Roller shaft for semiconductor cleaning

Information

  • Patent Grant
  • D710062
  • Patent Number
    D710,062
  • Date Filed
    Thursday, December 8, 2011
    14 years ago
  • Date Issued
    Tuesday, July 29, 2014
    12 years ago
  • US Classifications
    Field of Search
    • US
    • D32 1
    • D32 25
    • D32 35
    • 015 077000
    • 015 102000
    • 015 230000
    • 015 230120
    • 015 230140
    • 015 230160
    • 134 006000
    • 451 194000
  • International Classifications
    • 2503
    • Term of Grant
      14Years
Abstract
Description


FIG. 1 is a front elevational view of a roller shaft for semiconductor cleaning showing our new design;



FIG. 2 is a rear elevation view thereof;



FIG. 3 is a top plan view thereof, the bottom view being a mirror image thereof;



FIG. 4 is a right side view thereof, the left side view being a mirror image thereof;



FIG. 5 is a cross sectional view taken along the line 5-5 of FIG. 1;



FIG. 6 is a front perspective view, at an enlarged scale;



FIG. 7 is a front elevational view thereof, at an enlarged scale;



FIG. 8 is an enlarged view of the area 8 seen in FIG. 3; and,



FIG. 9 is an enlarged view of the area 9 seen in FIG. 4.


The broken line showing depicts environmental subject matter only and forms no part of the claimed design.


Claims
  • We claim the ornamental design for a roller shaft for semiconductor cleaning, as shown and described.
Priority Claims (1)
Number Date Country Kind
2011-013045 Jun 2011 JP national
US Referenced Citations (23)
Number Name Date Kind
5745945 Manfredi et al. May 1998 A
6240588 Dickey et al. Jun 2001 B1
6247197 Vail et al. Jun 2001 B1
6330729 Brunelli et al. Dec 2001 B1
6464796 Vail et al. Oct 2002 B2
6467120 Ziemins et al. Oct 2002 B1
6502273 Mihara et al. Jan 2003 B1
6523210 Andros Feb 2003 B1
6543084 Dickey et al. Apr 2003 B2
6598255 Gohda et al. Jul 2003 B1
6684447 Mihara et al. Feb 2004 B2
6802099 Murakami et al. Oct 2004 B2
6842933 Oikawa et al. Jan 2005 B2
7735177 Farber et al. Jun 2010 B1
7955693 Drury Jun 2011 B2
8092730 Wargo et al. Jan 2012 B2
8372210 Sin et al. Feb 2013 B2
8444890 Drury May 2013 B2
8460475 Wargo et al. Jun 2013 B2
8496758 Idani Jul 2013 B2
8533895 Benson Sep 2013 B2
20130255720 Tyrrell et al. Oct 2013 A1
20130255721 Tyrrell et al. Oct 2013 A1