Ring for a plasma processing apparatus

Information

  • Patent Grant
  • D836573
  • Patent Number
    D836,573
  • Date Filed
    Tuesday, July 18, 2017
    6 years ago
  • Date Issued
    Tuesday, December 25, 2018
    5 years ago
  • US Classifications
    Field of Search
    • US
    • D13 158-177
    • D13 182
    • D13 18
    • D15 122
    • D15 199
    • D15 138
    • D15 144
    • D15 1441
    • 204 286100
    • 204 297100
    • 205 118000
    • 205 123000
    • 200 0010R0
    • 200 0050R0
    • 200 0520R0
    • 200 315000
    • 200 310000
    • 200 0060A0
    • 200 302100
    • 200 308000
    • 200 314000
    • 200 317000
    • 200 0110R0
    • 200 0160B0
    • 118 666000
    • 118 715000
    • 118 733000
    • 219 444100
    • 219 147000
    • 219 247000
    • 438 482000
    • 438 706000
    • 438 716000
    • 438 758000
    • 451 285000
    • D08 399
    • CPC
    • C25D17/10
    • C25D17/12
    • C25D17/14
    • C25D17/06
    • C25D17/08
    • C25D7/12
    • C25D7/10
    • H01L21/283
    • H01H9/02
    • H01H9/0214
    • H01H9/04
    • H01H9/161
    • H01H13/04
    • H01H13/06
    • H01H13/023
    • H01H21/08
    • H01H19/025
  • International Classifications
    • 1303
    • Term of Grant
      15Years
Abstract
Description

This application contains subject matter related to the following co-pending U.S. design patent applications:


Application Ser. No. 29/610,995, filed herewith and entitled “Electrode Cover for a Plasma Processing Apparatus”;


Application Ser. No. 29/610,996, filed herewith and entitled “Electrode Cover for a Plasma Processing Apparatus”;


Application Ser. No. 29/610,999, filed herewith and entitled “Cover Ring for a Plasma Processing Apparatus”; and


Application Ser. No. 29/611,001, filed herewith and entitled “Discharge Chamber for a Plasma Processing Apparatus”.



FIG. 1 is a front, top and right side perspective view of a ring for a plasma processing apparatus, showing our new design;



FIG. 2 is a front, bottom and right side perspective view thereof;



FIG. 3 is a front elevational view thereof;



FIG. 4 is a rear elevational view thereof;



FIG. 5 is a top plan view thereof;



FIG. 6 is a left side elevational view thereof;



FIG. 7 is a right side elevational view thereof;



FIG. 8 is a bottom plan view thereof;



FIG. 9 is a cross-sectional view taken along line 9-9 of FIG. 5; and,



FIG. 10 is an enlarged view of the portion shown in box 10 in FIG. 9.


The broken lines showing a rectangular box labeled 10 in the drawings in FIG. 9 form no part of the claimed design.


Claims
  • The ornamental design for a ring for a plasma processing apparatus, as shown and described.
Priority Claims (1)
Number Date Country Kind
2017-001754 Jan 2017 JP national
US Referenced Citations (28)
Number Name Date Kind
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Foreign Referenced Citations (3)
Number Date Country
D1210213 Jun 2004 JP
D1361441 Jun 2009 JP
D1551512 Jun 2016 JP
Non-Patent Literature Citations (4)
Entry
Ichino et al., Design U.S. Appl. No. 29/610,995, filed Jul. 18, 2017.
Ichino et al., Design U.S. Appl. No. 29/610,996, filed Jul. 18, 2017.
Ichino et al., Design U.S. Appl. No. 29/610,999, filed Jul. 18, 2017.
Nunomura et al., Design U.S. Appl. No. 29/611,001, filed Jul. 18, 2017.