The present invention relates generally to a method for assembling molecular devices. More particularly, the present invention relates to the construction of devices useful in electronic circuitry including computer logic circuit devices.
Molecular scale electronics is an emerging field that proposes the use of single molecules or small groups of molecules to function as the key components in computational devices. The concept is based on the use of molecules or groups of molecules that transmit current either linearly or non-linearly when subjected to a voltage potential. In particular, molecules or groups of molecules that have linear I/V curves can resemble wires and are termed “molecular wires,” or sometimes “molewires.” Molecules or groups of molecules that have non-linear I/V curves can resemble other types of electronic devices and are therefore termed “molecular components,” “molecular switches,” or sometimes “moleswitches.” The term “molecular device” will be used herein to denote all such molecular-scale conducting devices.
It is becoming more widely accepted that, given a sufficient selection of operable molecular devices, molecular-scale computers could be constructed using principles similar to those used to construct conventional, semiconductor-based computers. In addition to the substantial size reductions that would result, the response times of molecular devices can be in the range of femto-seconds, while the fastest present devices operate in the nanosecond regime. Thus, a significant increase in speed may be attainable, particularly if other circuit elements do not limit operational performance. Different substituent groups can be used to provide molecular devices with a variety of electronic properties, such as negative differential resistance (NDR), molecular memory capability, and molecule-scale switching behavior.
An ongoing challenge in implementing molecular scale electronics has been the search for techniques that will allow the controlled assembly of molecular devices. While self-assembled monolayers (SAMs) of conjugated thiols on Au have drawn considerable attention due to their potential use in molecular electronics and have been shown to serve as molecular device components, controlled, precise placement of such SAMs in a manner that would allow them to function as molecular devices has not heretofore been possible. The success of molecular computing depends in part on the precise placement of molecular device components on a patterned substrate. Thus, in some instances, it becomes crucially important to accurately direct the assembly of the components onto specific electrodes. Conventional chemical self-assembly techniques cannot furnish such selectivity.
Several groups have reported successful electrochemical oxidative adsorption of alkane thiols on various surfaces, such as Au, Ag, and Hg. Recently, Hsueh and co-workers reported the electrochemical oxidation of alkylthiosulfate (R—S203-) on Au electrodes at +1200 mV (versus Ag/AgNO3). Monolayer formation took place preferentially on the biased Au electrodes, while the electrodes that were not biased experienced slower adsorption. However, the thiosulfate method produces alkylsulfide radicals and has been demonstrated so far only with simple n-alkane derivatives.
Potential-enhanced self-assembly of certain alkanethiols that are not molecular devices is also known, but, until now, no one has yet discovered how to effect controlled, selective assembly of molecular devices on designated substrates under mild electric potentials. It has been observed that thiol-based molecules assemble almost equally rapidly on non-charged surfaces as on charged surfaces. The similar behavior of charged and non-charged surfaces has heretofore made it impossible to use voltage-assisted assembly to apply molecular device layers in a controlled or targeted manner.
It is recognized that the construction of a practical molecular or nanoscale computer will require switches and their related interconnect technologies to behave as large-scale diverse logic, with input/output leads scaled to molecular dimensions.
It is well known to those of ordinary skill in the art that semiconductor devices are constructed using a “top-down” approach that employs a variety of semiconductor lithographic and etch techniques to pattern a substrate and this approach has become increasingly challenging to apply as feature sizes decrease. In particular, at the nanometer scale, the electronic properties of semiconductor structures fabricated using conventional lithographic process are increasingly difficult to control. By contrast, using a “bottom-up” approach, the present invention relates to an approach in which functional molecules and other nanoscale components are assembled, in some cases on discontinuous films, and then interconnected (“wired up”) with nanotubes or nanowires for the purpose of constructing functional nanoscale computer devices.
Hence, there is still a need for methods that allow small, i.e. molecular scale, devices to be assembled quickly and accurately and in a controlled or targeted manner. A preferred method would allow the application of desired layers without undue expense.
The present invention solves the problems associated with the prior art inasmuch as it allows controlled, selective assembly of molecular devices on metal electrodes and thus provides a method for assembling molecular scale devices quickly and accurately and without undue expense.
In some aspects, the present invention relates to a method using a small voltage potential to drive the free thiols or thiolates to assemble on a metal surface. By impeding the rate of formation of thiolates in combination with the use of a voltage potential, sufficient differentiation between adjacent surfaces can be achieved to allow selective assembly of molecular devices.
In other aspects, the present invention provides a nanoscale computing device that includes a substrate, a pair of conductive input/output electrodes carried on this substrate and disposed in spaced-apart relationship and a substantially disordered assembly of nanowires formed on the substrate in a region between the electrodes, thereby forming at least one programmable conductive pathway between the pair of electrodes.
The foregoing has outlined rather broadly the features of the present invention in order that the detailed description of the invention that follows may be better understood. Additional features and advantages of the invention will be described hereinafter which form the subject of the claims of the invention.
For a detailed understanding of the present invention, reference is made to the accompanying Figures, wherein:
a is a diagram showing a portion of a molecularly-encapsulated nanowire during a first phase of its preparation;
b is a diagram showing the portion of a molecularly-encapsulated nanowire during a second phase of its preparation;
c is a schematic illustration of a plurality of molecularly-encapsulated nanowires applied onto a discontinuous conductive film on a NanoCell substrate;
It has been discovered that molecular devices can be selectively assembled on desired substrates quickly and with a high degree of precision. According to a preferred embodiment of the present invention, the difference in the rates of assembly of a given molecular device on a given metal substrate can be used to control the placement of the molecular device. More particularly, applicants have discovered a technique for slowing the assembly of molecular devices on a non-charged surface. As a result, the use of a small voltage sufficiently accelerates the rate of assembly that the present methods can be used to selectively assemble molecular devices on substrates that are at least as close together as 0.3 μm.
According to one aspect of the present invention, thiol-terminated molecular devices are deprotonated in a basic solution, thereby forming thiolates. Thiolates assemble on charged and non-charged surfaces, but the rate of assembly on selected surfaces is greatly enhanced by the application of a voltage potential to those surfaces. According to another embodiment, free thiols are formed from protected molecular device molecules in an acidic solution. If the rate of formation of the free thiol is slowed sufficiently, a layer can be selectively formed by enhancing the rate of deposition on a selected surface. While the bulk of the discussion below is presented in terms of the basic solution technique, the concepts set out herein are intended to include not only acidic and basic solution schemes, but any other scheme by which the rate of assembly of molecular device molecules can be impeded and selectively enhanced so as to allow for selective application.
