Microfabrication Of High-Density Arrays Of Microelectromagnetics With On-Chip Electronics, F. Cardot, Et Al CH-2007 Neuchatel, SW. |
A Fully Integrated Micromachined Toroidal Inductor With A Nickel-Iron Magnetic Core, Chong H. Ahn, et al, Sch. Of Elec. Eng. Microelectronics Research Center, Georgia Inst. Of Technology. |
Polyimide-Based Processes For The Fabrication Of Thick Electroplated Microstructures, Mark G. Allen, Sch. Of Elec. Eng. Microelectronics Research Center, Georgia Institute Of Tech. pp. 60-65. |