Number | Date | Country | Kind |
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197 44 953 | Oct 1997 | DE |
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5130192 | Takabayashi | Jul 1992 | A |
5388862 | Edwards | Feb 1995 | A |
5815292 | Walters | Sep 1998 | A |
5840161 | Woodard | Nov 1998 | A |
6284396 | Kaule et al. | Sep 2001 | B1 |
Number | Date | Country |
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19529171 | Feb 1997 | DE |
WO 9607770 | Mar 1996 | WO |
Entry |
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Vossen et al., “Thin Film Processes”, p. 48-49, (1978). |