Patent Application
20090169789
This application is based upon and claims the benefit of priority from Japanese patent application No. 2007-338690, filed on Dec. 28, 2007, the disclosure of which is incorporated herein in its entirety by reference.
This invention relates to a resin pipe for use not only in a transport line for a liquid such as ultrapure water (UPW) or a chemical solution but also in a severe environment exposed to a chemical solution such as hydrofluoric acid.
Generally, on manufacturing semiconductor devices, liquid crystal display devices, or the like, ultrapure water (UPW) (including ultrapure water containing hydrogen or ozone, i.e. so-called hydrogen water or ozone water) is often transported and supplied through resin pipes in addition to various chemical solutions and so on. Ultrapure water is used in various processes on manufacturing semiconductor devices or the like. This is because, if water used in a cleaning process or the like contains a large amount of oxygen in the form of dissolved oxygen, a natural oxide film is formed due to the dissolved oxygen. Recently, however, it has been pointed out that, even if ultrapure water is used, a natural oxide film is likewise formed. Therefore, it has been attempted to thoroughly remove oxygen, particles, and metal components contained in ultrapure water.
For example, on fabricating a semiconductor device using a silicon substrate, a natural oxide (SiOx) film is formed on a silicon surface if oxygen and water coexist. Particularly, it has been pointed out that, if oxygen is contained in an aqueous solution, the silicon surface is oxidized and etched, resulting in an increase in surface microroughness.
In recent years, attention has been paid to the use of a (110) crystal surface of silicon because of a larger current-driving capability for a PMOSFET as compared with a (100) crystal surface of silicon. However, the (110) crystal surface of silicon is etched more severely or quickly in an aqueous solution containing oxygen, as compared with the (100) crystal surface of silicon. Accordingly, it is necessary to prevent oxygen from being mixed into the aqueous solution when the silicon surface is cleaned by wet cleaning using the aqueous solution.
Japanese Unexamined Patent Application Publication (JP-A) No. 2006-112507 (Patent Document 1) discloses, as a pipe for use in a semiconductor manufacturing apparatus, a liquid crystal manufacturing apparatus, or the like, a fluororesin double tube comprising two kinds of fluororesin layers laminated to each other. The fluororesin double tube disclosed in Patent Document 1 comprises an inner layer tube and an outer layer tube. The inner layer tube is made of a fluororesin excellent in corrosion resistance and chemical resistance (e.g. a tetrafluoroethylene-perfluoroalkylvinylether copolymer (PFA), a tetrafluoroethylene-hexafluoropropylene copolymer (FEP), or a tetrafluoroethylene-ethylene copolymer (ETFE)). On the other hand, the outer layer tube is made of a fluororesin capable of suppressing permeation or transmission of gas (e.g. polyvinylidene fluoride (PVDF)). The inner layer tube and the outer layer tube are fusion-bonded together.
The fluororesin double tube disclosed in Patent Document 1 is excellent in corrosion resistance, chemical resistance, and gas impermeability. Further, the inner layer tube and the outer layer tube can be firmly joined together.
In Japanese Unexamined Patent Application Publication No. 2007-292292 (Patent Document 2) corresp. to U.S. 2007-231523 A1 , the present inventors previously proposed a resin pipe comprising an inner layer of PFA and an outer layer of nylon.
Patent Document 1 discloses the fluororesin double tube in which the peel strength between the inner layer tube and the outer layer tube is 3.0 N/m or more. Further, Patent Document 1 defines an oxygen permeability and an oxygen permeability coefficient and points out that the oxygen permeability and the oxygen permeability coefficient can be reduced.
Patent Document 1 describes that the fluororesin double tube having a PFA layer and a PVDF layer as the inner layer tube and the outer layer tube, respectively, exhibits an oxygen permeability coefficient of 0.135 and 0.025 (grams·mil/100 in2·24 hr·atm) when hydrophilic treatment is not applied and is applied between these layers, respectively.
However, the fluororesin double tube comprising the PVDF tube as the outer layer tube as disclosed in Patent Document 1 is disadvantageous in the following respect. Because PVDF has no flexibility, the fluororesin double tube is not suitable for use as a pipe bent into various shapes although it is suitable as a straight pipe.
On the other hand, Patent Document 2 discloses the resin pipe having an oxygen permeability, an oxygen permeability coefficient, and flexibility which are required in a semiconductor manufacturing apparatus, a liquid crystal manufacturing apparatus, and the like. The resin pipe is suitable for use in a liquid transport line for a liquid such as ultrapure water (UPW) or a chemical solution. It is noted here that, in the semiconductor manufacturing apparatus, the liquid crystal manufacturing apparatus, and the like, the liquid transport line constructed by a resin pipe may be placed in an environment exposed to a chemical solution such as hydrofluoric acid. The resin pipe disclosed in Patent Document 2 is disadvantageous in that, if it is used in such an environment, nylon forming the outer layer is not resistant against some sort of chemical such as hydrofluoric acid and may be eluted out depending on the chemical.
It is an object of this invention to provide a resin pipe which can be used in an environment exposed to various chemicals.
It is another object of this invention to provide a resin pipe which has an oxygen permeability, an oxygen permeability coefficient, and flexibility required in a semiconductor manufacturing apparatus, a liquid crystal manufacturing apparatus, and the like and which has a corrosion resistance also.
