The present disclosure relates to filters for filtering fluids. In particular, the present disclosure relates to filters used for filtering materials from fluids.
Filters are used to remove containments or unwanted materials from a fluid before the fluid is dispensed. Fluids used in manufacturing, for example in the semiconductor manufacturing industry, often use filters to remove contaminants or unwanted materials from the fluid before the fluid is dispensed. Useful fluids that are processed using filters include water, liquid industrial solvent, inks, and processing fluids (e.g., in semiconductor fabrication). Unwanted materials to be removed from fluids include impurities and contaminants such as solid particles. Examples of filter applications include their use to process ultrapure aqueous solutions, organic solvent solutions, water, and the like for use in microelectronics and semiconductor processing. To perform a filtration function, a filter includes a filter member that is responsible for removing the unwanted material. The filter membrane can be contained within a housing such that liquid as it flows through the housing is filtered as the fluid passes through the housing.
In an embodiment, a filter cartridge is for filtering a fluid. The filter cartridge includes a housing, a filter member disposed within the housing, and an endcap disposed within the housing. The housing includes a first end, a second end opposite to the first end, an inlet disposed in the first end of the housing, and an outlet. The filter member is configured to filter the fluid flowing through the housing from the inlet to the outlet. The filter member includes a first axial end that faces the first end of the housing and a second axial end that faces the second end of the housing. The endcap disposed between the first axial end of the filter member and the inlet in the housing. The endcap includes an outer side that faces towards the first end of the housing and a plurality of fins projecting from the outer side of the endcap. The plurality of fins each extending in a curved shape along the outer side of the endcap. The plurality of fins configured to redirect the fluid flowing into the filter cartridge through the inlet in the housing.
In an embodiment, an endcap is for a filter member in a filter cartridge. The filter cartridge includes a housing. The filter member is disposed within the housing.
The endcap includes an inward side, an outer side, and a plurality of fins that project from the outer side of the endcap. The inward side is configured to abut against or be fused to a first axial end of the filter member. The outer side is configured to face towards the housing. Each of the plurality of fins is extending in a curved shape along the outer side of the endcap. The fins are configured to redirect fluid flowing into the filter cartridge through the inlet in the housing.
Like numbers represent like features.
The fluid F can be a liquid used in semiconductor manufacturing (e.g., chemical mechanical planarization, wet etch and clean, photolithography etc.), ink manufacturing or use, etc. For example, the liquid can include, but is not limited to, water, ultrapure water, etching liquids, inks, solvents used in photolithography and wet etch and clean, etc. For example, the fluid F may be a slurry of the liquid and solid particles. The filter cartridge 1 is configured to remove the solid particles from the slurry. In an embodiment, fluid F may be ink that includes pigment(s) particles in a liquid. The filter cartridge 1 may be configured to remove solid non-pigment particles from the liquid/ink (e.g., with minimal removal of the pigment particles). In other embodiments, fluid F can be a solvent or other liquid used in semiconductor manufacturing where particles or other contaminants need to be removed.
As shown in
The filter member 30 can also include a core 34 on which the membrane 32 is supported within the housing 10. The membrane 32 has a tubular shape. As shown in
The filter member 30 has a first axial end 36 and a second axial end 38. The first axial end 36 and the second axial end 38 being opposite ends of the filter member 30 along the longitudinal axis 40 of the filter member 38. The membrane 32 forms the inlet of the filter member 30 (e.g., the fluid F flows into the filter membrane 30 through the membrane 32). As shown in
The first axial end 36 of the filter member 30 faces the first end 16 of the housing 10. The first axial end 36 faces towards the inlet 12 in the housing 10. The second axial end 38 of the filter member 30 faces the second end 18 of the housing 10. The second axial end 38 of the filter member 30 faces towards the outlet 14 in the housing 10. The first axial end 36 of the filter member 30 is located closer than the second axial end 38 to the first end 16 of the housing 10 (e.g., closer to the inlet 12 in the housing 10). The filter member 10 disposed within the housing 10 such that a radial gap 44 is provided between the sides of the filter member 30 and the sides of the housing 10. The radial gap 44 has a tubular shape. In an embodiment, the filter member 30 may be configured to only have its second axial end 38 in contact with the housing 10 (e.g., the first axial end 36 not contacting the housing 10).
