NSF Award
9901843
This Small Business Innovation Research (SBIR) Phase II project will demonstrate a novel, high resolution laser microscope whose resolution can be better than a fifth of the wavelength of the laser utilized. The laser microscope can be operated from the near infrared to near ultraviolet. Operating at 400nm, this microscope will provide 80nm resolution or l/5 with working distance of several millimeters and depth of focus of many wavelengths. The project includes designing a prototype suitable for commercial deployment. The dual objectives of the program are to demonstrate the technology on an optical table in the laboratory as well as to design the core optics for required wide spread commercialization.<br/> The research will include: (1) complete characterization of the instrument at different wavelengths, (2) experiments on commercially important substrates like silicon and biological specimen, and (3) development of a compact prototype "objective" to improve performance. Biological specimens as well as masks from the semiconductor industry will be used in the experiments in Phase II to establish the technique. Science Research Laboratory will continue to work with the industry during Phase II so as to leverage NSF's investment and rapidly move the proposed technology into Phase III.
