9861296<br/> This Small Business Innovation Research Phase I project will incorporate advanced radiation and chemistry models into a commercial computational fluid dynamics code for the purpose of developing a commercial simulation tool for optimizing the growth of compound III V Layers using Metalorganic Vapor Phase Epitaxy (MOVPE). The code will be extensively tested and validated for industrial reactors.<br/> Heteroepitaxy of compound semiconductor materials on heterogeneous substrates is a vital technology for optoelectronics in the blue to ultra violet wavelength region and non linear optics in the infra red region and power devices and integrated sensor devices. The proposed model will be an enabling technology in demonstrating defect free heteroepitaxial growth by facilitating appropriate control of the MOVPE process.