SBIR Phase I: Piezo-Driven Inertial Stages for Ultra-High-Vacuum (UHV)

Information

• NSF Award
• 0232923

Owner

• DYNAMIC STRUCTURES AND MATERIALS, LLC

• Award Id

  0232923

• Award Effective Date

  1/1/2003 - 21 years ago

• Award Expiration Date

  8/31/2003 - 21 years ago

• Award Amount

  $ 99,999.00

• Award Instrument

  Standard Grant

This Small Business Innovation Research Phase I project will develop a piezoelectric motor-drive with Ultra-High-Vacuum (UHV) compatibility for high-speed driving of positioning platforms. The proposed piezoelectric motor-drive will provide an as-yet unrealized combination of several desirable characteristics: nanometer and sub-nanometer precision; speeds in excess of 500 mm/s; drive capacities in the range of 10's of kilograms; and, ranges of travel in excess of 500 mm. <br/><br/>The commercial potential of this concept will provide a revolutionary means for rapid and accurate materials handling for fabrication, inspection, metrology, and packaging of microparts and microsystems.

• Program Officer

  Cheryl F. Albus

• Min Amd Letter Date

  10/28/2002 - 22 years ago

• Max Amd Letter Date

  7/25/2003 - 21 years ago

• ARRA Amount

• Name

  DYNAMIC STRUCTURES AND MATERIALS, LLC

• City

  FRANKLIN

• State

  TN

• Country

  United States

• Address

  114 SE parkway Ct

• Postal Code

  370644015

• Phone Number

  6155956665

• First Name

  Jeffrey

• Last Name

  Paine

• Email Address

  jpaine@dynamic-structures.com

• Start Date

  10/28/2002 12:00:00 AM

• Name

  Industrial Technology

• Code

  308000