1. Field of the Invention
The present invention relates generally to the field of early detection and diagnosis of incipient machine failure or process upset. More particularly, the invention is directed to generating appropriate alerts on the basis of residual signals indicative of system behavior.
2. Brief Description of the Related Art
A variety of new and advanced techniques have emerged in industrial process control, machine control, system surveillance, and condition based monitoring to address drawbacks of traditional sensor-threshold-based control and alarms. The traditional techniques did little more than provide responses to gross changes in individual metrics of a process or machine, often failing to provide adequate warning to prevent unexpected shutdowns, equipment damage, loss of product quality or catastrophic safety hazards.
According to one branch of the new techniques, empirical models of the monitored process or machine are used in failure detection and in control. Such models effectively leverage an aggregate view of surveillance sensor data to achieve much earlier incipient failure detection and finer process control. By modeling the many sensors on a process or machine simultaneously and in view of one another, the surveillance system can provide more information about how each sensor (and its measured parameter) ought to behave. Additionally, these approaches have the advantage that no additional instrumentation is typically needed, and sensors in place on the process or machine can be used.
An example of such an empirical surveillance system is described in U.S. Pat. No. 5,764,509 to Gross et al., the teachings of which are incorporated herein by reference. Therein is described an empirical model using a similarity operator against a reference library of known states of the monitored process, and an estimation engine for generating estimates of current process states based on the similarity operation, coupled with a sensitive statistical hypothesis test to determine if the current process state is a normal or abnormal state. The role of the similarity operator in the above empirical surveillance system is to determine a metric of the similarity of a current set of sensor readings to any of the snapshots of sensor readings contained in the reference library. The similarity metric thusly rendered is used to generate an estimate of what the sensor readings ought to be, from a weighted composite of the reference library snapshots. The estimate can then be compared to the current readings for monitoring differences indicating incipient process upset, sensor failure or the like.
Early detection of sensor failure, process upset or machine fault are afforded in such monitoring systems by sensitive statistical tests such as the sequential probability ratio test, also described in the aforementioned patent to Gross et al. The result of such a test when applied to the residual of the difference of the actual sensor signal and estimated sensor signal, is a decision as to whether the actual and estimate signals are the same or different, with user-selectable statistical confidence.
Successful application of the sequential probability ratio test to the empirical model-generated residuals of the above systems is contingent on several assumptions regarding those residuals. First, it is assumed that if the monitored system is behaving correctly, then the only differences between the actual sensor value and the estimated value are a function of noise. For empirical models that generate estimates, this is often a function of the quality of the data that was available to train the model. Second, it is assumed that this noise is both identically distributed and Gaussian, as well as temporally independent. Unfortunately, this is not always the case in many applications of the empirical monitoring systems mentioned above.
Because of these issues, an implementation of an empirical model according to a similarity operator, coupled to a SPRT alert generation module can result in nuisance alerts, especially if the model is set up with limited training data for the eventual expected range of operation of the process or machine being monitored. It is desirable to have alternative mechanisms for generating alerts on the basis of the comparison of the actual raw sensor data to the sensor data estimated by the similarity operator empirical model.
The present invention provides for early and accurate incipient fault detection for machines and processes. Sensors on the machine or process provide values descriptive of operation. A computational model of the machine or process generates estimates of sensor values in response to receiving actual sensor values from the sensors on the machine or process being monitored. The estimated sensor values generated by the model are subtracted from the actual sensor values to provide residual signals for sensors on the machine or process. When everything is working normally, as modeled by the model, the residual signals have approximately a zero mean, with variations due to noise and model discrepancies. When the process or machine deviates from any recognized and modeled state of operation, that is, when its operation becomes abnormal, these residuals become non-zero.
A sensitive statistical test is applied to each residual, in the form of a modified sequential probability ratio test (SPRT). This test provides the earliest possible decision in a sequence of observations in time whether the residual values are in the expected distribution for normal operation or not, often at such an early stage that the residual trend out of that distribution is still buried in the noise level. For any sensor where a decision is made that the residual is not in the expected distribution for normal operation, an alert is generated on that sensor for the time snapshot in question.
