SBIR Phase I: Bottom Anti-Reflective Coatings - BARCs - for Production of Advanced Semiconductor Devices by 157 nm Lithography

Information

• NSF Award
• 0319158

Owner

• BREWER SCIENCE, INC.

• Award Id

  0319158

• Award Effective Date

  7/1/2003 - 21 years ago

• Award Expiration Date

  12/31/2003 - 21 years ago

• Award Amount

  $ 100,000.00

• Award Instrument

  Standard Grant

This Small Business Innovation Research Phase I project will develop bottom anti-reflective coatings (BARCs) for production of advanced semiconductor devices by 157 nm lithography . The NSF Phase I technical objectives are to demonstrate the feasibility of potential technical approaches to workable 157nm BARCs. The prototype 157 nm BARCs will be produced and characterized for critical industry requirements such as low reflectivity, fast plasma etching rate, and lithographic performance. At least one prototype will be selected and optimized for use with 157-nm photoresists so that the commercialization will be projected in the Phase II. <br/> The 157-nm BARCs developed from the NSF Phase I study will result in a significant step forward for 157-nm lithography technology and contribute to the future of advanced semiconductor devices (integrated circuits) fabrication.

• Program Officer

  Muralidharan S. Nair

• Min Amd Letter Date

  5/30/2003 - 21 years ago

• Max Amd Letter Date

  5/30/2003 - 21 years ago

• ARRA Amount

• Name

  Brewer Science Incorporated

• City

  ROLLA

• State

  MO

• Country

  United States

• Address

  2401 BREWER DR

• Postal Code

  654017003

• Phone Number

  5733640300

• First Name

  Liu

• Last Name

  He

• Email Address

  liu.he@brewerscience.com

• Start Date

  5/30/2003 12:00:00 AM

• Name

  Materials Research

• Code

  106000