Claims
- 1. A polymer resin for use in a chemically amplified resist represented by the general formula (I): ##STR21## wherein R.sub.1 is selected from the group consisting of t-butyl and tetrahydropyranyl; R.sub.2 is selected from the group consisting of hydrogen and methyl; n and m are integers; and the ratio of n/(m+n) ranges from 0.1 to 0.9.
- 2. A polymer resin according to claim 1, wherein said resin has a weight average molecular weight ranging from 5,000 to 200,000.
- 3. A polymer resin according to claim 1, wherein R.sub.1 is t-butyl and R.sub.2 is hydrogen.
Priority Claims (1)
Number |
Date |
Country |
Kind |
96-532 |
Jan 1996 |
KRX |
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Parent Case Info
This application is a divisional of application Ser. No. 08/665,231, filed 17 Jun. 1996, pending.
Non-Patent Literature Citations (1)
Entry |
In-house Computer Generated Abstract pp. 18-20 Answer 8 of 9 document No. 120:90851 by Kobayashi et al; JP91-246541 910902. |
Divisions (1)
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Number |
Date |
Country |
Parent |
665231 |
Jun 1996 |
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