Referring initially to
Specifically, molecular devices that are suitable for use with the present invention include pi-conjugated aromatics and in particular, protected thiol-terminated oligo(phenylene ethynylene)s, are preferred for use as molecular devices.
According to the present invention, the thiol-terminated molecular devices need to include on each thiol a group that can be removed by the application of a desired chemical or electrochemical stimulus. It has been discovered that the presence of the protecting group sufficiently slows the rate of formation of thiolate in a basic solution, or thiol in an acidic solution, that the voltage applied to an electrode surface will cause the molecules to assemble on that surface significantly faster than on a non-charged surface in the same solution. Furthermore, a pH neutral solution could be used in a similar scheme, wherein the thiol protecting group is removed electrochemically,
In one preferred embodiment, the stimulus is a voltage potential and the protecting group is selected from the protecting groups identified in Greene, T.; Wuts, P. Protective groups in Organic Synthesis, 3d ed. (1999), which is incorporated herein by reference. Particularly preferred are the protecting groups listed in chapter six of that reference, including thioethers, S-diphenylmethyl thioethers, substituted S-diphenylmethyl thioethers, and S-triphenylmethyl thioethers, substituted S-methyl derivatives, substituted S-ethyl derivatives, silyl thioethers, thioesters, thiocarbonate derivatives, and thiocarbamate derivatives. Also particularly preferred are thioacetates, sometimes called thioacetyl groups or thiolacetates, also known by the formula SCOCH3. A thiol-terminated molecular device protected in this manner will be referred to herein as a “monolayer precursor.” The exemplary molecules shown in
Referring now to
A voltage potential is applied to the first substrate 10 via lead 13. In
According to the present invention and as described above, the monolayer precursor molecules 15 each include a protecting group that prevents or impedes rapid assembly of the monolayer on the substrate in the absence of a potential to draw the low concentration of free thiol or thiolate to the surface. Depending on the precursor used, solution 16 can be either an acidic or basic solution. Without being bound by the following, it is speculated that the presence of a base causes the protecting groups on certain monolayer precursor molecules to disassociate from the precursor molecules. The deprotected thiol groups on the precursor molecules are then deprotonated by the base, forming charged thiolate groups. These charged thiolate groups, in turn, are attracted to the positively charged electrode (substrate 10) and assemble there. Similarly, we have discovered the methods of the present invention can be used advantageously in acidic solutions, albeit via a different mechanism. In acidic solutions, the terminal groups on the molecular device precursors do not form thiolates, and instead form free thiols, which, like thiolates, are advantageously drawn to the charged surface.
It has been discovered that even though some monolayer precursors molecules may assemble on second substrate 14 while the layer is assembling on first substrate 10, the disparity between the rates of assembly on the charged and non-charged substrates is great enough to allow selective assembly. More particularly, the use of a protecting groups on the precursor prevents the thiol groups from assembling and impedes formation of thiolate groups, while the application of a voltage potential to first substrate 10 accelerates the rate of assembly on substrate 10. The combination of these effects separates the rates of assembly on the two substrates to such a degree that the amount of monolayer that assembles on second substrate 14 during the time required to assemble a desired layer on first substrate 10 is relatively insignificant. For example, in some systems, the acetate-impeded, potential-assisted assembly is one to two orders of magnitude faster than acetate-impeded, non-potential-assisted assembly. The overall rate of assembly is partially dependent on molecular structure. According to the present invention, similar differentiation can be also achieved when the protecting group is other than an acetate group.
Referring still to
It has further been discovered that the application of a voltage potential to one substrate affects only those precursor molecules that are very close to that substrate. Thus, the present method has been used to selectively produce a monolayer on one of two substrates that are separated by gaps as small as 0.3 μm and it is expected that substrate differentiation could be achieved across even smaller distances, with the lower limit being defined only by the limits of lithography or other types of patterning, such as electron beam. Hence, the present method is suitable for use in the construction of micro- or nano-electronic devices.
Another advantage of the present invention is that it allows the rapid assembly rate associated with thiolate or thiol assembly without requiring storage or handling of thiolate or thiol solutions. Specifically, thiolates and aromatic thiols are unstable against oxidation, while thioacetates can be stored for extended periods in air without degradation. According to the present invention, the convenience of having a thioacetate stock solution can be combined with a rapid adsorption.
It has further been discovered that molecular device components containing electron-donating groups assemble faster than those with electron-withdrawing groups. For example, using the present invention, one can deposit molecules with electron donating groups, e.g.
One skilled in the art of molecular devices will recognize that the principles of the present invention are applicable to systems that include a variety of molecular device molecules. The molecular devices that can be applied or selectively applied using the present techniques include but are not limited to the various molecules shown in
The concepts of the present invention are useful with metal substrates generally, and more particularly with the coinage metals or late transition metals, including but not limited to gold, palladium, silver, copper and platinum.
Similarly, the metal-bonding terminus of the present invention can be other than sulfur. For example, selenium and tellurium can be substituted for the sulphur. Hence, the present invention is not limited to thiol-terminated molecular devices, but also includes selenol and tellurol, as is known in the art. See, for example, Reinerth, W. A.; Tour, J. M. “Protecting Groups for Organoselenium Compounds,” J. Org. Chem. 1998, 63, 2397-2400.
Solvents that are useful in the present invention include but are not limited to alcohols, water, and any nonreactive organic solvent, or combination thereof. Similarly, the electrolyte can be any soluble ionic salt that is not corrosive to the electrode.
The identity and orientation of the molecular device components on the metal surface is another important issue for the present electrochemical assembly technique. The average orientation of compound (a) on the surface can be derived from the relative intensities of a pair of IR absorption bands that correspond to molecular vibrations that are either parallel or perpendicular to the oligo(phenylene ethynylene) axis. A random orientation would give the same relative band intensities in both the external reflection IR spectrum of the monolayer and the transmission spectrum of the bulk sample. In contrast, an ordered orientation of the molecules will show an increased intensity of the parallel vibrations. If the molecules tilt towards the surface (angle >54.7°) the perpendicular bands will dominate the monolayer spectrum. IR spectra of substrates selectively coated according to the present invention confirm that monolayers are present. Layers deposited according the present technique have structures that are similar to the structures of layers deposited in a conventional, non-potential assisted manner.
