SBIR Phase II: Electrostatic Self-Assembly Processes for Fabrication of MEMS Materials and Devices

Information

• NSF Award
• 9983175

Owner

• Nanosonics Limited

• Award Id

  9983175

• Award Effective Date

  5/15/2000 - 24 years ago

• Award Expiration Date

  4/30/2004 - 20 years ago

• Award Amount

  $ 461,800.00

• Award Instrument

  Standard Grant

This Small Business Innovation Research (SBIR) Phase II project will develop sensor, actuator, and micro-electromechanical system (MEMS) products based on electrostatically self-assembled piezoelectric and electrostrictive polymer thin films. Phase I found that an electrostatic self-assembly (ESA) process may be used to synthesize piezoelectric and electrostrictive materials with large transduction coefficients from a variety of dipolar molecular materials. This indicates an ability to replace poled polymer and conventional ceramic transducer materials in numerous sensor and actuator devices and produce benefits in simplified processing, cost savings and improved performance. In addition, the ability to select patterns and release portions of ESA-processed multilayer films allows the formation of MEMS structures, and thereby a new approach to surface micromachining. Phase II will optimize the ESA synthesis process in manufacture of sensors, actuators, and MEMS products and demonstrate ESA thin-film based devices, including polymer MEMS.<br/><br/>New ESA-processed piezoelectric and electrostrictive thin film materials will have widespread potential commercial applications in sensor and actuator devices used for instrumentation and controls.

• Program Officer

  Muralidharan S. Nair

• Min Amd Letter Date

  5/22/2000 - 24 years ago

• Max Amd Letter Date

  12/20/2002 - 22 years ago

• ARRA Amount

• Name

  Nanosonic Inc.

• City

  Pembroke

• State

  VA

• Country

  United States

• Address

  158 Wheatland Drive

• Postal Code

  241363645

• Phone Number

  5406266266

• First Name

  Yanjing

• Last Name

  Liu

• Email Address

  liuya@lunainnovations.com

• Start Date

  5/22/2000 12:00:00 AM

• End Date

  11/28/2001

• First Name

  Tingying

• Last Name

  Zeng

• Email Address

  tyzeng@nanosonic.com

• Start Date

  3/14/2002 12:00:00 AM

• First Name

  Kristie

• Last Name

  Cooper

• Email Address

  klcooper@vt.edu

• Start Date

  11/28/2001 12:00:00 AM

• End Date

  03/14/2002

• Name

  Industrial Technology

• Code

  308000

• Text

  SMALL BUSINESS PHASE II

• Code

  5373

• Text

  CIS BASE RESEARCH

• Code

  1057

• Text

  CIVIL INFRASTRUCTURE

• Text

  MANUFACTURING BASE RESEARCH

• Code

  9146

• Text

  UNDERGRADUATE EDUCATION

• Code

  9178

• Text

  SUPPL FOR UNDERGRAD RES ASSIST

• Code

  9231

• Text

  MANUFACTURING