Retainer plate of top heater for wafer processing furnace

Information

  • Patent Grant
  • D962183
  • Patent Number
    D962,183
  • Date Filed
    Friday, December 27, 2019
    5 years ago
  • Date Issued
    Tuesday, August 30, 2022
    2 years ago
  • US Classifications
    Field of Search
    • US
    • D13 182
    • D13 184
    • D13 199
    • D13 123
    • D15 144
    • D15 1441
    • D15 1442
    • D15 140
    • D15 199
    • 156 345120
    • 156 345130
    • 156 345140
    • 156 471000
    • 156 472000
    • 156 345370
    • 156 345620
    • 156 912000
    • 451 173000
    • 451 177000
    • 451 028000
    • 451 282000
    • 451 286000
    • 451 287000
    • 451 288000
    • 451 290000
    • 451 296000
    • 451 307000
    • 451 398000
    • 451 051000
    • 118 728000
    • CPC
    • H01L21/67098
    • H01L21/67103
    • H01L21/67109
    • H01L21/67115
    • H01L21/67
    • H01L21/673
    • H01L21/6735
    • H01L21/67369
    • H01L21/67011
    • H01L21/67757
    • B24B5/00
    • B24B37/27
    • B24B37/30
    • B24B37/32
    • B24B29/00
    • B24B7/22
    • B24B7/228
    • C23C16/4587
    • C23C16/45546
    • C23C16/4584
    • C23C16/46
    • C23C16/458
  • International Classifications
    • 1303
    • Term of Grant
      15Years
Abstract
Description


FIG. 1 is a front, top and right side perspective view of a retainer plate of top heater for wafer processing furnace showing our new design;



FIG. 2 is a front elevational view thereof;



FIG. 3 is a left side elevational view thereof;



FIG. 4 is a right side elevational view thereof;



FIG. 5 is a top plan view thereof; and



FIG. 6 is a bottom plan view thereof.



FIG. 7 is a rear elevational view thereof; and,



FIG. 8 is a cross-sectional view taken along line 8-8 in FIG. 2.


Claims
  • The ornamental design for a retainer plate of top heater for wafer processing furnace, as shown and described.
Priority Claims (1)
Number Date Country Kind
2019-015586 Jul 2019 JP national
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