According to the invention, the modified SPRT utilizes an empirically derived distribution specific for each residual. Test operational data for the monitored system is differenced with estimates thereof from the model to generate test residuals, from which an empirical distribution is derived. Residual values can be organized in a histogram, which is then normalized to provide an approximate distribution shape. The normalized histogram data can be used to approximate the probability distribution, or more preferably the curve defining that shape can be approximated with piece-wise function fitting, such as splining techniques to provide an actual empirical distribution for use with SPRT.
The inventive system can comprise software running on a computer, with a memory for storing model information and the empirical distribution data. Furthermore, it has data acquisition means for receiving data from sensors on the process or machine being monitored. Typically, the system can be connected to or integrated into a process control system in an industrial setting and acquire data from that system over a network connection. No new sensors need to be installed in order to use the inventive system. The outputs of the software can be displayed, or transmitted to a pager, fax or other remote device, or output to a control system that may be disposed to act on the alerts for automatic process or machine control. Alternatively, due to the small computing requirements of the present invention, the inventive system can be reduced to an instruction set on a memory chip resident with a processor and additional memory for storing the model and library, and located physically on the process or equipment monitored, such as an automobile or aircraft.
The novel features believed characteristic of the invention are set forth in the appended claims. The invention itself, however, as well as the preferred mode of use, further objectives and advantages thereof, is best understood by reference to the following detailed description of the embodiments in conjunction with the accompanying drawings, wherein:
Improved monitoring for incipient faults in the operation of a machine or process instrumented with sensors is provided by the present invention as shown in FIG. 1. Therein, sensor data from at least one sensor is provided via an input 104 to a model 109, which models the expected operation of the monitored machine or process, and generates estimates for the sensor data. The estimates from the model 109 and the actual sensor data from 104 are differenced in an adder 112, to generate a residual signal for the sensor. A SPRT module 117 performs a sequential probability ratio test on successive values of the residual, employing an empirical residual distribution stored in a memory 120, that is specific to the sensor signal being processed. The SPRT module 117 generates alerts if the residual signal shows reliable statistical indication of no longer being a member of the empirical residual distribution.
Typically, many sensor signals are monitored and modeled together, and a number of different modeling techniques can be used in the present invention as model 109. Each sensor estimate from the model 109 is differenced with its matching actual sensor, and the SPRT module 117 performs a test on each residual independently, to provide alerts on a sensor-by-sensor basis. Further, the empirical residual distribution employed for each sensor is preferably different and specific to the sensor. Furthermore, the dynamic expected range for a sensor can be segmented into sub-ranges, each of which has a specific empirically derived distribution for a sensor.
The usual sequential probability ratio test (SPRT) is described in the aforementioned U.S. Pat. No. 5,764,509 to Gross et al., and is known in the art from the theory of Wald and Wolfowitz, “Optimum Character of the Sequential Probability Ratio Test”, Ann. Math. Stat. 19, 326 (1948). It is known to employ the SPRT with a residual as described in Gross et al. Broadly, for a sequence of estimates for a particular sensor, the test is capable of deciding with preselected missed and false alarm rates whether the estimates and actuals are statistically the same or different, that is, belong to the same or to two different probability distributions.
The basic approach of the SPRT technique is to analyze successive observations of a sampled parameter. A sequence of sampled differences between the estimate and the actual for a monitored parameter should be distributed according to some kind of distribution function around a mean of zero. Typically, in the art this is assumed to be a Gaussian distribution. Then, with each observation, a test statistic is calculated and compared to one or more decision limits or thresholds. The SPRT test statistic generally is the likelihood ratio 1n, which is the ratio of the probability that a hypothesis H1 is true to the probability that a hypothesis H0 is true:
where Yn are the individual observations and Hn are the probability distributions for those hypotheses. This general SPRT test ratio can be compared to a decision threshold to reach a decision with any observation. For example, if the outcome is greater than 0.80, then decide H1 is the case, if less than 0.20 then decide H0 is the case, and if in between then make no decision.
