Self-centering wafer carrier for chemical vapor deposition

Information

  • Patent Grant
  • D819580
  • Patent Number
    D819,580
  • Date Filed
    Friday, April 1, 2016
    8 years ago
  • Date Issued
    Tuesday, June 5, 2018
    5 years ago
  • US Classifications
    Field of Search
    • US
    • D13 158-177
    • D13 179
    • D13 180
    • D13 182
    • D13 199
    • D10 1041
    • D10 108
    • D11 143
    • D11 144
    • D11 152
    • D14 216
    • D14 240
    • D14 356
    • D14 509
    • D17 22
    • D23 323
    • D23 328
    • D23 333
    • D23 335
    • D23 336
    • D23 337
    • D23 341
    • D23 352
    • D23 357
    • D23 370
    • D23 385
    • D23 386
    • D23 399
    • D23 400
    • D23 499
    • D12 303
    • D12 315
    • 118 050000
    • 118 722000
    • 118 715000
    • 118 724000
    • 118 733000
    • 205 118000
    • 205 123000
    • D09 500
    • D09 452
    • D09 454
    • D15 122
    • D15 199
    • D15 138
    • D08 16
    • D08 19
    • D08 323
    • D08 399
    • D07 367
    • D07 404
    • D07 6241
    • CPC
    • C25D17/001
    • C25D17/08
    • C25D17/10
    • C25D7/10
    • C25D7/12
    • H01L21/283
    • H01L21/285
    • H01H9/02
    • H01H9/0214
    • H01H13/04
    • H01H21/08
  • International Classifications
    • 1303
    • Term of Grant
      15Years
Abstract
Description


FIG. 1 is a top perspective view of a first embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;



FIG. 2 is a bottom perspective view of the first embodiment thereof;



FIG. 3 is a top view of the first embodiment thereof;



FIG. 4 is a bottom view of the first embodiment thereof;



FIG. 5 is a right view of the first embodiment thereof;



FIG. 6 is a left view of the first embodiment thereof;



FIG. 7 is a rear view of the first embodiment thereof; and



FIG. 8 is a front view of the first embodiment thereof.



FIG. 9 is a top perspective view of a second embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;



FIG. 10 is a bottom perspective view of the second embodiment thereof;



FIG. 11 is a top view of the second embodiment thereof;



FIG. 12 is a bottom view of the second embodiment thereof;



FIG. 13 is a right view of the second embodiment thereof;



FIG. 14 is a left view of the second embodiment thereof;



FIG. 15 is a rear view of the second embodiment thereof; and



FIG. 16 is a front view of the second embodiment thereof.



FIG. 17 is a cross sectional view of the second embodiment taken along 17-17 in FIG. 11 thereof.



FIG. 18 is a top perspective view of a third embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;



FIG. 19 is a bottom perspective view of the third embodiment thereof;



FIG. 20 is a top view of the third embodiment thereof;



FIG. 21 is a bottom view of the third embodiment thereof;



FIG. 22 is a right view of the third embodiment thereof;



FIG. 23 is a left view of the third embodiment thereof;



FIG. 24 is a rear view of the third embodiment thereof; and,



FIG. 25 is a front view of the third embodiment thereof.


