Number | Name | Date | Kind |
---|---|---|---|
3662119 | Romankiw et al. | May 1972 | |
3723665 | Lazzari et al. | Mar 1973 | |
3781476 | Hanazono | Dec 1973 | |
3853715 | Romankiw | Dec 1974 | |
4044394 | Hanazono | Aug 1977 | |
4127884 | Nouchi et al. | Nov 1978 | |
4158213 | Griffith | Jun 1979 | |
4165525 | Koel | Aug 1979 | |
4190872 | Jones et al. | Feb 1980 | |
4219853 | Albert et al. | Aug 1980 | |
4219854 | Church et al. | Aug 1980 | |
4219855 | Jones et al. | Aug 1980 | |
4241367 | Nomura et al. | Dec 1980 | |
4373173 | Robinson et al. | Feb 1983 | |
4376337 | Kobayasi et al. | Mar 1983 | |
4539616 | Yuito et al. | Sep 1985 | |
4613404 | Tabei | Sep 1986 | |
4652954 | Church | Mar 1987 | |
4743988 | Sato et al. | May 1988 | |
4791719 | Kobayashi | Dec 1988 |
Entry |
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C. J. Mogab, "Dry Etching", Chap. 8, VLSI Technology, edited by S. M. Sze, pp. 303-344, McGraw-Hill Book Company (1983). |
J. J. Kelly and C. H. de Minjer, Journal Electrochemical Society, vol. 122(7), pp. 931-936. |
J. C. Lier et al., IEEE Transactions on Magnetics, vol. MAG-12, No. 6, pp. 716-718, Nov. 1976. |
M. Hanazono et al., IEEE Transactions on Magnetics, vol. MAG-15, No. 6, pp. 1616-1618, Nov. 1979. |