The SPRT test can be applied to various statistical measures of the respective distributions. Thus, for a Gaussian distribution according to the prior art, a first SPRT test can be applied to the mean and a second SPRT test can be applied to the variance. For example, there can be a positive mean test and a negative mean test for data such as residuals that should distribute around zero. The positive mean test involves the ratio of the likelihood that a sequence of values belongs to a distribution H0 around zero, versus belonging to a distribution H1 around a positive value, typically the one standard deviation above zero. The negative mean test is similar, except H1 is around zero minus one standard deviation. Furthermore, the variance SPRT test can be to test whether the sequence of values belongs to a first distribution H0 having a known variance, or a second distribution H2 having a variance equal to a multiple of the known variance.
As taught in Gross et al., the SPRT test can be simplified by assuming a Gaussian distribution:
where p is the probability of value x for a mean of μ and a variance of σ. Therefore, the calculation of the likelihood that H0 is true for a residual (mean is zero and variance is σ2 determined from residual data under normal operation of the monitored machine or process) simplifies to:
and similarly, for H1, where the mean is M (typically one standard deviation below or above zero, using the variance determined for the residuals from normal operation) and the variance is again σ2 (variance is assumed the same):
For an assumed Gaussian distribution, then, the ratio 1n from equations 3 and 4 then becomes:
A SPRT statistic can be defined for the mean test to be the exponent in equation 5:
The SPRT test is advantageous because a user-selectable false alarm probability α and a missed alarm probability β can provide thresholds against which SPRTmean can be tested to produce a decision:
While the above reduced equations present the SPRT test for the assumption of a Gaussian distribution for the residual around a mean of zero, as a practical matter, this may not be accurate for many monitored physical systems. Depending on the model used to produce the estimates for the operation of the monitored system, the variation on the residual signal may be quite non-Gaussian in distribution. By applying the Gaussian distribution to such data, the reliability, accuracy and statistical basis of early warnings of impending faults in the monitored system is negatively impacted, resulting in delays in alerting or premature or false alerts. This is further compounded by the fact that noise on the sensor's actual signal may also not exhibit a Gaussian distribution.
According to the invention, an empirically derived probability distribution is used to provide the successive likelihood values for successive residual data points in equation 1. The likelihood of a residual data point being part of that distribution is preferably compared in each iteration to the likelihood that the residual data point belongs to an identically shaped distribution offset from the first distribution by a selected positive or negative amount, typically a standard deviation or some multiple thereof.
Turning to
A number of techniques are known for fitting functions to data over a segment of a distribution. According to one technique known in the art called splines, the range of the distribution is segmented into sections, each approximated by a polynomial of low degree. According to the invention, in its simplest form, a series si(x) of straight lines can be used to approximate the overall distribution:
si(x)=ai(x−xi)+bi; xi≦x≦xi+1 (7)
According to the preferred embodiment of the invention, a cubic spline is used to approximate the distribution. In a cubic spline, the approximating function comprises (n−1) cubic polynomials for a histogram 205 having n bins. Furthermore, the functions at the boundaries at the data points of 220 are continuous in both the first and second derivatives. The functions are given by:
for i=1, 2, . . . , n−1 and xi≦x≦xi+1. Furthermore, they must satisfy the system of equations:
with additional requirements:
s1″=sn″=0 (Natural Spline) (10)
or alternatively:
(“correct” boundary conditions).
Other splining techniques are well known in the art and can be employed in the present invention to derive an empirical distribution appropriate the each sensor.
According to an alternative embodiment of the invention, the histogram of the residual data can itself be used to provide the empirical distribution for the SPRT. In this case, the distribution essentially comprises a series of step functions for each of the bins of the histogram, having a dependent value equal to the normalized height of each bar in the histogram. In monitoring mode, a monitored residual falls into one of the bins, and the dependent value of the bin is used in the SPRT calculation for that observation.
