Resonant Beam Silicon Accelerometers

Information

• NSF Award
• 9161136

Owner

• Silicon Microstructures, Inc.

• Award Id

  9161136

• Award Effective Date

  1/15/1992 - 32 years ago

• Award Expiration Date

  9/30/1992 - 31 years ago

• Award Amount

  $ 47,117.00

• Award Instrument

  Standard Grant

This award provides support to analyze a new micromechanical structure for the precision measurement of acceleration. The device utilizes a high Q silicon resonator incorporated into the silicon hinge of a monolithic silicon accelerometer. Resonators have the potential of offering truly exceptional stability at very low cost and with only minor additional processing complexity over what is needed currently. Resonant beam structures have been fabricated for a number of pressure sensor applications to demonstrate experimental feasibility. This work build upon the pressure sensing technology to create a self- contained silicon accelerometer structure.

• Program Officer

  Ritchie B. Coryell

• Min Amd Letter Date

  1/29/1992 - 32 years ago

• Max Amd Letter Date

  1/29/1992 - 32 years ago

• ARRA Amount

• Name

  Silicon Microstructures Inc

• City

  Fremont

• State

  CA

• Country

  United States

• Address

  47166 Crucillo Court

• Postal Code

  945397219

• Phone Number

  4156510817

• First Name

  Henry

• Last Name

  Allen

• Start Date

  1/15/1992 12:00:00 AM

• Name

  Engineering-Electrical

• Code

  55