Number | Name | Date | Kind |
---|---|---|---|
3982066 | Nyman et al. | Mar 1976 | |
4004080 | Vossen, Jr. et al. | Jan 1977 | |
4044379 | Halter | Aug 1977 | |
4072985 | Kaganowicz et al. | Feb 1978 | |
4077051 | Vossen, Jr. | Feb 1978 |
Entry |
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Vossen et al., "Thin Film Processes", (1978) pp. 48-73. |
N. Schwartz, "Reactive Sputtering", Bell Telephone Labs, Inc., pp. 325-334. |
A. J. Purdes et al., "Copper/Oxygen Glow Discharge Spectrometry", J.Vac.Sci.Technol., vol. 14, No. 1, Jan./Feb. 1977, pp. 98-101. |