SBIR Phase I: Scanning Electron Microscope Micro-Force Testing System (SEM/MFTS)

Information

  • NSF Award
  • 0232559
Owner
  • Award Id
    0232559
  • Award Effective Date
    1/1/2003 - 23 years ago
  • Award Expiration Date
    6/30/2003 - 22 years ago
  • Award Amount
    $ 99,984.00
  • Award Instrument
    Standard Grant

SBIR Phase I: Scanning Electron Microscope Micro-Force Testing System (SEM/MFTS)

This Small Business Innovation Research Phase I project will develop a Micro-Force Test Apparatus inside a Scanning Electron Microscope to better learn the micromechanical properties of materials and MEMS devices. The project will explore mechanical properties of MEMS devices as well as individual phases in metals. The properties to be explored are compressive strength, shear strength, tensile strength, flex, and peel. In addition, microgrippers will be added to the end of the linear motion feed though. This addition will allow for assembly of other components using various attachment techniques including thermoset polymer adhesives, solders and brazes. <br/> The potential commercial application for the Microforce Testing System and fixtures will be to characterize materials such as metals and ceramics and MEMS-type devices.

  • Program Officer
    Cheryl F. Albus
  • Min Amd Letter Date
    12/3/2002 - 23 years ago
  • Max Amd Letter Date
    12/3/2002 - 23 years ago
  • ARRA Amount

Institutions

  • Name
    TOUCHSTONE RESEARCH LABORATORY LTD
  • City
    TRIADELPHIA
  • State
    WV
  • Country
    United States
  • Address
    RR 1 BOX 100B
  • Postal Code
    260599707
  • Phone Number
    3045475800

Investigators

  • First Name
    Gollapudi
  • Last Name
    Murty
  • Email Address
    gsm@trl.com
  • Start Date
    12/3/2002 12:00:00 AM

FOA Information

  • Name
    Industrial Technology
  • Code
    308000