The rate of assembly of thiolate-terminated oligo(phenylene ethylene) molecular device components under electric potential is greatly enhanced. A low thiolate concentration can be maintained by the in situ deprotection of some part of a thioacetate derivative stock solution. The accelerated adsorption on positively charged electrodes, combined with a low thiolate concentration in solution, makes it possible to selectively deposit molecules onto specific electrodes. The molecular orientation in the SAM made under electric potential is similar to the SAM made by conventional self-assembly technique. The in-situ cleavage of the thioacetate derivative reduces the problems with the instability of the thiolate or thiol solution. The thioacetate itself adsorbs only slowly on metal surfaces. Similar rate differentiation and selectivity can be obtained using a basic solution. The acid solution techniques is preferred for some molecular devices as it results in a more intact layer.
The following Example are intended to illustrate the efficacy of certain embodiments of the invention and are not intended to be limiting in any way.
Self-Assembly of Thiolates on Gold Using Base Deprotection.
Materials.
Ethanol (Pharmco Products Inc., 200 proof, USP Grade) was degassed with nitrogen prior to use. THF (Aldrich) was freshly distilled from Na/benzophenone under an atmosphere of nitrogen, and used immediately. Tetrabutylammonium tetrafluoroborate was purchased from Aldrich and used without further purification. The syntheses of the oligo(phenylene ethynylene)s are known, and are described in the references identified above. Au substrates were prepared by the sequential deposition of Cr (50 nm) and Au (120 nm) onto a clean single crystal Si wafer. Metal depositions were carried out using an Auto 306 Vacuum Coater (Edwards High Vacuum International) at an evaporation rate of ˜1 Å/s and a pressure of ˜4×10−6 mm Hg. Pt substrates were prepared by sputtering a ˜50 nm layer of chromium (CrC-100 sputtering systems from Plasma Sciences, Inc.), followed by a ˜120 nm layer of Pt on clean surfaces of single crystal Si wafer. Au substrates were cleaned immediately prior to use by placing them in an aqueous solution of H2O2/NH4OH(H2O2:NH4OH:H2O=1:1:5) for 15 min, followed by a thorough washing with deionized water and ethanol. Pt substrates were used without further cleaning.
Self-assembly of thioacetates on Au was carried out in a vial which contained a piece of the Au substrate, the oligo(phenylene ethynylene) compound (1.0 mg), ethanol (20 mL), and NaOH (20 μL of a 0.27 M solution, final concentration 0.27 mM). The sample was removed and washed with acetone, THF and ethanol.
Electrochemical Assembly.
Solutions for the potential-driven electrochemical assembly were prepared as follows: To a vial was added ethanol (20 mL), an oligo(phenylene ethynylene) (1.0 mg), tetrabutylammonium tetrafluoroborate (0.33 g, 1 mmol), and 20 μL of aqueous 0.27 M NaOH. A CV-50W Voltammetric Analyzer (BAS, Bioanalytical Systems, Inc) was used to control the electrical potential applied to the electrodes. The auxiliary electrode was Pt wire and a nonaqueous Ag/AgNO3 electrode was used as the reference. One of the following working electrodes was used: evaporated Au or Pt, an Au disk electrode, or a Pt disk electrode. The potential applied to the working electrode was +400 mV (vs Ag/AgNO3 electrode). Assembled samples were washed with acetone, deionized water, and briefly sonicated in ethanol.
Measurements.
The thicknesses of the self-assembled monolayers were measured using an ellipsometer (Rudolph Instruments, Model: 431A31WL633). The He—Ne laser (632.8 nm) was incident at 70° to the sample surface. A refractive index (nf) of 1.55 was used for the film thickness calculation. Cyclic voltammograms were recorded by a CV-50W Voltammetric Analyzer (Bioanalytical Systems, Inc), employing a Pt counter electrode and a saturated calomel reference electrode (SCE). The working electrode was an Au electrode (MF-2014, Bioanalytical Systems, Inc.) or a Pt electrode (MF-2013, Bioanalytical Systems, Inc.) covered with a given oligo(phenylene ethynylene). The diameter of the Au and Pt electrodes was 1.6 mm. Cyclic voltammetry was performed in an aqueous solution of KCl/K3[Fe(CN)6] (0.1 M/1.0 mM) using a potential scan rate of 100 mV/s.
Infrared Spectroscopy.
The orientation and thickness of assembled monolayer were checked using IR analyses. Details about the procedure and instrumentation used for the external reflection and transmission IR measurements are known in the art.
There are three possible electrochemical methods for the deposition of molecular devices onto selected electrodes: 1) One can selectively deposit thiols on a biased Au electrode in the presence of an unbiased electrode. This method, to be useful, requires an appreciable different assembly rate between the biased and unbiased electrodes. 2) Conversely, one can permit assembly on an unbiased electrode while using a high potential to prevent assembly on the other electrode. 3) Lastly, one can uniformly form a SAM on both electrodes, then restore one electrode to its original bare state by the selective application of a high potential. For molecular electronic applications, the first approach is preferred. As described above, the present invention provided a technique for accomplishing the first method by allowing the molecules to assemble at a faster rate on the electrodes that are subjected to the potential than on the electrodes without potential.
Thiol Adsorption Kinetics on Au with and without Base or Electrostatic Potential
aThe relative potentials were determined against a AgCl coated Ag wire in contact with the adsorption solution.
Alkanethiol adsorption isotherms typically show an initial rapid rise until the coverage reached 80-85% of a monolayer, followed by a second, slower step. Greater than 40% coverage was usually reached within the first 500 msec if the thiolate concentration was 1 mmol and within less than 60 sec. for a 1 μmol concentration. Overall, the aromatic thiol adsorption was found to be slower than the n-alkanethiol adsorption.
Approximately 0.1 mM solutions of the preferred thiol-terminated oligo(phenylene ethynylene)s in ethanol reach a half monolayer coverage in less than 1 minute. Their low solubility in ethanol probably compensates for the slower diffusion rate (Table 1). The addition of 1 μL 0.27 M NaOH per mL solution was found to have no significant influence on the adsorption rate.
A positive potential accelerates the thiol adsorption in the absence of a base and much more in combination with a base. The less soluble unsubstituted thiol shown at (i) in Table 1 forms a multilayer rapidly, and the more soluble nitro-substituted thiol (ii) reaches its theoretical monolayer thickness in 1 min instead of ˜1 h.
Thioacetates adsorb much more slowly than thiols. A solution with 1 mg of thioacetate 1(b) per 20 mL ethanol, or roughly 0.1 mM concentration, gives an 0.2 nm thick layer within 30 min, but the same was observed with a solution without thioacetate. Therefore, any layer formation can be attributed to advantageous adsorbate impurities, rather than to the thioacetate itself.