The empirical distribution used for the SPRT according to the invention can be derived prior to initiating live monitoring, using test data embodying normal operation; or can be continually re-derived on-the-fly while monitoring, using residual data over windows of observations in which alerting either does not occur, or does not breach a threshold of frequency, either on the sensor individually or across the set of multiple sensors on the system being monitored. In deriving the distribution prior to monitoring, a first set of empirical data characteristic of normal operation is used to create the model, as for example described below with respect to a model using a similarity engine. Then a second set of empirical data, also characterizing normal operation, is run through the model and residuals are generated to provide data for the empirical histogram for the sensor or sensors being monitored with SPRT. Optionally, the normal operation of the monitored system can be differentiated into multiple operational states, in each of which the empirical distribution employed for a given sensor is different from the empirical distributions for that sensor in the other states. Thus, for example, an aircraft turbine can be considered to have at least the two operational states of take-off and cruise. Test data for normal take-off and cruise operation can be applied to a model (or two models, if modeled separately) for the turbine, to generate residuals for the monitored sensors. Residuals for take-off and cruise and then used to generate empirical distributions for the sensors for take-off and cruise modes, respectively. Only the relevant distribution is then used at run-time, depending on the state of operation of the turbine.
In the event that the empirical distributions for sensors are maintained on-the-fly while monitoring, a moving window can be employed. In this aspect of the invention, an initial SPRT distribution must be provided, which can either be a distribution empirically derived from test data prior to entering monitoring mode, as described above, or can be a standard distribution from the art, like a Gaussian distribution. Then, during monitoring using the provided distribution, SPRT alerts may or may not be generated, depending on the operational state of the monitored system. A window of observations can be stored in memory, including the residual value and time stamp of each observation for each sensor for which empirical distributions are desirably maintained. The window is preferably large enough to provide a good statistically meaningful amount of residual data to populate a distribution histogram. Depending on the application, this may be typically in the range of fifty to a thousand observations. If the window of observations has no alerts or has a number of alerts that is less than an acceptable threshold, then the window of residual data can be used to generate a new empirical distribution for the SPRT for that sensor. If a threshold is used against the number of alerts generated, it is preferably less than 5% of the observations in the window. Furthermore, it may be alerts on the sensor for which the distribution is being generated, or more preferably, it can be any alerts generated for any sensors monitored. In an empirical distribution was provided at the start of monitoring, and the goal is to update the distribution, the residual data from the window can be added to an existing library of residual data that provided an original distribution, to further refine the shape of the distribution. The distribution can then be derived as described above with respect to FIG. 2. Alternatively, residual data from a moving window can supplement an original set of residual data to provide a constantly updated empirical distribution, by removing from the histogram residual data that is oldest on a first-in-first-out basis. Such an approach, however, may run the risk of incorporating a slowly developing fault into the distribution, and thus fail to alert on it over time. On the other hand, if a slowly developing fault is not a critical issue, this approach accommodates the graceful aging of the monitored system.
For purposes of updating the empirical SPRT distribution for a given sensor over a moving window of observations, it is preferable not to double-count the contribution to the distribution by a given residual data point. Therefore, residual data only from non-overlapping windows of observations should be used to augment the distribution.
According to yet another aspect of the invention, the operational ranges of the monitored system can be segregated into distinct states to which different empirical distributions would apply for each sensor. These distributions are necessarily derived using data from the respective operational states. One way for achieving this according to the invention can be employed when the operational state of the monitored system is readily detectable from a control parameter or other state indicator. For example, in a jet engine, the states of take-off and cruise can be distinguished be reference to altitude and air speed, or time from take-off roll. Such thresholds that distinguish states of operation are application-specific. Each sensor can have a different empirical distribution for its SPRT for each different state of operation of the monitored system. In certain circumstances, yet another alternative according to the invention is to employ a different empirical distribution for a sensor to different ranges of the value of that sensor, irrespective of the operation of the monitored system as a whole. This could be beneficial in the case where the response characteristics of the sensor are range-dependent.