As shown in
The endcap 50 includes a first side 52 and a second side 54 opposite to the first side 52. The first side 52 faces outward/away from the filter member 30 and can be referred to as the “outer side”. The second side 54 faces inward/towards the filter member 30 and can be referred to as the “inward side”. As shown in
The endcap 50 includes a plurality of fins 56 on the outer side 52. The fins 56 project from the outer side 52 of the endcap 50. For example, each of the fins 56 projects from the outer side 52 in the longitudinal direction Di. The fins 56 can have a height (e.g., as measured in the longitudinal direction Di) that varies to match with the slope of the outer side 52. Each of the fins 56 can have a height (e.g., in direction D1) that ensures each fin contacts the housing 10 (e.g., is in contact with the inner surface of the first end 16 of the housing 10). In an embodiment, each fin 56 may have a height that varies with the slope of the inner surface of the housing 10, so that the fin 56 remains in contact with the housing 10 along its length. The fins 56 abut against the first end 16 of the housing 10 (e.g., the inner surface of the first end 16 of the housing 10). The fins 56 space apart the outer side 52 of the endcap 50 from the first end 16 of the housing 10. The fin 56 form spaces between the outer side 52 of the endcap 50 and the second end 18 of the housing 10 (e.g., channels 58).
Each fin 56 extends in a curved shape along the outer side 52 of the endcap 50. Channels 58 are formed between the fins 56 and between the outer side 52 of the endcap 50 and the first end 16 of the housing 10. Each channel 58 is disposed between a respective pair of the fins 56. Each channel 58 is defined by a respective pair of the fins 56, an outer side 52 of the endcap, and the first end 16 of the housing 10 (e.g., an inner surface of the first end 16 of the housing 10). As the fins 56 abut against the housing 10, the fluid F flowing from the inlet 112 is directed to flow through the channels 58 between the fins 56 to flow out from between the endcap 150 and the first end 16 of the housing 10 and to reach the filter member 30.
As shown in
The outer side 52 of the endcap 50 has a tapered shape. The outer side 52 is shaped to taper towards the inlet 12 of the housing 10. As shown in
As shown in
As shown in
Channels 58 are formed between the fins 56. Each channel 58 is formed between a respective pair of the fins 56. Each channel 58 is defined by a respective pair of the fins 56, the outer side 52 of the endcap 50, and the second end 18 of the housing 12 (e.g., an inner surface of the second end 18 of the housing 12). Each channel 58 extends both radially and circumferentially outward along the endcap 50.
As discussed above, the fluid F flows from the inlet 12 towards the outer side 52 of the endcap 50. For example, the fluid is generally directed at or about the center C1 of the outer side 52 of the endcap 50 (e.g., at the apex 53 of the tapered outer side 52). The fluid F then flows radially outward along the outer side 52. The fins 56 redirect the fluid to flow circumferentially while flowing radially outward. For example, the fins 56 as shown in
Unless described otherwise, the filter cartridge 101 generally has a similar structure to filter cartridge 101 in
The endcap 150 is configured to redirect the fluid F as it flows from the inlet 112 into the interior volume 122 of the housing 110. The fluid flowing into the filter cartridge 101 through the inlet 112 in the housing 110 is redirected by the tapered shape of the outer side 152 and the fins 156.
The fins 156 of the endcap 150 in
A channel 158 is formed between the fins 156 and between the outer side 152 of the endcap 150 and the first end 116 of the housing 110. The channel 158 is defined the fins 156 (e.g., the sides of the fins 156), the outer side 152 of the endcap 150, and the first end 116 of the housing 110 (e.g., an inner surface of the first end 116 of the housing 110). As shown in
As shown in
Radial openings 162 are provided between the ends of the fins 156. A respective radial opening 162 is provided between the ends of each circumferentially adjacent pair of the fins 156 that are end-to-end. The radial openings 162 are formed in the outermost leg of spiral formed by the fins 156. The radial openings 162 are provided the fluid F is more equally distributed circumferentially from between the endcap 150 and the filter member 130. The endcap 150 includes four radial openings 162. It should be appreciated that the endcap 150 may include a different number of radial openings 162. In an embodiment, the endcap 150 may include at least two of the radial openings 162. In an embodiment, the endcap 150 may include at least three radial openings 162. The size of the radial openings 162 can be the same or different. In an embodiment, the size of each of the radial openings 162 is selected such that the fluid F is equally circumferentially distributed/discharged from between the endcap 150 and the filter member 130 into the open volume 122 of the housing 110.
In
The channel 158 is formed between the fins 156. The channel 158 extends between the fins 156. The channel 158 has a spiral shape that is the space between the turns of the spiral formed by the fins 156. The channel 158 is defined by the fins 156 and the outer side 152 of the endcap 150. In the assembled filter cartridge 101 (e.g., as shown in
outer side 152 of the endcap 150. For example, the fluid is generally directed at or about the center C2 (e.g., at the apex 153) of the outer side 152 of the endcap 150. The fluid F is then directed into the channel 158. As shown in
Computational fluid modeling was used to measure turbulence intensity within a conventional filter cartridge, the filter cartridge 1 of
Any of Aspects 1-13 may be combined with any of Aspects 14-20.
