Retaining ring for substrate

Information

  • Patent Grant
  • D981459
  • Patent Number
    D981,459
  • Date Filed
    Wednesday, June 16, 2021
    3 years ago
  • Date Issued
    Tuesday, March 21, 2023
    a year ago
  • US Classifications
    Field of Search
    • US
    • D23 249
    • D23 259
    • D23 262
    • D23 269
    • D15 138
    • D15 139
    • D15 143
    • D15 144
    • D15 1441
    • D15 1442
    • D15 150
    • D15 199
    • D13 118
    • D13 122
    • D13 133
    • D13 162
    • D13 182
    • D13 184
    • D13 199
    • D22 113
    • D22 119
    • D08 354
    • D08 396
    • D08 399
    • CPC
    • H01J37/3414
    • H01J37/3423
    • H01L21/02631
    • H01L2221/68363
    • H01L2224/75186-75189
    • H01L21/67742
    • H01L21/0226
    • H01L21/02263
    • H01L21/02266
    • H01L21/02269
    • H01L21/02271
    • F16J7/00
    • E04D13/14
    • C23C14/3407
    • C23C14/35
  • International Classifications
    • 1509
    • Term of Grant
      15Years
Abstract
Description

1. Retaining ring for substrate




1.1
: Perspective




1.2
: Perspective




1.3
: Bottom




1.4
: Top




1.5
: Front




1.6
: Cross sectional




1.7
: Cross sectional




1.8
: Cross sectional


This article is used to hold a substrate in a ring and polish one side of the substrate during the polishing process of wafers and other substrates in the manufacture of semiconductors and other products; the rear view, right side view, and left side view are all represented identically to the front view.


Claims
  • The ornamental design for a retainer ring for substrate, as shown and described.
US Referenced Citations (17)
Number Name Date Kind
D638951 Bedingham May 2011 S
D667561 Bedingham Sep 2012 S
D699200 Nagakubo Feb 2014 S
D703160 Tanimura Apr 2014 S
D709536 Yoshimura Jul 2014 S
D766849 Fukushima Sep 2016 S
D770992 Tauchi Nov 2016 S
D793976 Fukushima Aug 2017 S
D794585 Nabeya Aug 2017 S
D799437 Nabeya Oct 2017 S
D845568 Ishii Apr 2019 S
D876504 Lee Feb 2020 S
D922229 Jun Jun 2021 S
D940670 Kim Jan 2022 S
D943539 Perry Feb 2022 S
11390945 Jun Jul 2022 B2
11396082 Nishida Jul 2022 B2
Foreign Referenced Citations (1)
Number Date Country
1494712 Apr 2017 JP