| Number | Date | Country | Kind |
|---|---|---|---|
| 197 44 953 | Oct 1997 | DE |
| Number | Name | Date | Kind |
|---|---|---|---|
| 5130192 | Takabayashi | Jul 1992 | A |
| 5388862 | Edwards | Feb 1995 | A |
| 5815292 | Walters | Sep 1998 | A |
| 5840161 | Woodard | Nov 1998 | A |
| 6284396 | Kaule et al. | Sep 2001 | B1 |
| Number | Date | Country |
|---|---|---|
| 19529171 | Feb 1997 | DE |
| WO 9607770 | Mar 1996 | WO |
| Entry |
|---|
| Vossen et al., “Thin Film Processes”, p. 48-49, (1978). |