995 Adelman May 2014 A1
20140348369 Nevill Nov 2014 A1
20150207392 Iwakura Jul 2015 A1
20150245141 van Halteren Aug 2015 A1
20150289060 Bolsman Oct 2015 A1
20150319526 Kunimoto Nov 2015 A1
20150372580 Lucas Dec 2015 A1
20160205479 Tomar Jul 2016 A1
Foreign Referenced Citations (4)
Number Date Country
1353531 Oct 2003 EP
1555850 Jul 2005 EP
1353531 Dec 2006 EP
2013138234 Sep 2013 WO
Non-Patent Literature Citations (2)
Entry
Extended European Search Report for Application No. EP 16153075.3, dated Jun. 3, 2016 (4 pages).
European Search Report corresponding to co-pending European Patent Application No. 15153247.0, European Patent Office, dated Sep. 7, 2015; (4 pages).
Related Publications (1)
Number Date Country
20160227328 A1 Aug 2016 US