Claims
- 1. A process for the vapor phase chromatographic separation of hydrogen fluoride from a gas stream comprising the steps of:
- a. passing said gas stream at a temperature of about 120.degree.-130.degree. F. into contact with an absorbent, high surface area solid support material having an extended surface area in the range of 100-300 m.sup.2 /gm. of material and having deposited thereon about 2-25 parts per 100 parts by weight of sodium fluoride to form a thermally decomposible molecule and thereby removing hydrogen fluoride from the gas stream;
- b. recovering said gas stream substantially free of hydrogen fluoride by removing it from contact with the support material and the thermally decomposible molecule deposited thereon; and,
- c. regenerating the sodium fluoride for reuse by raising the temperature of said support material and the thermally decomposible molecule deposited thereon to a temperature of about 240.degree. F. until substantially all of the hydrogen fluoride is driven off and recovered.
- 2. A process for the vapor phase chromatographic separation of silicon tetrafluoride from a gas stream comprising the steps of:
- a. passing said gas stream at a temperature of about 25.degree. C. into contact with an absorbent, high surface area solid support material having an extended surface area in the range of 100-300 m.sup.2 /gm. of material and having deposited thereon about 2-25 parts per 100 parts by weight of dioxane to form a thermally decomposible molecule and thereby removing silicon tetrafluoride from the gas stream;
- b. recovering said gas stream substantially free of silicon tetrafluoride by removing it from contact with the support material and the thermally decomposible molecule deposited thereon; and,
- c. regenerating the dioxane for reuse by raising the temperature of said support material and the thermally decomposible molecule deposited thereon to a temperature of about 60.degree. C. until substantially all of the silicon tetrafluoride is driven off and recovered.
- 3. The process of claim 1 wherein said absorbent solid support material comprises activated carbon.
- 4. The process of claim 2 wherein said absorbent solid support material comprises activated carbon.
- 5. A process for the vapor phase chromatographic separation of hydrogen fluoride from a gas stream comprising the steps of:
- a. passing said gas stream at a temperature of about 120.degree.-130.degree. F. into contact with an absorbent, high surface area solid support material having an extended surface area in the range of 100-300 m.sup.2 /gm. of material and having deposited thereon about 2-25 parts per 100 parts by weight of sodium fluoride to form a thermally decomposible molecule and thereby removing hydrogen fluoride from the gas stream;
- b. recovering said gas stream substantially free of hydrogen fluoride by removing it from contact with the support material and the thermally decomposible molecule deposited thereon; and,
- c. regenerating the sodium fluoride for reuse by raising the temperature of said support material and the thermally decomposible molecule deposited thereon to a temperature of at least 20.degree. C. over the maximum absorption temperature until substantially all of the hydrogen fluoride is driven off and recovered.
- 6. A process for the vapor phase chromatographic separation of silicon tetrafluoride from a gas stream comprising the steps of:
- a. passing said gas stream at a temperature of about 25.degree. C. into contact with an absorbent, high surface area solid support material having an extended surface area in the range of 100-300 m.sup.2 /gm. of material and having deposited thereon about 2-25 parts per 100 parts by weight of dioxane to form a thermally decomposible molecule and thereby removing silicon tetrafluoride from the gas stream;
- b. recovering said gas stream substantially free of silicon tetrafluoride by removing it from contact with the support material and the thermally decomposible molecule deposited thereon; and,
- c. regenerating the dioxane for reuse by raising the temperature of said support material and the thermally decomposible molecule deposited thereon to a temperature of at least 20.degree. C. over the maximum absorption temperature until substantially all of the silicon tetrafluoride is driven off and recovered.
Parent Case Info
This application is a division of application Ser. No. 156,952 filed June 25, 1971, now U.S. Pat. No. 3,859,417, which in turn is a continuation of application Ser. No. 860,665 filed Sept. 24, 1969 and now abandoned, which in turn is a continuation-in-part of copending application Ser. No. 667,801, filed Sept. 14, 1967, which in turn is a continuation-in-part of application Ser. No. 363,403, filed Apr. 29, 1964, both now abandoned.
US Referenced Citations (3)
Number |
Name |
Date |
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1831731 |
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Nov 1931 |
|
2426558 |
Long et al. |
Aug 1947 |
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3194629 |
Dreibelbis et al. |
Jul 1965 |
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Divisions (1)
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Number |
Date |
Country |
Parent |
156952 |
Jun 1971 |
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Continuations (1)
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Number |
Date |
Country |
Parent |
860665 |
Sep 1969 |
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Continuation in Parts (2)
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Number |
Date |
Country |
Parent |
667801 |
Sep 1967 |
|
Parent |
363403 |
Apr 1964 |
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