A wide variety of models can be used in the invention to generate estimates of parameter data for the monitored system. One such modeling technique employs a reference library of parameter observations characteristic of normal operation, coupled to a similarity engine disposed to generate a set of estimates with reference to the reference library, in response to receiving a set of monitored data. The similarity engine carries out a series of mathematical operations against the current observation set of parameter values, which includes gauging a metric of the similarity of the observation set to each of the observations in the reference library, and generating an estimate of the parameters based on similarity. These are described below.
For a given set of contemporaneous sensor data from the monitored process or machine running in real-time, the estimates for the sensors can be generated according to:
{right arrow over (Y)}estimated={right arrow over (D)}●{right arrow over (W)} (12)
where the vector Y of estimated values for the sensors is equal to the contributions from each of the observations of contemporaneous sensor values arranged to comprise matrix D (the reference library). These contributions are determined by weight vector W. The multiplication operation is the standard matrix/vector multiplication operator. The vector Y has as many elements as there are sensors of interest in the monitored process or machine. W has as many elements as there are reference observations in D. W is determined by:
where the T superscript denotes transpose of the matrix, and Yin is the current observation of actual, real-time sensor data. The similarity operator of the similarity engine is symbolized in Equation 14, above, as the circle with the “X” disposed therein. Moreover, D is again the reference library as a matrix, and DT represents the standard transpose of that matrix (i.e., rows become columns). Yin is the real-time or actual sensor values from the underlying system, and therefore is a vector snapshot.
The similarity operator represented by the symbol {circle around (x)} could potentially be chosen from a variety of operators. For purposes of the present invention the meaning of {circle around (x)} is that of a “similarity” operation. The similarity operator, {circle around (x)} , works much as regular matrix multiplication operations, on a row-to-column basis. The similarity operation yields a scalar value for each pair of corresponding nth elements of a row and a column, and an overall similarity value for the comparison of the row to the column as a whole. This is performed over all row-to-column combinations for two matrices (as in the similarity operation on D and its transpose above).
By way of example, one similarity operator that can be used compares the two vectors (the ith row and jth column) on an element-by-element basis. Only corresponding elements are compared, e.g., element (i,m) with element (m,j) but not element (i,m) with element (n,j). For each such comparison, the similarity is equal to the absolute value of the smaller of the two values divided by the larger of the two values. Hence, if the values are identical, the similarity is equal to one, and if the values are grossly unequal, the similarity approaches zero. When all the elemental similarities are computed, the overall similarity of the two vectors is equal to the average of the elemental similarities. A different statistical combination of the elemental similarities can also be used in place of averaging, e.g., median.
One example of such an operator that can be used with the present invention returns a value between one (identical) and zero (dissimilar) provided by the minimum value divided by the maximum value, for two values. According to another similarity operator that can be used, an elemental similarity for like elements of two vectors is provided by:
where θC (theta(c)) is a function of the elements A(c) and B(c) of vectors A and B respectively; λ (lambda) and ρ (rho) are sensitivity constants that can be selected for optimization. The function theta preferably returns a zero when the elements A(c) and B(c) are equal or identical, and preferably returns an increasingly large positive number with increasing difference of the two elements, with no limit. Lambda λ and rho ρ can be selected as any positive constants, and preferably are selected in the range of one to four. Theta can then be selected from a variety of functions according to the invention. Importantly, theta preferably scales the sameness or difference of two corresponding elements by the range observed over the reference library for the sensor corresponding to the two elements. By way of example, theta can be defined as follows:
where:
Alternatively, certain similarity operators simply provide an overall scalar value upon comparison of two vectors or a row and a column. For example, one similarity operator that can work in this fashion is the Euclidean distance between the two vectors in n-space, where n is the number of sensors or parameters in each vector.