Assembly of Thioacetates with Base but without Potential
A 0.1 mM ethanolic solution of compound (a), which is shown in
Cyclic voltammetry (CV), as an indication of the surface coverage ratio, corroborated the ellipsometry measurements.
Compounds containing electron-withdrawing groups and only one thioacetate end assembled even more slowly. Compound (b), for example, with a nitro group on the central phenyl ring, took 15 min to reach a film thickness of 0.4 nm.
The least polar methylmercapto-terminated biphenylthiols adsorbed 7 times faster than electron rich N,N-dimethylamino-terminated thiols and 20 times faster than electron poor nitro-terminated ones. Electron donor groups increase the gold sulfur binding energy but destabilize the monolayer because of their repulsive intermolecular dipole-dipole interactions. The slow adsorption of aromatic thiols with electron acceptor end groups is due to a weaker sulfur binding energy and stronger intermolecular electrostatic repulsion.
The majority of the deprotected thioacetate molecules in ethanol dissociate to thiolates with a high electron density on the sulfur, no matter what the substitutents are. The initial adsorption rates for a 0.1 mmol aromatic thioacetate/thiolate mixture without applied potential are however 1-2 orders of magnitude lower than for aromatic thiols: ˜2 min for 10% surface coverage versus less than 5 sec with aromatic thiols. The reaction between neutral ArS—H as a soft base and Au as a soft acid is fast, according to the hard-soft acid-base (HSAB) principle, while the thiolate adsorption on gold requires another molecule to become simultaneously reduced.
The relatively faster adsorption of dithiolates and thiolates with electron donor groups correlates again with a higher gold sulfur binding energy but also with their lower dissociation constant. Electron acceptor groups shift the equilibrium to the dissociated and slowly-adsorbing thiolate, while donor groups reduce the acidity of the thiol proton.
The positive potential on the gold adds an attractive force between the surface and the negatively charged thiolates without changing the thiol dissociation equilibrium. The attraction is strongest for the electron-rich thiolates where the negative charge is located at the sulfur atom. A positive potential therefore further increases the adsorption rate for the already preferred thiolates with electron donor groups. The foregoing observations are included for the purpose of illustration only and are not intended to define the chemical mechanisms involved in the present invention or to limit the scope of the claimed invention.
Assembly of Molecular Devices with an Applied Voltage
Table 2 summarizes the results of electrochemical assembly of a series of thioacetate derivatives on Au when a small amount of sodium hydroxide solution had been added. Under these conditions, the present compounds now quickly assemble under potential (compare
For mono-thioacetate molecular device components, the thickness of the assembled layers roughly correlates with the molecular length. One exception is compound (e), for which the layer is thicker than the length of the molecule (entries 17, 18). It is speculated that the excess adsorption in the case of the unfunctionalized phenylene-ethynylene-oligomers (e) and (h) is caused by their lower solubility in ethanol. A similar phenomenon has been observed in the self-assembly of long chain alkanethiols on Au from ethanol which gave a layer 20% thicker than the length of the molecule. Dithioacetates also formed multilayers upon extended assembly times, presumably due to disulfide formation as promoted by trace oxygen or the applied electric potential. To obtain a monolayer of dithioacetate molecular devices, a short assembly time in an atmosphere excluding oxygen should be employed.
We attempted to remove the layers assembled by the foregoing process, but once dried, the layer thicknesses remained virtually unchanged after sonication in THF, indicating that the excess molecules were either chemically bonded to the under layer or had been oxidized to the even less soluble disulfides.
*The base used here was concentrated ammonium hydroxide (20 μL).
All of the CVs in
The present technique of assembly under electric potential works on platinum also. Table 2 above includes data for the potential-assisted assembly of compounds (a) and (b) on platinum (entries 6, 7, 10, 11). Layers of molecular device components grow more slowly on platinum than on gold.
All of the three cyclic voltammograms in
From this point of view, platinum electrodes are better than gold electrodes because thiols grow more slowly on platinum than on gold via conventional chemical self-assembly. Under electric potential, the growth rates are nearly the same, although slightly slower on platinum. This greater disparity results in a wider operation time window for the controlled deposition of molecular device components. Put another way, the unbiased platinum electrode will be even cleaner than the unbiased gold electrode under the same conditions.
The foregoing paragraphs discuss the formation of a SAM of molecular device components on the surface of a gold or platinum substrate under positive electric potential. Conversely, as discussed above, a negative potential can prevent the formation of this layer. Table 2 lists the results of the application of (a) to a gold electrode under negative potential (entries 4, 5). When the applied potential is sufficiently negative, the growth of the molecular devices on the gold electrodes can be slowed significantly.
The intrinsic band intensities can be determined from the transmission spectrum of a polycrystalline bulk sample, diluted with KBr and pressed into a transparent pellet. Differences between the intensities in the monolayer and bulk spectrum indicate an anisotropic film in which the molecules are aligned in a preferential direction. A semi-quantitative analysis is possible if the bulk and monolayer spectrum have at least two sufficiently intense bands with different orientations, i.e. parallel or perpendicular to the molecular main axis. Similar relative intensities for these two bands in the monolayer and bulk spectrum indicate that the molecules are either randomly oriented or that the molecules may be uniformly tilted by ˜54.7° (magic angle) from the surface normal.
Not all IR bands can be used for such a semi-quantitative analysis. Some of the bands are more sensitive to the changes in intermolecular distances and mobility. The best bands for a semi-quantitative analysis have the same position and width-at-half-height in the monolayer and polycrystalline bulk phase. The parallel mode at 1499 cm−1 falls into this category. Among the perpendicular modes we can only take the doublet at 830/822 cm−1 in the bulk spectrum that changes into a single band at 826 cm−1 in the monolayer spectrum. The ratio of the integrated areas of these two bands are 0.61:1 and 0.62:1 for the chemically and potential-driven deposited monolayers respectively. This ratio also agrees with the result from the reference spectrum of the polycrystalline sample (0.58:1). The fast potential-driven deposition and the standard 24 h adsorption give monolayers with identical orientation. The molecules do not lie flat on the surface as they do at submonolayer coverages, but the higher coverage is not enough to reach an upright orientation.
In
Self-Assembly of Thiolates on Gold Using Acid Deprotection.
