Number | Name | Date | Kind |
---|---|---|---|
2992125 | Fustier | Jul 1961 | |
2993806 | Fisher et al. | Jul 1961 | |
3118781 | Downing | Jan 1964 | |
3914472 | Nakanishi et al. | Oct 1975 | |
4101698 | Dunning et al. | Jul 1978 | |
4131530 | Blum et al. | Dec 1978 | |
4211822 | Kurfman et al. | Jul 1980 | |
4215170 | Oliva | Jul 1980 | |
4407871 | Eisfeller | Oct 1983 | |
4431711 | Eisfeller | Feb 1984 | |
4713143 | Eisfeller | Dec 1987 | |
4923720 | Lee et al. | May 1990 | |
5009367 | Nielsen | Apr 1991 | |
5027742 | Lee et al. | Jul 1991 | |
5057342 | Hoy et al. | Oct 1991 | |
5066522 | Cole et al. | Nov 1991 | |
5106650 | Hoy et al. | Apr 1992 | |
5108799 | Hoy et al. | Apr 1992 | |
5141156 | Hoy et al. | Aug 1992 | |
5171613 | Bok et al. | Dec 1992 | |
5178325 | Neilsen | Jan 1993 | |
5203843 | Hoy et al. | Apr 1993 | |
5211342 | Hoy et al. | May 1993 | |
5212229 | Taylor et al. | May 1993 | |
5290625 | Eisfeller et al. | Mar 1994 | |
5384161 | Eisfeller et al. | Jan 1995 |
Entry |
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Chopra, KL, Thin Film Phenomena, Robert E. Kreiger Publ. Co., Huntington, N.Y., pp. 163-189 (1979) No Month Available. |
Maissel and Glang, Handbook of Thin Film Technology, McGraw-Hill, New York, N.Y., pp. 8-43 (1970) (No Month Available). |