Claims
  • The ornamental design for a self-centering wafer carrier for chemical vapor deposition, as shown and described.
US Referenced Citations (34)
Number Name Date Kind
676799 McLoughlin Jun 1901 A
2212766 Andelenis Aug 1940 A
D305022 Hallgren Dec 1989 S
D308647 Mayo Jun 1990 S
D353343 Eberhardt Dec 1994 S
D362841 Roza Oct 1995 S
D404372 Ishi Jan 1999 S
6589352 Yudovsky Jul 2003 B1
7024105 Fodor Apr 2006 B2
D616394 Sato May 2010 S
8999106 Liu Apr 2015 B2
D756501 Park May 2016 S
D768114 Hou Oct 2016 S
9477313 Mistry Oct 2016 B2
D770430 Lee Nov 2016 S
20020043337 Goodman Apr 2002 A1
20040069225 Fairbairn Apr 2004 A1
20090165721 Pitney et al. Jul 2009 A1
20120042823 Gatchalian et al. Feb 2012 A1
20120108081 Olgado et al. May 2012 A1
20120180726 Han Jul 2012 A1
20120305190 Kang Dec 2012 A1
20130269613 Sanchez et al. Oct 2013 A1
20140261187 Krishnan et al. Sep 2014 A1
20140366803 Yamada et al. Dec 2014 A1
20140370691 Yamada et al. Dec 2014 A1
20150007766 Yamada et al. Jan 2015 A1
20150011077 Yamada et al. Jan 2015 A1
20150013594 Yamada et al. Jan 2015 A1
20150024330 Tian et al. Jan 2015 A1
20150267295 Hill et al. Sep 2015 A1
20160372321 Krishnan Dec 2016 A1
20170009367 Harris Jan 2017 A1
20170096734 Barriss Apr 2017 A1
Foreign Referenced Citations (10)
Number Date Country
201732778 Feb 2011 CN
D1234911 Apr 2005 JP
2010-129764 Jun 2010 JP
2010-534942 Nov 2010 JP
D1422467 Aug 2014 JP
D1545406 Mar 2016 JP
D122891 May 2008 TW
M431893 Jun 2012 TW
9923691 May 1999 WO
2013139288 Sep 2013 WO
Non-Patent Literature Citations (70)
Entry
“Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration” for PCT/US2016/037022 dated Sep. 13, 2016, 11 pages, the International Searching Authority/Korean Intellectual Property Office, Daejeon, Republic of Korea.
“Office Action” for Chinese Patent Application No. 201620622524.9, dated Oct. 31, 2016, State of Intellectual Property of the People's Republic of China, Beijing, China.
“Office Action” For Taiwanese Design Application No. 105301932, dated Jan. 10, 2017, 3 pages, Taiwanese Intellectual Property Office, Taiwan.
“Search Report” for Taiwanese Design Application No. 105301932, dated Jan. 9, 2017, 1 page, Taiwanese Intellectual Property Office, Taiwan.
“Office Action” For Taiwanese Design Application No. 105301932D01, dated Jan. 17, 2017, 3 pages, Taiwanese Intellectual Property Office, Taiwan.
“Search Report” for Taiwanese Design Application No. 105301932D01, dated Jan. 11, 2017, 1 page, Taiwanese Intellectual Property Office, Taiwan.
“Office Action” For Japanese Design Application No. 2016-16290, dated Jan. 4, 2017, 1 page, Japanese Intellectual Property Office, Japan.
“Instruction” for Japanese Design Application No. 2016-16290, dated Jan. 4, 2017, 2 pages, Japanese Intellectual Property Office, Japan.
“Office Action” For Japanese Design Application No. 2016-16291, dated Jan. 4, 2017, 1 page, Japanese Intellectual Property Office, Japan.
“Instruction” For Japanese Design Application No. 2016-16291, dated Jan. 4, 2017, 2 pages, Japanese Intellectual Property Office, Japan.
“Notice of Allowance” For Taiwanese Design Application No. 105301929, dated Jan. 12, 2017, 2 pages, Taiwanese Intellectual Property Office, Taiwan.
“Search Report” For Taiwanese Design Application No. 105301929, dated Jan. 9, 2017, 1 page, Taiwanese Intellectual Property Office, Taiwan.
“Office Action” For Chinese Utility Model Application No. 201620622524.9, dated Jan. 22, 2017, 1 page, Chinese Patent Office.
“Notice of Allowance” For Taiwanese Design Application No. 105301929D02, dated Feb. 18, 2017, 2 pages, Taiwanese Intellectual Property Office, Taiwan.
“Search Report” For Taiwanese Design Application No. 105301929D02, dated Jan. 16, 2017, 1 page, Taiwanese Intellectual Property Office, Taiwan.
“Notice of Allowance” For Taiwanese Design Application No. 105301929D01, dated Feb. 18, 2017, 2 pages, Taiwanese Intellectual Property Office, Taiwan.
“Search Report” For Taiwanese Design Application No. 105301929D01, dated Jan. 16, 2017, 1 page, Taiwanese Intellectual Property Office, Taiwan.
