SBIR Phase I: High Volume MOCVD AlGaN Production Tool

Information

• NSF Award
• 0128093

Owner

• STRUCTURED MATERIALS INDUSTRIES, INC.

• Award Id

  0128093

• Award Effective Date

  1/1/2002 - 22 years ago

• Award Expiration Date

  10/31/2002 - 21 years ago

• Award Amount

  $ 100,000.00

• Award Instrument

  Standard Grant

This Small Business Innovation Research (SBIR) Phase I Project will develop a high volume/high pressure RDR-MOCVD nitride production tool. Two fundamental problems will be addressed. The first is the need for large area substrate quality and the second is the need for large area/high volume MOCVD nitride epitaxy production tools. This project will demonstrate a scaleable tool to meet these needs.<br/><br/>The commercial applications of this project will be in electronics and optoelectronic device markets.

• Program Officer

  Cheryl F. Albus

• Min Amd Letter Date

  11/15/2001 - 22 years ago

• Max Amd Letter Date

  11/15/2001 - 22 years ago

• ARRA Amount

• Name

  STRUCTURED MATERIALS INDUSTRIES, INC.

• City

  PISCATAWAY

• State

  NJ

• Country

  United States

• Address

  201 CIRCLE DRIVE NORTH

• Postal Code

  088543723

• Phone Number

  7323029274

• First Name

  Gary

• Last Name

  Tompa

• Email Address

  gstompa@aol.com

• Start Date

  11/15/2001 12:00:00 AM

• Name

  Industrial Technology

• Code

  308000