Number | Name | Date | Kind |
---|---|---|---|
4827423 | Beasley et al. | May 1989 | A |
4847761 | Ferriter et al. | Jul 1989 | A |
4862376 | Ferriter et al. | Aug 1989 | A |
4931929 | Sherman | Jun 1990 | A |
4992940 | Dworkin | Feb 1991 | A |
5210686 | Jernigan | May 1993 | A |
5295067 | Cho et al. | Mar 1994 | A |
5317729 | Mukherjee et al. | May 1994 | A |
5359508 | Rossides | Oct 1994 | A |
5550746 | Jacobs | Aug 1996 | A |
5675784 | Maxwell et al. | Oct 1997 | A |
5726898 | Jacobs | Mar 1998 | A |
5765137 | Lee | Jun 1998 | A |
5768142 | Jacobs | Jun 1998 | A |
5797128 | Birnbaum | Aug 1998 | A |
5855013 | Fisk | Dec 1998 | A |
5864875 | Van Huben et al. | Jan 1999 | A |
5987468 | Singh et al. | Nov 1999 | A |
5991728 | DeBusk et al. | Nov 1999 | A |
6072949 | Futatsugi et al. | Jun 2000 | A |
6208987 | Nihei | Mar 2001 | B1 |
6295531 | Bae et al. | Sep 2001 | B1 |
Number | Date | Country |
---|---|---|
0 982 675 | Mar 2000 | EP |
Entry |
---|
Product Overlay Control and Analysis Package For Wafer Manufacturing, IBM Technical Disclosure Bulletin, vol. 30, No. 2, Jul. 1987, pp. 683-685. |
Execute Multiple Knowledge-Based System Products in anMSV Subsystem, IBM Technical Disclosure Bulletin, vol. 38, No. 2, Feb. 1995, pp. 309-310. |