SBIR: Optical Characterization Techniques for Silicon-on- Insulator Material

Information

• NSF Award
• 8660077

Owner

• SANDIA NATIONAL LABORATORIES

• Award Id

  8660077

• Award Effective Date

  2/1/1987 - 37 years ago

• Award Expiration Date

  7/31/1987 - 37 years ago

• Award Amount

  $ 38,779.00

• Award Instrument

  Standard Grant

Present techniques of examining recrystallized silicon, including SOI material, include a wet (acid) etch and examination with an optical microscope, X-ray diffraction, SEM or TEM microscopes. These techniques are slow, and usually the sample is destroyed. The PI propose investigating angle-resolved light scatter techniques as a technique to examine recrystallized silicon as well as other microelectronics materials. The technique would be nonperturbing, could be applied in situ, would be fast, and could be adapted for automation.

• Program Officer

  Ritchie B. Coryell

• Min Amd Letter Date

  1/29/1987 - 37 years ago

• Max Amd Letter Date

  1/29/1987 - 37 years ago

• ARRA Amount

• Name

  Sandia Systems

• City

  Albuquerque

• State

  NM

• Country

  United States

• Address

  13423 Desert Hills N.E.

• Postal Code

  871113032

• Phone Number

  5052940438

• First Name

  Scott

• Last Name

  Wilson

• Start Date

  2/1/1987 12:00:00 AM

• Name

  Engineering-Electrical

• Code

  55