SBIR Phase I: Real-Time Sensing and Control for Physical Vapor Deposition (PVD) Processes in IC Manufacture

Information

• NSF Award
• 9761085

Owner

• Sensys Instruments Corporation

• Award Id

  9761085

• Award Effective Date

  1/1/1998 - 27 years ago

• Award Expiration Date

  6/30/1998 - 26 years ago

• Award Amount

  $ 100,000.00

• Award Instrument

  Standard Grant

Sensys Instruments Corp. will develop innovative acoustic sensor and model-based multivariable control technology to measure and control wafer temperature and film thickness in Physical Vapor Deposition (PVD) processes, a key technology used in semiconductor device wafer fabrication. There are currently no commercially available sensors that can provide real-time measurements of wafer temperature and thickness in PVD processes. This project will create an integrated package of sensor hardware, signal processing software and control software, adapted for PVD equipment.

• Program Officer

  Michael F. Crowley

• Min Amd Letter Date

  11/13/1997 - 27 years ago

• Max Amd Letter Date

  11/13/1997 - 27 years ago

• ARRA Amount

• Name

  Sensys Instruments Corporation

• City

  Santa Clara

• State

  CA

• Country

  United States

• Address

  2090 Duane Avenue

• Postal Code

  950543306

• Phone Number

  4088440440

• First Name

  Fred

• Last Name

  Stanke

• Email Address

  fstanke@thermawave.com

• Start Date

  11/13/1997 12:00:00 AM

• Name

  Industrial Technology

• Code

  308000