The concepts of the present invention have applicability to systems other than base-activated systems. Specifically, some molecular devices, including those shown in
Gold Substrates
A single crystal silicon wafer was cut in 6×16 mm2 sheets, then cleaned for 30 min in a hot (40° C.) fresh acidic peroxide (3:1 H2SO4/H2O2, v/v) solution, rinsed with a flowing distilled-water, ethanol and acetone, and the pieces of Si were dried in a flowing ultrahigh purity N2 gas. The gold films were deposited by thermal evaporation of 200 nm thick Au onto the Si sheets with a 25 nm Cr adhesion layer at a rate of 1 Å/s under the vacuum of 2×10−6 Torr. The gold samples were finally stored in a N2 atmosphere. Before use, the gold substrates were cleaned by a UV/O3 cleaner (Boekel Industries, Inc., Model 135500) for 10 min in order to remove organic contamination, followed by ultrasonic cleaning in ethanol for 20 min to remove the resulting gold oxide layer, rinsing with ethanol and acetone, then dried in flowing N2. This procedure was confirmed to provide a clean, reproducible gold surface.
Chemicals
Methylene chloride (CH2Cl2) and acetonitrile were distilled from calcium hydride. Tetrahydrofuran was distilled from sodium/benzophenone ketyl. All other chemicals were used as received without further purification. The syntheses of compounds such as those in
Solution Preparation for Acid-Promoted Method
The compound (1 mg) was dissolved with a solvent mixture of CH2Cl2/MeOH (2:1, v/v) in a 4 mL vial. 50-70 μL of concentrated H2SO4 was then added and the solution was incubated for 1-4 h in order to give deprotection of thiol moiety.
Chemical Assembly
The cleaned gold substrates were immersed into the adsorbate solutions at room temperature for a period of 20-24 h. All the solutions were freshly prepared, previously purged with N2 for an oxygen-free environment and kept in the dark during immersion to avoid photo-oxidation. After the assembly, the samples were removed from the solutions, rinsed thoroughly with acetone, MeOH and CH2Cl2, and finally blown dry with N2.
Potential-Assisted Assembly
The same three-electrode cell described above was used with a gold substrate as the working electrode, a platinum wire as the counter electrode, and an Ag/AgNO3 (10 mM AgNO3 and 0.1 M Bu4NBF4 in acetonitrile) reference electrode. The monolayers were deposited by the constant potential of 400 mV for 5-60 min in the SAM solutions. After the modification, the samples were removed from the solutions, rinsed with acetone, MeOH and CH2Cl2, and blown dry with N2.
Electrochemical Measurement
Cyclic voltammetry (CV) for SAM formation was performed in an aqueous solution with 1 mM K3[Fe(CN)6] and 0.1 M KCl between −0.2 and +0.6 V (vs. SCE) at the rate of 100 mV/s. An Au disk electrode (MF-2014, BAS) with diameter 1.6 mm was used as the working electrode, a saturated calomel electrode (SCE) as a reference electrode and a Pt wire as a counter electrode.
Ellipsometry
Monolayer thickness was determined using a Rudolph series 431A ellipsometry. The He—Ne laser (632.8 nm) light was incident at 70° on the sample. Measurements were carried out before and immediately after monolayer adsorption. All the thickness was calculated based on the refractive index of nf=1.55. The length of the molecular wire was calculated from a sulfur atom to the furthest proton for the minimum energy extended forms by molecular mechanics. The theoretical thickness was then obtained with the assumed linear Au—S—C bond angles and 0.24 nm for the Au—S bond length.
UV-Vis Spectroscopy
The UV-Vis spectroscopes were recorded by UV-Vis-NIR scanning spectrophotometer (Shimadzu, UV-3101 PC).
As described above, the thiolacetyl groups of molecular device compounds are easily deprotected to the free thiol or thiolate by deacylation with NH4OH, and then the SAM are formed on a gold surface by Au—S bonding. Table 3 illustrates the chemical assembly of molecular wires in a single solvent. The measured thickness of mononitro compounds (1 and 2) are near to the theoretical values. It indicates a compact monolayer has been formed. On the other hand, the thickness of multi-nitro compounds exhibit a large difference compared to the calculated values. A slower rate of adsorption is detected. The strong electron-withdrawing nitro group reduces the interaction of Au and S, finally results in the slower assembly rate and the poor adsorption on Au surface. Moreover, the multi-nitro groups of conjugated molecules are possibly attacked by hydroxide during the long assembly time, which decomposes the compounds and induces a precipitation in the unstable solution accompanied by color changes from yellow-green to brown.
aThe value measured by ellipsometry.
bThe theoretical thickness calculated by molecular mechanics without the consideration of the tilt angle of molecular wire in SAM.
Thus, to get a well-ordered SAM of multi-nitro molecular wires, a mixed solvent is preferred and is selected based on the solubility and deprotection system. As shown in Table 4, the acetone/methanol solvent mixture performs best in the base-promoted method. All the SAM of dinitro compounds ((8c), (8d), (8e)) display thickness the same as the theoretical value after reaction of 24 h, thus complete assembly is achieved. Conversely, the tetra-nitro compound (8f) is not well assembled in the base-promoted system, as indicated by the relatively large difference between measured and theoretical thickness.
aThe ratio of mixed solvent is 2:1.
An external electric field applied at the interface of liquid/gold can greatly change the assembly reaction rate and lead to a kinetically rather than thermodynamically controlled deposition process. UV-Vis spectra confirm that the acid-promoted method affords a more stable solution and it is reliable. Table 5 summarizes the results of potential-assisted assembly of various molecular wires on a gold electrode. The assembly rate is very fast and the SAM thickness increases with time. The rate of potential-assisted assembly is increased 10-100 times compared to the rate of the chemical assembly. In the base-promoted electrochemical assembly, the mononitro- and dinitro-compounds ((8a), (8c), (8e)) show a good assembly and near full-coverage on Au. The tetranitro compound (8f) slowly forms SAMs by base catalysis with either the potential-assisted procedure or the chemical method, as illustrated in Table 4. By using an acid-promoted electrochemical method, however, all the nitro-compounds ((8c), (8e), (8f)) can be completely assembled after a 60 min deposition time. The potential-assisted assembly is rapid and reproducible. UV-Vis spectra confirm that the acid-promoted method affords a more stable solution and it is reliable.
aThe ratio of mixed solvent is 2:1.
bThe reduced ratio of redox peak current is deduced by (1 − ISAM/IAu)% from CVs in an aqueous solution of K3[Fe(CN)6]/KCl.