“Office Action” For Taiwanese Patent Application No. 105209388, dated Feb. 20, 2017, 2 pages, Taiwanese Intellectual Property Office, Taiwan.
“Office Action” For Japanese Design Application No. 2016-8299, dated Mar. 3, 2017, 2 pages, Japanese Intellectual Property Office, Japan.
“Notice of Allowance” For Taiwanese Design Application No. 105301931D01, dated Mar. 23, 2017, 2 pages, Taiwanese Intellectual Property Office, Taiwan.
“Office Action” For Korean Design Application No. 30-2016-0017743 M001, dated Mar. 28, 2017, 3 pages, Korean Intellectual Property Office, South Korea.
“Office Action” For Korean Design Application No. 30-2016-0017743 M003, dated Mar. 28, 2017, 3 pages, Korean Intellectual Property Office, South Korea.
“Office Action” For Korean Design Application No. 30-2016-0017743 M004, dated Mar. 28, 2017, 3 pages, Korean Intellectual Property Office, South Korea.
“Notice of Allowance” for Japanese Design Application No. 2016-8299, dated May 15, 2017, 1 page, Japanese Intellectual Property Office, Japan.
“Office Action” for Korean Design Application No. 30-2016-0017744-M002, dated Mar. 28, 2017, 2 pages, Korean Intellectual Property Office.
“Office Action” for Korean Design Application No. 30-2016-0017744-M003, dated Mar. 28, 2017, 2 pages, Korean Intellectual Property Office.
“Office Action” for Korean Design Application No. 30-2016-0017744-M004, dated Mar. 28, 2017, 2 pages, Korean Intellectual Property Office.
Office Action For Taiwanese Design Application No. 105301929, dated Aug. 19, 2016, 2 pages, Taiwanese Intellectual Property Office, Taiwan.
Office Action For Taiwanese Design Application No. 105301931, dated Aug. 19, 2016, 2 pages, Taiwanese Intellectual Property Office, Taiwan.
Office Action For Taiwanese Design Application No. 105301932, dated Aug. 19, 2016, 2 pages, Taiwanese Intellectual Property Office, Taiwan.
Search Report For Taiwanese Design Application No. 105301931, dated Aug. 19, 2016, 1 page, Taiwanese Intellectual Property Office, Taiwan.
Office Action for Korean Design Application No. 30-2016-0017743(M001), dated Oct. 28, 2016, 1 page, Korean Intellectual Property Office, Republic of Korea.
Office Action for Korean Design Application No. 30-2016-0017743(M002), dated Oct. 28, 2016, 1 page, Korean Intellectual Property Office, Republic of Korea.
Office Action for Korean Design Application No. 30-2016-0017743(M003), dated Oct. 28, 2016, 1 page, Korean Intellectual Property Office, Republic of Korea.
Office Action for Korean Design Application No. 30-2016-0017743(M004), dated Oct. 28, 2016, 1 page, Korean Intellectual Property Office, Republic of Korea.
Office Action for Korean Design Application No. 30-2016-0017743(M005) , dated Oct. 28, 2016, 1 page, Korean Intellectual Property Office, Republic of Korea.
Office Action for Korean Design Application No. 30-2016-0017744(M001) , dated Oct. 28, 2016, 1 page, Korean Intellectual Property Office, Republic of Korea.
Office Action for Korean Design Application No. 30-2016-0017744(M002) , dated Oct. 28, 2016, 1 page, Korean Intellectual Property Office, Republic of Korea.
Office Action for Korean Design Application No. 30-2016-0017744(M003) , dated Oct. 28, 2016, 1 page, Korean Intellectual Property Office, Republic of Korea.
Office Action for Korean Design Application No. 30-2016-0017744(M004) , dated Oct. 28, 2016, 1 page, Korean Intellectual Property Office, Republic of Korea.
Office Action for Korean Design Application No. 30-2016-0017745(M001) , dated Oct. 28, 2016, 1 page, Korean Intellectual Property Office, Republic of Korea.
Office Action for Korean Design Application No. 30-2016-0017745(M002) , dated Oct. 28, 2016, 1 page, Korean Intellectual Property Office, Republic of Korea.
Office Action for Japanese Design Application No. 2016-8299 , dated Jun. 29, 2016, 2 pages, Japanese Intellectual Property Office, Japan.
Office Action for Japanese Design Application No. 2016-8300 , dated Jun. 29, 2016, 2 pages, Japanese Intellectual Property Office, Japan.
