The invention relates to resistors and resistor networks which are electro-thermally trimmable, and more specifically, to the effects of self-heating during operation of these resistors.
In working with resistors referred to as “precision resistors”, it is advantageous to have the capability to precisely adjust the resistance value. It may also be advantageous to precisely control or adjust the temperature coefficient of resistance (TCR) of such a resistor. Resistor trimming can be achieved by heating using electric current pulses passed through the resistor itself or through an adjacent auxiliary heater. Thermal trimming directly modifies the physical properties of the material such as resistivity and TCR.
Joint and independent adjustment of resistance and TCR can be achieved for compound resistors containing a first portion with a first resistance value and a positive TCR and a second portion with a second resistance value and a negative TCR. Independent trimming of these two portions of the compound resistor results in the adjustment of the total resistance and of the TCR of the compound resistor.
Near-zero TCR of the resistor is often desirable because it gives near-zero resistance drift with variation of ambient temperature. One of the problems of compound resistors consisting of two portions with positive and negative TCR is that near-zero TCR of the whole resistor does not mean near-zero TCR of each individual portion.
Non-zero TCR values generate a problem during operation of these types of resistors. When an electric current passes through the resistor, a self-heating effect causes a temporary change in resistance. The amount of the change depends on the overheating temperatures of each resistive portion. This can have a serious impact on the overall operation of the circuit due to the change of resistance value of each part of the compound resistor during operation.
The thermal isolation of a thermally-trimmable resistor has a direct impact on temperature rise. It is possible to design the thermal isolation of the portions of a compound resistor to minimize or optimize the resistance variation of the overall compound resistor. The resistance variation of the overall compound resistor due to self-heating of its portions can be reduced or optimized, by designing different thermal isolation for each of the portions, such that compensation and/or optimization can occur. Furthermore, one can also design such different thermal isolation of the portions of a compound resistor to minimize resistance variation over a trim range of a compound resistor due to self-heating.
In accordance with a first broad aspect of the present invention, there is provided a method for providing a trimmable compound resistor, the method comprising: selecting materials to form a compound resistor having at least a first portion and a second portion, at least the first portion including a first resistor that is thermally trimmable and has a first resistivity and a first temperature coefficient of resistance α0, the second portion including at least a second resistor having a second resistivity and a second temperature coefficient of resistance β0; determining how an overall resistance of the compound resistor varies during operation thereof due to self-heating effects caused by non-zero values for α0 and β0 as a function of a thermal isolation of the first portion G1 and a thermal isolation of the second portion G2; and selecting values G1 and G2, and resistance values R1 and R2 for the first and second portions to reduce the self-heating effect.
In accordance with a second broad aspect of the present invention, there is provided a thermally-trimmable compound resistor comprising a first portion composed of a first resistor that is thermally trimmable and has a first resistivity, a first temperature coefficient of resistance value α0, and first thermal isolation G1; and a second portion composed of at least a second resistor having a second resistivity, a second temperature coefficient of resistance value β0, and a second thermal isolation G2; and a ratio of G1 to G2 compensating for a change in resistance value ΔR induced by a self-heating effect of the compound resistor during operation, ΔR corresponding to an overall change in resistance for the compound resistor during operation.
In accordance with a third broad aspect of the present invention, there is provided a method for providing a trimmable compound resistor, the method comprising: selecting materials to form a compound resistor having at least a first portion and a second portion, at least the first portion including a first resistor that is thermally trimmable and has a first resistivity, a first temperature coefficient of resistance α0, and a trimming-induced shift of temperature coefficient γ1, which defines a change in temperature coefficient of resistance per fraction of trimming x of the first resistivity, the second portion including at least a second resistor having a second resistivity, and a second temperature coefficient of resistance β0; determining how a temperature coefficient of resistance (TCR) of the compound resistor changes as at least the first portion is trimmed, by generating a function of the TCR versus trim-fraction x, with R1 and R2 as variable parameters and α0, β0, and γ1 as fixed parameters; determining how an overall resistance of the compound resistor varies during operation thereof due to self-heating effects caused by non-zero values for α0 and β0 as a function of a thermal isolation of the first portion G1 and a thermal isolation of the second portion G2; and selecting values for R1 and R2 or a ratio thereof, and for G1 and G2 or a ratio thereof, to incorporate an effect of the γ1 and reduce a self-heating effect on the compound resistor.
