This invention was made with Government support under SBIR grant No. NAS5-33257. The Government has certain rights in this invention.
Number | Name | Date | Kind |
---|---|---|---|
3190171 | Reed | Jun 1965 | |
3748015 | Offner | Jul 1973 | |
4293186 | Offner | Oct 1981 | |
4796984 | Wynne | Jan 1989 | |
4920220 | Phaff | Apr 1990 | |
5440669 | Rakuljic et al. | Aug 1995 | |
5450218 | Heanue et al. | Sep 1995 | |
5519651 | Redfield | May 1996 |
Entry |
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Offner, A., New concepts in projection mask aligners, Opt. Eng., vol. 14, No. 2, pp. 130-132, 1975. |