In the common chemical assembly, which is a passive incubation process, the open circuit potential (OCP) is about −200 to −300 mV. However, in an external positive electric field, the thiol and thiolate with negative charge can strongly adsorb on Au, therefore, a modest anodic potential (i.e., 400 mV) can greatly enhance the assembly rate. A lower negative potential will impede the assembly reaction and even peel away the existing SAM. Conversely, a higher positive potential will induce the MeOH and Au oxidation, which also deform the SAM. By the careful selection of potential and solution, different molecular wires can be deposited on different parts of one electric device for the construction of a more complex logic circuit.
The present invention includes the voltage-assisted assembly of molecular devices on a substrate, with and without the rate differentiation that is results from the use of a chemical inhibitor, such as an acetate group. Thus, it is within the contemplated scope of the invention to accelerate the rate of assembly of a layer of molecular devices on a substrate using a voltage potential.
Nanocell Devices
Turning to
In the presently disclosed exemplary embodiment, the five gold (Au) electrode pairs 212-1 and 212-2 through 220-1 and 220-2 are patterned on opposing sides of the NanoCell 210. As shown in
In one embodiment, a discontinuous gold film 222 is vapor-deposited onto the SiO2 substrate in a central region of NanoCell 210, and each electrode among the aforementioned electrode pairs 212-1/212-2, 220-1/220-2 is in conductive contact with the discontinuous film 222. Conventional chemical vapor deposition (CVD) can be used for the purpose of creating the discontinuous film 222 in the desired region. Although gold is utilized for the formation of discontinuous film 222 in this particular embodiment of the invention, it is contemplated that other conductive materials such as palladium or platinum or carbon nanotubes or semiconductors such as graphite or silicon might be employed for such purpose, in embodiments which employ discontinuous conductive films. Likewise, while gold is similarly used in the formation of the electrode pairs, other conductive materials may be used for such purpose. Although the irregularity or randomness of discontinuous film 222 in the presently disclosed embodiment of the invention is believed to be inconsequential, it is also contemplated that an implementation of the present invention might employ a regular array of “dots” or “islands” of conductive material applied to substrate 208, and the term “discontinuous film” shall be construed for the purposes of the present disclosure shall be construed to encompass either of these alternatives. In the presently disclosed embodiment, discontinuous film 222 comprises a distributed array of “islands” of conductive material (gold, in the preferred embodiment). NanoCell 210 is preferably treated with UV-ozone and ethanol-washed immediately prior to use in order to remove exogenous organics. Electrical measurements experimentally confirm the absence of DC conduction paths across the discontinuous Au film 222 between the five juxtaposed pairs of ˜5 μm-spaced electrodes (≦1 picoamp up to 30 V). In the present embodiment, each juxtaposed electrode pair 212-1/212-2 . . . 220-1/220-2 serves as an independent memory bit address system. Moreover, as noted above, it has been shown that diagonally juxtaposed electrode pairs, for example, 212-1 and 214-2, 214-1 and 216-2, and, depending upon the electrode spacings, possibly such pairings as 212-1 and 216-2, and so on, can be programmed as separate memory bit address systems. It has been shown that such pairings can be independently and concurrently programmed without mutually disrupting others. Thus, for example, the electrode pair 212-1 and 212-2 can be programmed to a first value, while at the same time the electrode pair 212-1 and 214-2 can be independently programmed to another value without interfering with the 212-1/212-2 programming.
In accordance with one aspect of the invention, preparation of a NanoCell such as NanoCell 210 further involves deposition of a layer of interconnecting elongate nanowires 224 on top of discontinuous film 222. In this regard, several alternative embodiments are contemplated. In one embodiment, the nanowires 224 comprise gold nanorods (Au-nanorods) which are functionalized by being encapsulated with a molecular compound as will be hereinafter described in greater detail. In another embodiment, the nanowires 224 comprise carbon single-wall nanotubes (C-SWNTs) which are first partially encapsulated in gold and then encapsulated in a functional molecular compound. In still another embodiment, the nanowires 224 are nano-scale wires made of a refractory metal (palladium, platinum, or titanium, for example) characterized by their higher melting-points relative to gold. In yet another embodiment, the nanowires are nano-scale wires made of a semiconductor material, such as silicon (N-type or P-type), indium oxide (In203), or gallium arsenide (GaAs). A great many methods of synthesizing nanowires of various compositions are known in the art. See, as but one example, e.g., U.S. Pat. No. 6,313,015 to Lee et al., entitled “Growth Method for Silicon Nanowires and Nanoparticle Chains from Silicon Monoxide,” which patent is hereby incorporated by reference herein in its entirety. Likewise, the shape of the conductive or semiconductive nanoparticle is irrelevant. Nanowires 224 can take the form of a wire as disclosed herein, or alternatively may take the form of a spheroid, or be plate-like, for example. Accordingly, the term “nanowire” as used herein shall be construed broadly to encompass essentially any nanostructure having suitable dimensions to function as described herein in facilitating formation of programmable conductive pathways between juxtaposed electrodes in a NanoCell.
It is to be specifically noted further that in an alternative embodiment of the invention, the discontinuous conductive layer 222 may be omitted, such that the layer of interconnecting elongate nanowires 224 is deposited directly on substrate 208.
In
The assembly of molecules 226 and nanowires 224 in the central portion 222 of NanoCell 210 is then carried out, preferably under N2, to provide programmable current pathways across NanoCell 210. Compounds similar to the mononitro oligo(phenylene ethynylene) (OPE) molecule 226, shown in
All nanowires 224 in the exemplary embodiment are substantially elongate nanostructures on the order of 1-50 (e.g., 30) nm in diameter and between 30 and 2000 nm in length. As noted above, however, it is contemplated that “nanowires” of greater or lesser diameters and lengths, and of various other shapes and forms, including spheres, disks, plates, etc may be suitable for the practice of the invention. In the disclosed embodiment, nanowires 224 are grown in a polycarbonate membrane by electrochemical reduction at 1.2 Coulombs) and are derivatized by being added to a vial containing molecules 226 (0.8 mg) in CH2Cl2 (3 mL). The vial is agitated (on a platform auto shaker, at 250 rμm) for 40 minutes to dissolve the polycarbonate membrane and to form Au nanowires encapsulated in OPE molecules 226 via chemisorption of the thiols to the nanowires. This is shown in
In the disclosed embodiment, NH4OH (5 μL, conc.) and ethanol (0.5 mL) are added and the vial is agitated for 10 minutes to remove the acetyl group (Ac) and reveal the free thiol group, as shown in
In the disclosed embodiment, the assembled NanoCell 210 is electrically tested on a probe station (Desert Cryogenics, TTProber 4) with a semiconductor parameter analyzer (Agilent 4155C) at room temperature (297 K) under vacuum (10−5 mm Hg).
