Claims
- 1. A microphotonic device comprising:
a membrane structure that can experience strain; and a waveguide element formed on said membrane structure so that when said membrane structure is strained, said waveguide element is tuned to a selective amount.
- 2. The microphotonic device of claim 1, wherein said membrane structure comprises a sub-micron SiO2 layer.
- 3. The microphotonic device of claim 1, wherein said waveguide element comprises a microring resonator.
- 4. The microphotonic device of claim 1, wherein said waveguide element comprises a microracetrack resonator.
- 5. The microphotonic device of claim 1, wherein said waveguide element comprises a 1-dimensional photonic crystal.
- 6. The microphotonic device of claim 1, wherein said waveguide element comprises a 2-dimensional photonic crystal.
- 7. The microphotonic device of claim 5, wherein said 1-dimensional photonic crystal comprises holes.
- 8. The microphotonic device of claim 7, wherein said selective amount comprises approximately 1%.
- 9. The microphotonic device of claim 3, wherein said selective amount comprises 0.2%.
- 10. The microphotonic device of claim 1 further comprising at least one piezoelectric actuator that is coupled to said membrane so as to produce said strain.
- 11. A method of forming a microphotonic device comprising:
providing a membrane structure that can experience strain; and forming a waveguide element on said membrane structure so that when said membrane structure is strained said waveguide element is tuned to a selective amount.
- 12. The method of claim 11, wherein said membrane structure comprises a sub-micron SiO2 layer.
- 13. The method of claim 11, wherein said waveguide element comprises a microring resonator.
- 14. The method of claim 1, wherein said waveguide element comprises a microracetrack resonator.
- 15. The method of claim 11, wherein said waveguide element comprises a 1-dimensional photonic crystal.
- 16. The method of claim 11, wherein said waveguide element comprises a 2-dimensional photonic crystal.
- 17. The method of claim 15, wherein said 1-dimensional photonic crystal comprises holes.
- 18. The method of claim 17, wherein said selective amount comprises approximately 1%.
- 19. The method of claim 13, wherein said selective amount comprises 0.2%.
- 20. The method of claim 11 further comprising providing at least one piezoelectric actuator that is coupled to said membrane so as to produce said strain.
PRIORITY INFORMATION
[0001] This application claims priority from provisional application Ser. No. 60/395,932 filed Jul. 12, 2002, which is incorporated herein by reference in its entirety.
Provisional Applications (1)
|
Number |
Date |
Country |
|
60395932 |
Jul 2002 |
US |