Office Action for Japanese Design Application No. 2016-8301 , dated Jun. 29, 2016, 2 pages, Japanese Intellectual Property Office, Japan.
Examination Report for European Community Design Application No. 003068774-001/003068774-0005 , dated Jun. 25, 2016, 3 pages, European Union Intellectual Property Office, Alicante, Spain.
Examination Report for European Community Design Application No. 003068790-001/003068790-0004 , dated Jun. 25, 2016, 2 pages, European Union Intellectual Property Office, Alicante, Spain.
Examination Report for European Community Design Application No. 003068253-001/003068253-0002 , dated Jul. 4, 2016, 2 pages, European Union Intellectual Property Office, Alicante, Spain.
“Office Action” For Chinese Design Application No. 201630149553.3, 1 page, dated Jul. 19, 2016, State Intellectual Property Office Of The People's Republic Of China, Beijing, China.
“Notice of Allowance” For Korean Design application No. 30-2016-0017743[M001], dated Aug. 10, 2017, 2 pages, Korean Intellectual Property Office, Korea.
“Notice of Allowance” For Korean Design application No. 30-2016-0017743[M003], dated Jul. 24, 2017, 2 pages, Korean Intellectual Property Office, Korea.
“Notice of Allowance” For Korean Design application No. 30-2016-0017744[M001], dated Jul. 25, 2017, 2 pages, Korean Intellectual Property Office, Korea.
“Notice of Allowance” For Korean Design application No. 30-2016-0017744[M002], dated Jul. 25, 2017, 2 pages, Korean Intellectual Property Office, Korea.
“Notice of Allowance” For Korean Design application No. 30-2016-0017744[M003], dated Jul. 25, 2017, 2 pages, Korean Intellectual Property Office, Korea.
“Notice of Allowance” For Korean Design application No. 30-2016-0017744[M004], dated Jul. 25, 2017, 2 pages, Korean Intellectual Property Office, Korea.
“Notice of Allowance” For Korean Design application No. 30-2016-0017745[M001], dated Aug. 31, 2017, 2 pages, Korean Intellectual Property Office, Korea.
“Notice of Allowance” For Korean Design application No. 30-2016-0017745[M002], dated Aug. 31, 2017, 2 pages, Korean Intellectual Property Office, Korea.
“Notice of Allowance” For Korean Design Application No. 30-2016-0017743[M004], dated Oct. 13, 2017, 2 pages, Korea Intellectual Property Office, Republic of Korea.
“Search Report” for Taiwanese Design Patent Application No. 105301929D03, dated January 16, 2017, 1 page, Taiwanese Intellectual Property Office, Taiwan.
“Search Report” for Taiwanese Design Patent Application No. 105301929D04, dated January 16, 2017, 1 page, Taiwanese Intellectual Property Office, Taiwan.
“Search Report” for Taiwanese Design Application No. 105301931D02, dated January 16, 2017, 1 page, Taiwanese Intellectual Property Office, Taiwan.
“Search Report” for Taiwanese Design Application No. 105301931D03, dated Jan. 16, 2017, 1 page, Taiwanese Intellectual Property Office, Taiwan.
“Office Action” For Korean Design Application No. 30-2016-0017744-M001, dated Mar. 28, 2017, 2 pages, Korean Intellectual Property Office, Korea.
“Office Action” For Korean Design Application No. 30-2016-0017744-M002, dated Mar. 28, 2017, 2 pages, Korean Intellectual Property Office, Korea.
“Office Action” For Korean Design Application No. 30-2016-0017744-M003, dated Mar. 28, 2017, 2 pages, Korean Intellectual Property Office, Korea.
“Office Action” For Korean Design Application No. 30-2016-0017744-M004, dated Mar. 28, 2017, 2 pages, Korean Intellectual Property Office, Korea.
“Office Action” For Korean Design Application No. 30-2016-0017745-M001, dated Mar. 28, 2017, 3 pages, Korean Intellectual Property Office, Korea.
“Office Action” For Korean Design Application No. 30-2016-0017745-M002, dated Mar. 28, 2017, 3 pages, Korean Intellectual Property Office, Korea.
“Search Report” For German Utility Model Application No. 20-2016-003-843.6, dated May 24, 2017, 5 pages, German Patent Office, Germany.
“Search Report” For Taiwanese No. 105119600, 1 page, dated Nov. 8, 2017, Intellectual Property Office, Taiwan.