In accordance with one aspect of the invention, a juxtaposed pair of electrodes, as described above, will show little variation in its behavior over several thousand scans. However, there may be notable differences when comparing different electrode pairs, in that they may show variations in peak current position (occurring for example between a range of 3-15 V), peak current (on the order of 0.1-1.7 mA), and PVR (on the order of 5-30). Those of ordinary skill in the art will recognize such differences to be related to the variations in the conduction pathways of these disordered arrays.
If a voltage sweep is conducted on NanoCell 210 in a bias range that is up to or not far beyond the peaks 230 and 232 of the I(V) curve (switching event), a substantially linear trace is observed, as shown by curve a (0-state) in
Summarizing,
On the same device whose I(V) characteristics are shown in
To summarize,
The conductivity-type memory effect described herein is independent of bias sweep directions. Once set into the low σ state upon application of voltage-set (write/programming) pulses, NanoCell 210 holds the low σ state regardless of negative bias sweep from 0 to −2 V or positive bias sweep from 0 to 2 V. Several methodologies are contemplated for erasing the stored low σ state (written bit) in NanoCell 210. Voltage pulses at −3 V to −4 V (˜20 pulses at 1 ms pulse width, 10 ms pulse period) have been shown to reset the memory into the original high σ state (using a voltage pulse that comes near the peak of the switching event but not far past the peak). Although the overall write, read, erase sequence used in the screening of these devices might be regarded as slow due to the resetting time of the probing electronics, the inherent switching may be on the order of milliseconds, or faster, for each operation if customized electronics are used. The switch-type and conductivity-type memory effects are disclosed herein in the negative bias regions; however, they apply in positive bias region as well.
The bit retention time for the switch-type memory has been experimentally proven to be lengthy, and in experimental settings at least 11 days with ˜10% change in the voltage peak position of the curves when compared to the read-tests run seconds after setting the written state; however, there seems to be no decline in the magnitude of the response, suggesting that the persistence could be significantly longer than the experimentally observed results. The conductivity-type memory has been experimentally shown to persist for at least 9 days. Over this period, the 0:1 signal magnitudes actually have been shown to increase, although the reset voltages may also drift higher (˜10%) over such a period. Therefore, the two types of memory effects can have much longer retention times, but these are merely the time periods over which they have been tested. During waiting periods over which these retention times were recorded, the NanoCells had been occasionally exposed to air (1 atm), for periods of up to 30 min, as more samples were moved through the testing chamber. Therefore, the stored written states are robust even with short exposure to air.
Yields of functioning NanoCells 210 that have been prepared by the protocol described herein appear to be electrode gap-dependent. A thus-prepared NanoCell has experimentally exhibited 100%, 65%, and 30% yields for devices with 5 (as in NanoCell 210), 10, and 20 μm-spacings between the juxtaposed electrodes, respectively.
In experimental trials, assembled NanoCells like NanoCell 210 were tested in a probe station both in the dark (covering the observation window with aluminum foil) and in the presence of the room light with the station's fiber optic observation light projected through the observation window ˜10 cm above the chip. The same electrical responses were obtained regardless of the lighting, thereby apparently excluding a photoconductive mechanism.
While not implying to be bound by the precise mechanism for the NanoCell behavior, several control experiments have been conducted in order to investigate the mechanism of action for the NanoCell memories like NanoCell 210. When the same assembly process was conducted but molecule 226 was not added (only Au nanowires in polycarbonate, CH2Cl2, NH4OH and ethanol were added), all the leads were “open” and no switching behavior was observed over tested juxtaposed electrodes (pairs at 5 μm-spacings, 10 μm-spacings and 20 μm-spacings). Therefore, the process appears to be dependent upon introduction of molecule 226. When the assembly procedure is conducted but the nanowires were not present (adding only molecule 226, polycarbonate devoid of nanowires, CH2Cl2, NH4OH and ethanol), two out of three juxtaposed 5 μm-spaced electrodes showed switching between them; however, the switching effect signal degraded nearly completely after 3-10 scans. Therefore some molecules may have bridged the discontinuous Au film, but the connections were not as abundant or stable. A similar behavior was observed at 10 μm-spacings between the electrodes. When an alkyl system, AcS(CH2)12SH was substituted for molecule 226 in the standard assembly process, and thirty juxtaposed electrode pairs were studied, twenty-eight showed no device behavior. Interestingly, however, one 5 μm-spaced electrode pair showed the characteristic switching that dissipated after three scans while a second electrode pair showed reproducible switching behavior but the onset and peak currents occurred at 14 V. Therefore, it appears that molecule 226 is not unique among molecule types.
Concerning the mechanism underlying the programmability of NanoCells such as NanoCell 210, a molecular electronic effect has been considered. Several mechanisms have been proposed for molecular electronic switching. See, e.g., Seminario et al., Journal of the American Chemical Society, vol. 124, pp. 10266-10267 (2002); see also, Cornil et al., Journal of the American Chemical Society, vol. 124, pp. 3516-3517 (2002). These mechanisms are based upon charging of the molecules which results in changes in the contiguous structure of the lowest unoccupied molecular orbital (LUMO). This can further be accompanied by conformational changes that would modulate the current based on changes in the extended π-overlap. As the voltage is increased, the molecules in discrete nano-domains would enter into differing electronic states. Conversely, as some have pointed out, so called “molecular-based” switching might not be an inherently molecular phenomenon, but rather results from surface bonding rearrangements that are molecule/metal contact in origin (i.e. a sulfur atom changing its hybridization state, or more simply, sub-angstrom shifts between different Au surface atom bonding modes, or molecular tilting). An estimate of the number of molecular junctions between a set of juxtaposed electrode pairs is difficult to gauge; however, based upon the size of the nanowires and the Au islands (which can be 0.3-1 μm long), the number of molecular junctions could be as few as four in a 5 μm-electrode gap. The number of molecules in parallel, per junction, could be as few as 1 or as many as several thousand, based on the nanowire diameters, lengths and shapes. Note that the quantum conductance of each molecule is ˜0.08 mA/v.