Aspect 1. A filter cartridge, comprising: a housing including a first end, a second end
opposite to the first end, an inlet disposed in the first end of the housing, and an outlet; a filter member disposed within the housing, the filter member configured to filter liquid flowing through the housing from the inlet to the outlet, the filter member including a first axial end facing the first end of the housing and a second axial end facing the second end of the housing; an endcap disposed between the first axial end of the filter member and the inlet in the housing, the endcap including: an outer side facing towards the first end of the housing, and a plurality of fins projecting from the outer side of the endcap, the plurality of fins each extending in a curved shape along the outer side of the endcap, and the plurality of fins configured to redirect the liquid flowing into the filter cartridge through the inlet in the housing.
Aspect 2. The filter cartridge of Aspect 1, wherein the plurality of fins are configured to redirect the liquid flowing into the housing through the inlet to flow circumferentially and radially outward relative to a longitudinal axis of the filter member, and the plurality of fins configured to prevent the liquid from flowing in a direct radial outward direction along the endcap.
Aspect 3. The filter cartridge of Aspect 2, wherein the plurality of fins are configured to redirect the liquid flowing into the housing through the inlet to flow radially outward and one of clockwise or counter-clockwise relative to the axis of the filter member.
Aspect 4. The filter cartridge of any one of Aspects 1-3, wherein one or more channels are formed between the plurality of fins, the inlet in the housing fluidly connected to the filter member via the channels.
Aspect 5. The filter cartridge of any one of Aspects 1-4, wherein the first axial end of the filter member is spaced apart from the housing by the endcap, and the outer side of the endcap is spaced apart from the housing by the fins.
Aspect 6. The filter cartridge of any one of Aspects 1-5, wherein the outer side is shaped to taper towards the inlet of the housing.
Aspect 7. The filter cartridge of any one of Aspects 1-6, wherein the outer side of the endcap has a conical shape that tapers towards the inlet of the housing.
Aspect 8. The filter cartridge of any one of Aspects 1-7, wherein the inlet in the housing faces towards the outer side of the endcap, the inlet configured to direct the liquid to flow toward the outer side of the endcap.
Aspect 9. The filter cartridge of any one of Aspects 1-8, wherein the endcap has an inward side that abuts or is fused to the first axial end of the filter member, the inward side of the endcap being opposite to the outer side of the endcap.
Aspect 10. The filter cartridge of any one of Aspects 1-9, wherein the fins extend end-to-end along the outer side of the endcap.
Aspect 11. The filter cartridge of any one of Aspects 1-10, wherein radial openings are provided between ends of the fins, the liquid configured to be directed to flow out from between the first axial end of filter member and the first end of the housing through the radial openings.
Aspect 12. The filter cartridge of any one of Aspects 1-9, wherein the fins extend side-by-side along the outer side of the endcap.
Aspect 13. The filter cartridge of any one of Aspects 1-12, wherein the housing defines an interior volume, the filter member and the endcap being disposed in the interior volume of the housing.
Aspect 14. The filter cartridge of any one of Aspects 1-13, wherein the filter cartridge is configured to filter the liquid.
Aspect 15. An endcap for a filter member in a filter cartridge, the filter cartridge including a housing and the filter member disposed within the housing, the endcap comprising: an inward side configured to abut against or be fused to a first axial end of the filter member; an outer side configured to face towards the housing; and a plurality of fins projecting from the outer side of the endcap, the plurality of fins each extending in a curved shape along the outer side of the endcap, the plurality of fins configured to redirect the liquid flowing into the filter cartridge through an inlet in the housing.
Aspect 16. The endcap of Aspect 15, wherein the endcap is configured to space apart the first axial end of the filter member from the housing, and the plurality of fins configured to space apart the outer side of the endcap from the housing.
Aspect 17. The endcap of any one of Aspects 15 and 16, wherein the outer side is shaped to taper towards an inlet of the housing.
Aspect 18. The endcap of any one of Aspect 17, wherein the outer side has a conical shape that tapers towards the inlet of the housing.
Aspect 19. The endcap of any one of Aspects 15-18, wherein the fins extend end-to-end along the outer side of the endcap.
Aspect 20. The endcap of any one of Aspects 15-19, wherein radial openings are provided between ends of the fins, the liquid configured to be directed to flow radially outward from between the first axial end of filter and the first end of the housing through the radial openings.
Aspect 21. The endcap of any one of Aspects 15-18, wherein the fins extend side-by-side along the outer side of the endcap.
The examples disclosed in this application are to be considered in all respects as illustrative and not limitative. The scope of the invention is indicated by the appended claims rather than by the foregoing description; and all changes which come within the meaning and range of equivalency of the claims are intended to be embraced therein.
Number | Date | Country | |
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63393632 | Jul 2022 | US |