In general, the following guidelines help to define a similarity operator:
1. Similarity is a scalar range, bounded at each end.
2. The similarity of two identical inputs is the value of one of the bounded ends.
3. Preferably (but not necessarily) the similarity changes monotonically over the scalar range.
4. Preferably (but not necessarily) the absolute value of the similarity increases as the two inputs approach being identical.
Accordingly, for example, an effective similarity operator for use in the present invention can generate a similarity of ten (10) when the inputs are identical, and a similarity that diminishes toward zero as the inputs become more different. Alternatively, a bias or translation can be used, so that the similarity is 12 for identical inputs, and diminishes toward 2 as the inputs become more different. Further, a scaling can be used, so that the similarity is 100 for identical inputs, and diminishes toward zero with increasing difference. Moreover, the scaling factor can also be a negative number, so that the similarity for identical inputs is −100 and approaches zero from the negative side with increasing difference of the inputs. The similarity can be rendered for the elements of two vectors being compared, and summed or otherwise statistically combined to yield an overall vector-to-vector similarity, or the similarity operator can operate on the vectors themselves (as in Euclidean distance).
Generally, any number of similarity operators could be used in the similarity engine of this kind of model for purposes of the invention. Examples of such other operators are provided in, for example, Equations 8-17 of published international PCT application number PCT/US00/11488, publication number WO 00/67412, to Black, and are incorporated herein by reference. The recitation of the above operators is exemplary and not meant to limit the scope of the claimed invention.
The reference library for such models is empirical, and generated from data acquired for normal or targeted operation of the monitored system. One technique for populating the reference library with characteristic data selected from a larger set of such acquired data includes a given observation (i.e., set of contemporaneous sensor readings) if the observation contains a maximum or minimum value for any one sensor, as compared to all other available observations. As a result, the reference library has at most a set of observations numbering twice the count of sensors in the monitored system.
Accordingly, other kinds of models that can be used to provide estimates of the operational parameters of the monitored process include (a) models using neural networks to generate estimated values or states, and (b) models built from first principles, that is, sets of equations determined to govern the behavior of the measured parameters.
Another example of an empirical modeling method that can be used to produce estimates for purposes of the present invention is kernel regression, or kernel smoothing. A kernel regression can be used to generate an estimate based on a current observation in much the same way as the similarity-based model, which can then be used to generate a residual as detailed elsewhere herein. Accordingly, the following Nadaraya-Watson estimator can be used:
where in this case a single scalar inferred parameter y-hat is estimated as a sum of weighted exemplar yi from training data, where the weight it determined by a kernel K of width h acting on the difference between the current observation X and the exemplar observations Xi corresponding to the yi from training data. The independent variables Xi can be scalars or vectors. Alternatively, the estimate can be a vector, instead of a scalar:
Here, the scalar kernel multiplies the vector Yi to yield the estimated vector.
A wide variety of kernels are known in the art and may be used. One well-known known kernel, by way of example, is the Epanechnikov kernel:
where h is the bandwidth of the kernel, a tuning parameter, and u can be obtained from the difference between the current observation and the exemplar observations as in equation 6. Another kernel of the countless kernels that can be used in remote monitoring according to the invention is the common Gaussian kernel:
It will be appreciated by those skilled in the art, that modifications to the foregoing preferred embodiments may be made in various aspects. Other variations clearly would also work, and are within the scope and spirit of the invention. The present invention is set forth with particularity in the appended claims. It is deemed that the spirit and scope of that invention encompasses such modifications and alterations to the preferred embodiment as would be apparent to one of ordinary skill in the art and familiar with the teachings of the present application.
This application claims benefit of U.S. Provisional Application No. 60/297,404, filed Jun. 11, 2001.
