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5886429 | Grady et al. | Mar 1999 | A |
5920132 | Rockfield, Jr. et al. | Jul 1999 | A |
5990667 | Degeneff et al. | Nov 1999 | A |
6285169 | McEachern | Sep 2001 | B1 |
Entry |
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SEMI F47-0200, Specification for semiconductor processing equipment, Voltage sag immunity, SEMI (Semiconductor Equipment and Materials International, 805 East Middlefield Raod, Mountain View, CA 94043), Feb. 2000. |
SEMI F42-0600, Test method for semiconductor processing equipment, Voltage sag immunity, SEMI (Semiconductor Equipment and Materials International, 805 East Middlefield Raod, Mountain View, CA 94043), Jun. 2000. |