SBIR Phase II: Optical Flow Controller

Information

  • NSF Award
  • 9412824
Owner
  • Award Id
    9412824
  • Award Effective Date
    10/1/1995 - 29 years ago
  • Award Expiration Date
    6/30/1998 - 26 years ago
  • Award Amount
    $ 300,000.00
  • Award Instrument
    Standard Grant

SBIR Phase II: Optical Flow Controller

94-12824 Manuccia This Small Business Innovation Research (SBIR) Phase II project will develop a new kind of compact flow sensor and control system, called the Optical Flow Controller (OFC), for use in chemical vapor deposition (CVD) and other semiconductor processing operations. Phase I successfully tested a laboratory prototype flow controller that uses a new technique called spectral correlation detection (SCD). This is an improved variant of infrared absorption spectroscopy that provides enhanced sensitivity and stability as well as a simplified optical design. Phase II will provide several alpha-test devices for later Phase II development. The OFC device is particularly useful when the analyte is dilute in a carrier gas and is generated by bubbling the carrier through a liquid phase sample of the analyte. This configuration is commonly used in organometallic-CVD and other semiconductor processing applications. The OFC technology is expected to find wide application in commercial manufacture of semiconductor devices, optical components, and thin films.

  • Program Officer
    Ritchie B. Coryell
  • Min Amd Letter Date
    9/28/1995 - 29 years ago
  • Max Amd Letter Date
    12/6/1997 - 27 years ago
  • ARRA Amount

Institutions

  • Name
    Physical Sciences Inc
  • City
    ANDOVER
  • State
    MA
  • Country
    United States
  • Address
    20 NEW ENGLAND BUS CTR DR
  • Postal Code
    018101077
  • Phone Number
    5086890003

Investigators

  • First Name
    William
  • Last Name
    Marinelli
  • Start Date
    12/6/1997 12:00:00 AM
  • First Name
    Thomas
  • Last Name
    Manuccia
  • Start Date
    9/28/1995 12:00:00 AM
  • End Date
    12/06/1997

FOA Information

  • Name
    Industrial Technology
  • Code
    308000
  • Name
    Engineering-Electrical
  • Code
    55