Number | Name | Date | Kind |
---|---|---|---|
3045221 | Roop | Jul 1961 | A |
4060716 | Pekrul et al. | Nov 1977 | A |
4336595 | Adams et al. | Jun 1982 | A |
4402054 | Osborne et al. | Aug 1983 | A |
RE31750 | Morrow | Nov 1984 | E |
4480480 | Scott et al. | Nov 1984 | A |
4639882 | Keats | Jan 1987 | A |
4707796 | Calabro et al. | Nov 1987 | A |
4761748 | Le Rat et al. | Aug 1988 | A |
4796205 | Ishii et al. | Jan 1989 | A |
4823290 | Fasack et al. | Apr 1989 | A |
4937763 | Mott | Jun 1990 | A |
4965513 | Haynes et al. | Oct 1990 | A |
4978909 | Hendrix et al. | Dec 1990 | A |
4985857 | Bajpai et al. | Jan 1991 | A |
5003950 | Kato et al. | Apr 1991 | A |
5025499 | Inoue et al. | Jun 1991 | A |
5052630 | Hinsey et al. | Oct 1991 | A |
5093792 | Taki et al. | Mar 1992 | A |
5113483 | Keeler et al. | May 1992 | A |
5119287 | Nakamura et al. | Jun 1992 | A |
5123017 | Simpkins et al. | Jun 1992 | A |
5195046 | Gerardi et al. | Mar 1993 | A |
5210704 | Husseiny | May 1993 | A |
5223207 | Gross et al. | Jun 1993 | A |
5251285 | Inoue et al. | Oct 1993 | A |
5285494 | Sprecher et al. | Feb 1994 | A |
5309351 | McCain et al. | May 1994 | A |
5311562 | Palusamy et al. | May 1994 | A |
5325304 | Aoki | Jun 1994 | A |
5327349 | Hoste | Jul 1994 | A |
5386373 | Keeler et al. | Jan 1995 | A |
5410492 | Gross et al. | Apr 1995 | A |
5414632 | Mochizuki et al. | May 1995 | A |
5420571 | Coleman et al. | May 1995 | A |
5421204 | Svaty, Jr. | Jun 1995 | A |
5445347 | Ng | Aug 1995 | A |
5446671 | Weaver et al. | Aug 1995 | A |
5446672 | Boldys | Aug 1995 | A |
5455777 | Fujiyama et al. | Oct 1995 | A |
5459675 | Gross et al. | Oct 1995 | A |
5481647 | Brody et al. | Jan 1996 | A |
5486997 | Reismiller et al. | Jan 1996 | A |
5495168 | de Vries | Feb 1996 | A |
5496450 | Blumenthal et al. | Mar 1996 | A |
5500940 | Skeie | Mar 1996 | A |
5502543 | Aboujaoude | Mar 1996 | A |
5539638 | Keeler et al. | Jul 1996 | A |
5548528 | Keeler et al. | Aug 1996 | A |
5553239 | Heath et al. | Sep 1996 | A |
5559710 | Shahraray et al. | Sep 1996 | A |
5566092 | Wang et al. | Oct 1996 | A |
5579232 | Tong et al. | Nov 1996 | A |
5586066 | White et al. | Dec 1996 | A |
5596507 | Jones et al. | Jan 1997 | A |
5600726 | Morgan et al. | Feb 1997 | A |
5602733 | Rogers et al. | Feb 1997 | A |
5608845 | Ohtsuka et al. | Mar 1997 | A |
5612886 | Weng | Mar 1997 | A |
5617342 | Elazouni | Apr 1997 | A |
5623109 | Uchida et al. | Apr 1997 | A |
5629878 | Kobrosly | May 1997 | A |
5638413 | Uematsu et al. | Jun 1997 | A |
5657245 | Hecht et al. | Aug 1997 | A |
5663894 | Seth et al. | Sep 1997 | A |
5668944 | Berry | Sep 1997 | A |
5671635 | Nadeau et al. | Sep 1997 | A |
5680409 | Qin et al. | Oct 1997 | A |
