TREA

Seal for an assembly in a vapor deposition chamber

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Information

  • Patent Grant
  • D1027120
  • Patent Number
    D1,027,120
  • Date Filed
    Thursday, December 17, 2020
    3 years ago
  • Date Issued
    Tuesday, May 14, 2024
    17 days ago
  • US Classifications
    Field of Search
    • US
    • D23 269
    • D23 382
    • D08 44
    • D08 370
    • D06 672
    • D06 6772
    • D06 6775
    • D03 306
    • CPC
    • F24F13/078
    • F24F7/007
    • F24F7/065
    • F24F2221/14
    • F24F2013/205
    • F21V33/0096
    • F21V33/0088
    • F04D29/626
    • F04D29/4226
  • International Classifications
    • 2301
    • Term of Grant
      15Years
Information
Abstract
Description


FIG. 1 is top perspective view of a seal for an assembly in a vapor deposition chamber.



FIG. 2 is a bottom perspective view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.



FIG. 3 is a top plan view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.



FIG. 4 is a bottom plan view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.



FIG. 5 is a front view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.



FIG. 6 is a rear view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.



FIG. 7 is a right side view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.



FIG. 8 is a left side view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.



FIG. 9 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 showing details of an outer segment of the seal.



FIG. 10 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 showing details of a central segment of the seal.



FIG. 11 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 showing details of an outer segment of the seal.



FIG. 12 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 2 showing details of an outer segment of the seal.



FIG. 13 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 3 showing details of a central segment of the seal.



FIG. 14 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 4 showing details of a central segment of the seal.



FIG. 15 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 6 showing details of an outer segment of the seal.



FIG. 16 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 7 showing details of an outer segment of the seal; and,



FIG. 17 is a top plan view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 3 shown in a portion of an assembly (in phantom).


The broken and phantom lines in the Figures illustrate unclaimed parts of the seal for an assembly in a vapor deposition chamber and form no part of the claimed design.


Claims
  • The ornamental design for a seal for an assembly in a vapor deposition chamber, as shown and described.
US Referenced Citations (16)
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Entry
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