It is sill another object of this invention to provide a resin pipe which is capable of maintaining an oxygen permeability coefficient not greater than 5×106 (molecules·cm/cm2·sec·Pa) so as to achieve a dissolved oxygen amount of 10 ppb or less.
According to an aspect of this invention, there is provided a resin pipe comprising an inner layer made of a fluororesin, an intermediate layer formed on the inner layer and made of nylon, and an outermost layer formed on the intermediate layer and made of a fluororesin.
In the above-mentioned resin pipe, the fluororesin of the inner layer may be the same as that of the outermost layer.
In the above-mentioned resin pipe, the fluororesin forming the inner layer and the outermost layer may be a tetrafluoroethylene-perfluoro-alkylvinylether copolymer resin (PFA).
In the above-mentioned resin pipe, the nylon forming the intermediate layer may be nylon 6.
In the above-mentioned resin pipe, the nylon forming the intermediate layer may be a copolymer of nylon 6 and nylon 12.
In the above-mentioned resin pipe, the inner layer and the intermediate layer may be adhered to each other by an adhesive layer.
In the above-mentioned resin pipe, the adhesive layer may comprise a fluorine-based adhesive layer.
In the above-mentioned resin pipe, the fluororesin forming the outermost layer may directly cover the intermediate layer of nylon without using an adhesive.
The resin pipe according to this invention is advantageous in that a pipe material is not eluted outward even in a severe environment exposed to hydrofluoric acid or the like and that no influence is given to a liquid, such as ultrapure water, transported inside. That is, the resin pipe according to this invention is adapted to suppress permeation of a chemical solution, such as hydrofluoric acid, present in the environment and to suppress permeation of the liquid inside the resin pipe to the outside of the resin pipe.
Referring to
It is desired that the fluororesin forming the inner layer 12 of the resin pipe 10 is PFA (a tetrafluoroethylene-perfluoroalkylvinylether copolymer) and that the fluororesin forming the outermost layer 18 is PFA also. Nylon forming the intermediate layer 14 is desirably nylon 6 or a copolymer of nylon 6 and nylon 12. In addition, the adhesive layer 16 is preferably formed by a fluorine-based adhesive.
As a specific example, the resin pipe 10 comprises the inner layer 12 made of PFA and having a thickness of 0.2 mm, the adhesive layer 16 made of the fluorine-based adhesive and having a thickness of 0.1 mm, the intermediate layer 14 made of nylon and having a thickness of 0.7 mm, and the outermost layer 18 made of PFA and having a thickness of 0.1 mm.
Thus, the inner layer 12 is made of PFA which is inactive against ultrapure water, various chemical solutions, and various gases and excellent in durability. On the other hand, the outermost layer 18 is made of PFA also. With this structure, even if the resin pipe 10 is placed in a severe environment exposed to a chemical solution such as hydrofluoric acid, the outermost layer 18 is not eroded by the chemical solution and the inner layer 12 is not eroded by a chemical solution transported inside.
The intermediate layer 14 of nylon is adhered onto the inner layer 12 of PFA by means of the adhesive layer 16. This makes it possible to reduce an oxygen permeability and an oxygen permeability coefficient for oxygen transmitted from the outside into the resin tube 10.
In the illustrated example, the outermost layer 18 of PFA directly covers the intermediate layer 14 without using an adhesive.
Referring to
On the other hand, the crosshead die 22 is supplied with a fluororesin (herein, PFA) which is extruded through a nozzle 24 in a direction perpendicular to the feeding direction to produce a PFA tube 26. The PFA tube 26 formed by extrusion is pulled out in the feeding direction together with the resin tube 20. Thus, the resin tube 20 is coated with a PFA layer. As a result, the resin tube 10 of a four-layer structure comprising the outermost layer 18 illustrated in
Next referring to
Permeability Coefficient (molecules·cm)/(cm2·sec·Pa)=(Amount of Permeated Substance×Thickness of Sample)/(Area of Sample×Contact Time×Pressure Difference) (1)
Herein, the pressure difference is a difference in pressure of the permeated substance on opposite sides of the sample.
As a result of measurement using the measurement system illustrated in
In the foregoing embodiment, description has been made of a tube comprising a combination of nylon and PFA. However, it is possible to combine nylon or PVDF with a different kind of fluororesin, for example, ETFE, PTFE, PVDC, or FEP. In this case, a material resistant against an alkaline aqueous solution, an acidic aqueous solution, a neutral aqueous solution, or an organic solvent is preferably used as the inner layer.
The resin tube according to this invention is applicable not only to a pipe between containers but also to various pipes which are used in a semiconductor manufacturing apparatus, a liquid crystal manufacturing apparatus, or the like and which are placed in an environment exposed to a chemical solution. The pipes may not always be restricted to the chemical solution supply pipe and the ultrapure water transport pipe but may be applied to any other pipes used in the semiconductor manufacturing apparatus and the like.
While this invention has thus far been described in connection with the exemplary embodiment thereof, it will readily be possible for those skilled in the art to put this invention into practice in various other manners.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2007-338690 | Dec 2007 | JP | national |