In addition to a molecular electronic process, electrode migration has been considered as a cause for the high currents and reset operations that are analogous to filamentary metal memories. To further investigate this point, the exposed organic material has been stripped from a working NanoCell 210 by treating the assembled chip with UV-ozone for 10-30 minutes. Notably, the device behavior of NanoCell 210 remained and often improved. In some cases, the 0:1 bit level ratios for the conductivity memory even increased up to 106:1 (2.53 mA: 0.76 nA at −3.0 V). This could suggest that the ozone was not able to penetrate through the build-up of the oxidatively destroyed organics in order to reach the small amount of active organic molecules in the key nano-domains that are sandwiched between the nanowires and the Au islands in discontinuous Au layer 222, and that the more exposed leakage routes were destroyed by the ozone. Conversely, it could suggest that indeed filamentary metal had grown along the molecules and that these metal filaments were causing the observed switching behavior, with any molecular leakage routes being destroyed by the ozone. It has been previously shown, by modeling, that the NanoCell 210 should exhibit extraordinary resistance to degradation (defect tolerance) due to the abundance of molecules available for switching; furthermore, if one molecule degrades, another could slip into place from the self-assembled monolayers that cover all the surrounding metal surfaces. It will also be apparent to those of ordinary skill that at the atomistic level, a molecular change in either conformation or hybridization at the metal-molecule interface, due to voltage changes or charging, could give electronic response characteristics that are analogous to filamentary metals (atoms moving in and out of alignment for current flow), and thereby resemble negative differential resistance-like behavior. In other words, metallic nanofilaments forming during a voltage sweep, then on increasing the voltage, they could exhibit a sudden break, causing a decline in the current.
Additionally, a mechanical motion involving the molecule-encapsulated nanowires has been considered. However, it was deemed less likely due to the highly crosslinked nature of the micron-sized matrix.
None of the data presented herein is regarded by the inventors as conclusive enough to exclude either the molecular electronic-based mechanism or the nanofilament mechanism. However, findings point toward the nanofilament-based mechanism being the dominant or exclusive pathway. This assessment is not to be construed as limiting as to the scope of the claims of the present disclosure.
On the other hand, in NanoCells which are allowed to age for significant periods of time, on the order of four months, switching with magnitudes on the order discussed herein have been observed, even where neither nanowires 224 nor molecules 226 were added. One possible explanation for this phenomenon is that the islands in discontinuous Au layer 222 migrated sufficiently close together to form nanofilaments upon voltage scanning, and then metal filament breakage occurred at higher voltages, giving responses similar to those depicted in
I(V,T) (current as a function of voltage and temperature) measurements have been made to assess the possible conduction mechanism of the high-σ conductivity-type memory state on a bare NanoCell. The data suggests “dirty” or modified-metal conduction, i.e., metallic conduction with trace impurities. The same type of I(V,T) measurements on a molecule/nanowire assembled NanoCell showed both a temperature dependence and a non-temperature dependence based on the particular juxtaposed electrode set studied. It is believed by the inventors that there may be a duality of conduction mechanisms co-existing in a given NanoCell 210.
From the foregoing description of one or more particular implementations and embodiments of the invention, it should be apparent that a NanoCell 210 assembled with disordered arrays of nano-wires has been disclosed. The NanoCell 210 exhibits reproducible switching behavior and at least two types of memory effects, one of which being a destructive-read and the second a nondestructive-read. Both types of memory functionalities are stable for a persistent period of time at room temperature and probably much longer. Data suggests that nanofilamentary metal formation may be the mode of current transport, but fabrication of NanoCells with more refractory metals such as Pt or Pd are also feasible. Additionally, it may be feasible to make NanoCells with a differently-configured stepper or even more precise fabrication tools and techniques to yield juxtaposed electrode gap spacings of less than 1 μm with smaller Au-film islands and appropriately sized and shaped nanowires, to attain higher degrees of consistency between electrode pairs. The present invention is believed to represent the first embodiment of a disordered nano-scale ensemble for high-yielding switching and memory while mitigating the painstaking task of nano-scale lithography or patterning; thereby furthering the promise of disordered programmable arrays for complex device functionality.
Although a broad range of implementation details have been disclosed and discussed herein, these are not to be taken as limitations as to the range and scope of the present invention as defined by the appended claims. A broad range of implementation-specific variations, alterations, and substitutions from the disclosed embodiments, whether or not specifically mentioned herein, may be practiced without departing from the spirit and scope of the invention as defined in the appended claims. By way of example but not limitation, those of ordinary skill in the art having the benefit of the present disclosure will recognize that “nanowires” 224 may take on a variety of different forms and sizes while still functioning as intended in facilitating the formation of programmable conductive paths between juxtaposed electrodes. Likewise, nanowires 224 may be made of a variety of different materials, not limited to those alternatives which are specifically identified in this disclosure. Furthermore, in embodiments of the invention incorporating a discontinuous conductive film 222, it is to be understood that such a film may be composed of conductive materials other than gold, and may be random and irregular, as disclosed herein, or may comprise an ordered grid of nano-particle sized “dots” or “islands” of conductive material.
While preferred embodiments of the present invention have been discussed in detail herein, it will be understood that various modifications could be made thereto without departing from the scope of the invention. For example, the molecular devices, protective groups, solvents, electrolytes, electrodes, substrates, substrate surfaces, deprotection mechanisms, and activation mechanisms can all be varied. In addition, order in which the various steps of the present methods are performed can be varied. Unless order is explicitly recited in the claims, the mere recitation of claim steps in an order is not intended to require that the steps be performed in that order, or that one step must be completed before the next step can begin.
This application is a continuation-in-part of U.S. application Ser. No. 10/090,211, filed Mar. 4, 2002, which claims benefit of priority to U.S. Provisional Application No. 60/272,895 filed Mar. 2, 2001. This application is also a continuation-in-part of U.S. application Ser. No. 11/190,525, filed on Jul. 27, 2005, which claims benefit of priority to PCT Application No. WO 2004/068,497, filed Jan. 28, 2004, which in turn claims benefit of priority to U.S. Provisional Application No. 60/443,148, filed on Jan. 28, 2003. All priority documents are incorporated herein by reference in their entirety.
This work was supported by the Defense Advanced Research Projects Agency (DARPA), the Office of Naval Research (ONR), and the National Science Foundation (NSF, NSR-DMR-0073046).
Number | Date | Country | |
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60272895 | Mar 2001 | US |
Number | Date | Country | |
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Parent | 10090211 | Mar 2002 | US |
Child | 11740170 | Apr 2007 | US |
Parent | 11190525 | Jul 2005 | US |
Child | 11740170 | Apr 2007 | US |