5680541 | Kurosu et al. | Oct 1997 | A |
5682317 | Keeler et al. | Oct 1997 | A |
5708780 | Levergood et al. | Jan 1998 | A |
5710723 | Hoth et al. | Jan 1998 | A |
5727144 | Brady et al. | Mar 1998 | A |
5737228 | Ishizuka et al. | Apr 1998 | A |
5748469 | Pyötsiä | May 1998 | A |
5748496 | Takahashi et al. | May 1998 | A |
5751580 | Chi | May 1998 | A |
5754451 | Williams | May 1998 | A |
5757309 | Brooks et al. | May 1998 | A |
5761090 | Gross et al. | Jun 1998 | A |
5764509 | Gross et al. | Jun 1998 | A |
5774379 | Gross et al. | Jun 1998 | A |
5784285 | Tamaki et al. | Jul 1998 | A |
5787138 | Ocieczek et al. | Jul 1998 | A |
5817958 | Uchida et al. | Oct 1998 | A |
5818716 | Chin et al. | Oct 1998 | A |
5822212 | Tanaka et al. | Oct 1998 | A |
5841677 | Yang et al. | Nov 1998 | A |
5842157 | Wehhofer et al. | Nov 1998 | A |
5864773 | Barna et al. | Jan 1999 | A |
5886913 | Marguinaud et al. | Mar 1999 | A |
5895177 | Iwai et al. | Apr 1999 | A |
5905989 | Biggs | May 1999 | A |
5909368 | Nixon et al. | Jun 1999 | A |
5913911 | Beck et al. | Jun 1999 | A |
5930156 | Kennedy | Jul 1999 | A |
5930779 | Knoblock et al. | Jul 1999 | A |
5933352 | Salut | Aug 1999 | A |
5933818 | Kasravi et al. | Aug 1999 | A |
5940298 | Pan et al. | Aug 1999 | A |
5946661 | Rothschild et al. | Aug 1999 | A |
5946662 | Ettl et al. | Aug 1999 | A |
5950147 | Sarangapani et al. | Sep 1999 | A |
5956487 | Venkatraman et al. | Sep 1999 | A |
5961560 | Kemner | Oct 1999 | A |
5987399 | Wegerich et al. | Nov 1999 | A |
5993041 | Toba | Nov 1999 | A |
6006192 | Cheng et al. | Dec 1999 | A |
6006260 | Barrick, Jr. et al. | Dec 1999 | A |
6021396 | Ramaswamy et al. | Feb 2000 | A |
6029097 | Branicky et al. | Feb 2000 | A |
6049741 | Kawamura | Apr 2000 | A |
6049827 | Sugauchi et al. | Apr 2000 | A |
6076088 | Paik et al. | Jun 2000 | A |
6088626 | Lilly et al. | Jul 2000 | A |
6104965 | Lim et al. | Aug 2000 | A |
6110214 | Klimasauskas | Aug 2000 | A |
6115653 | Bergström et al. | Sep 2000 | A |
6125351 | Kauffman | Sep 2000 | A |
6128540 | Van Der Vegt et al. | Oct 2000 | A |
6128543 | Hitchner | Oct 2000 | A |
6141647 | Meijer et al. | Oct 2000 | A |
6144893 | Van Der Vegt et al. | Nov 2000 | A |
6182022 | Mayle et al. | Jan 2001 | B1 |
6587737 | Voser et al. | Jul 2003 | B2 |
6609036 | Bickford | Aug 2003 | B1 |
20020055826 | Wegerich et al. | May 2002 | A1 |
20030125248 | Hair et al. | Jul 2003 | A1 |
20030126258 | Conkright et al. | Jul 2003 | A1 |
Number | Date | Country |
---|---|---|
WO 0067412 | Nov 2000 | WO |
Number | Date | Country | |
---|---|---|---|
20030055607 A1 | Mar 2003 | US |
Number | Date | Country | |
---|---|---|---|
60297404 | Jun 2001 | US |