SBIR Phase I: PZT Multimorph MOEMS Deformable Mirror

Information

• NSF Award
• 0340435

Owner

• Iris AO, Inc.

• Award Id

  0340435

• Award Effective Date

  1/1/2004 - 21 years ago

• Award Expiration Date

  10/31/2004 - 20 years ago

• Award Amount

  $ 99,200.00

• Award Instrument

  Standard Grant

This Small Business Innovation Research Phase I project proposes to fabricate an innovative multi-morph actuator. The feasibility of a micro-mirror actuating technology that can produce a MEMS deformable mirror (DM) with unprecedented capabilities will be researched. Conventional deformable mirrors suffer from inadequate speed, large size, and lack of integrated control electronics. A new actuator design should drastically reduce the power consumption for a DM, which should increase greatly the amount of integration possible with CMOS drive electronics. This extremely low voltage should allow the mirror segments to be assembled onto sub-micron circuits, which drive the mirrors and include integrated high-bandwidth position-feedback circuits.<br/><br/>This unique high-force multi-morph actuator should find use in a number of MEMS devices that are based on existing actuation technologies. This micro-mirror technology should also be suitable a variety of other optical applications requiring the high speed switching of micro-mirrors such as in telecommunications and in display technology.

• Program Officer

  Muralidharan S. Nair

• Min Amd Letter Date

  11/13/2003 - 21 years ago

• Max Amd Letter Date

  9/21/2004 - 20 years ago

• ARRA Amount

• Name

  Iris AO, Inc.

• City

  BERKELEY

• State

  CA

• Country

  United States

• Address

  2680 BANCROFT WAY

• Postal Code

  947041717

• Phone Number

  5108492375

• First Name

  Mark

• Last Name

  Lemkin

• Email Address

  info@irisao.com

• Start Date

  11/13/2003 12:00:00 AM

• End Date

  12/18/2003

• First Name

  Thor

• Last Name

  Juneau

• Email Address

  thor.juneau@irisao.com

• Start Date

  2/13/2004 12:00:00 AM

• End Date

  09/21/2004

• First Name

  Michael

• Last Name

  Helmbrecht

• Email Address

  michael.helmbrecht@irisao.com

• Start Date

  9/21/2004 12:00:00 AM

• Name

  Technology Transfer

• Code

  110000