Number | Name | Date | Kind |
---|---|---|---|
4131938 | Milberger et al. | Dec 1978 | |
5355295 | Brennen | Oct 1994 | |
5532577 | Doluca | Jul 1996 | |
5541808 | Bastian | Jul 1996 | |
5886429 | Grady et al. | Mar 1999 | |
5920132 | Rockfield et al. | Jul 1999 | |
5990667 | Degeneff et al. | Nov 1999 | |
6118676 | Divan et al. | Sep 2000 | |
6215202 | Luongo et al. | Apr 2001 |
Entry |
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SEMI F47-0200, Specification for semiconductor processing equipment, Voltage sag immunity, SEMI (Semiconductor Equipment and Materials International, 805 East Middlefield Raod, Mountain View, CA 94043), Feb. 2000. |
SEMI F42-0600, Test method for semiconductor processing equipment, voltage sag immunity, SEMI (Semiconductor Equipment and Materials International, 805 East Middlefield Raod, Mountain View, CA 94043), Jun. 2000. |