SBIR Phase II: Development of a Cell Controller for Epitaxial Silicon Fabrication

Information

• NSF Award
• 9801190

Owner

• On-Line Technologies Incorporated

• Award Id

  9801190

• Award Effective Date

  9/1/1998 - 26 years ago

• Award Expiration Date

  2/28/2001 - 23 years ago

• Award Amount

  $ 395,521.00

• Award Instrument

  Standard Grant

On-Line Technologies, Inc. will develop technology enabling wafer-by-wafer closed loop control of semiconductor process equipment. A closed-loop cell control system providing robust, operator-free, automated, closed-loop control will be developed, which can improve yield, reduce the need for test wafers, decrease operating and testing manpower, shorten development cycles and reduce downtime in the semiconductor industry. These improvements could increase the capacity of a fabrication line by up to 30%.

• Program Officer

  Michael F. Crowley

• Min Amd Letter Date

  9/1/1998 - 26 years ago

• Max Amd Letter Date

  7/17/2000 - 24 years ago

• ARRA Amount

• Name

  On-Line Technologies Incorporated

• City

  East Hartford

• State

  CT

• Country

  United States

• Address

  87 Church Street

• Postal Code

  061083720

• Phone Number

  8602910719

• First Name

  Peter

• Last Name

  Rosenthal

• Email Address

  prosenth@online-ftir.com

• Start Date

  9/1/1998 12:00:00 AM

• Name

  Engineering & Computer Science

• Code

  510403