SBIR Phase I: Whole Wafer Thermal Imaging for Real-Time Process Monitoring and Control

Information

• NSF Award
• 9860186

Owner

• Advanced Fuel Research, Inc.

• Award Id

  9860186

• Award Effective Date

  1/1/1999 - 25 years ago

• Award Expiration Date

  6/30/1999 - 25 years ago

• Award Amount

  $ 99,816.00

• Award Instrument

  Standard Grant

9860186<br/> This Small Business Innovation Research Phase I will develop a whole wafer sensor for in situ measurements of temperature, emissivity and film stack properties, from a model-based analysis of thermal radiance images. Exploiting commercial infrared imaging hardware, the proposed compact system will provide high performance measurement capability from a single small infrared window with optical access to the wafer surface. Temperature monitoring has been identified as an important hurdle blocking future process enhancements in semiconductor manufacturing. Improved in situ diagnostics for substrate temperature, emissivity and film properties will incur many benefits inclunding improved quality and to optimize process process efficiency, reduced scrap and cost and reduced time parameters.

• Program Officer

  Deborah L. Crawford

• Min Amd Letter Date

  11/17/1998 - 26 years ago

• Max Amd Letter Date

  11/17/1998 - 26 years ago

• ARRA Amount

• Name

  Advanced Fuel Research, Inc.

• City

  East Hartford

• State

  CT

• Country

  United States

• Address

  87 Church Street

• Postal Code

  061083720

• Phone Number

  8605289806

• First Name

  Harri

• Last Name

  Latvakoski

• Email Address

  harri@AFRInc.com

• Start Date

  11/17/1998 12:00:00 AM

• Name

  Engineering & Computer Science

• Code

  510403