The term “compensating” should be understood as meaning to reduce/minimize or eliminate an effect thereof. In addition, what is meant by “fixed parameters” is that these values are not selected by the user but are intrinsic to the material. However, they are not necessarily constant and may vary, for example, with temperature or as a function of trim-fraction or time.
Further features and advantages of the present invention will become apparent from the following detailed description, taken in combination with the appended drawings, in which:
It will be noted that throughout the appended drawings, like features are identified by like reference numerals.
Consider the series compound resistor shown in
ΔR1(x)=R1(x)[α(x)ΔT1]=R1(x)[α(x)I2R1(x)G1],
ΔR2=R20[βoΔT2]=R20[βoI2R20G2],
where ΔT1 and ΔT2 are overheating temperatures of each of the two portions due to power I2R1 and I2R2 dissipated in them, where x is the trim-fraction of the trimmable portion R1, where α(x) is the TCR of R1 as x varies, and where βo is the TCR of R2. For the overall series-connected resistor R1(x)+R2, the self-heating-induced resistance modulation is
ΔR(x)=ΔR1(x)+ΔR2=I2[α(x)G1R12(x)+βoG2R202].
In practice, the thermal isolations G1 and G2 do not vary significantly with thermal trimming. Since G1 and G2 can only be positive, reduction of self-heating-induced ΔR by compensation of TCR is only possible if α(x) and βo have opposite signs. In the case of this first example described above, for untrimmed resistors ΔR is zero when G1/G2=−[R202/R102]*[βo/αo], where αo is the TCR of R1 when untrimmed.
Thus, untrimmed compound resistors where one portion has positive TCR and one portion has negative TCR can be self-heating compensated by setting the thermal isolation according to the condition in the above paragraph. For example, if portion R1=2000Ω has TCR αo=+450 ppm/K, and portion R2=1000Ω has TCR βo=−1350 ppm/K, then one can compensate the self-heating effect by creating G1/G2=−[R202/R102]*[βo/αo]=[1/4]*[1350/450]=0.75.
Designed ratios of thermal isolation G1/G2 of a pair of resistance elements can be obtained in practice in a variety of ways. If the two portions are simple integrated resistors made from surface films on a substrate, then one can arrange materials of different thermal conductivities to surround each of the two portions. Or one may place the two resistance portions on insulating films of different thicknesses, thereby creating different thermal isolation from the substrate.
One may create special film-based thermal isolation structures (e.g. US2005/0258990, Babcock et al), with known or measured thermal isolation.
If the two portions are implemented in identical thermally-isolated micro-platforms (each having thermal isolation, for example 30 K/mW), then one can arrange R1 on 4 such identical units, while arranging R2 on 3 such identical units. For example if 1 mA is passed through this series-connected compound resistor, the 2 mW of power dissipated in R1 is divided into 4 micro-platforms (0.5 mW in each unit), while the 1 mW of power dissipated in R2 is divided into 3 micro-platforms (0.33 mW in each unit). Thus R1 experiences a temperature rise of 15K, (and a resistance increase of 6750 ppm), while R2 experiences a temperature rise of 10K (and a resistance decrease of 13500 ppm). Since R1=2R2, 2*6750+(−13500)=0, and the self-heating-induced resistance change is compensated.
If one is not limited to using identical thermally-isolated micro-platforms, one may use micro-platforms which have different thermal isolation values. For example, one may implement the thermally-isolated micro-platforms as two-armed cantilevers (e.g. as shown in WO03023794), where the length and width of the supporting arms can be varied, or one can add or subtract material of known thermal conductivity to the supporting arms. For example, if the desired G1/G2 ratio is 3.92 (instead of a more-easily implementable “3” or “4”), then one may use 4 cantilevers for G2, and use 1 cantilever for G1, and decrease the thermal isolation of R1 slightly by adding an appropriate slab of thermally-conductive material in the supporting arms of its cantilever.
If one has waisted structures available (PCT/CA2005/001726), one may use such structures to implement intermediate thermal isolation values. The above variety of ways are intended to be illustrative. One skilled in the art of thermal properties of materials used in integrated circuits is expected be able to apply such techniques within the context of his/her application.
Another goal of this invention is to minimize self-heating-induced resistance modulation in thermally-trimmable resistors over a trim range of interest. Zero self-heating-induced resistance modulation is theoretically possible over a trim range, in certain restrictive conditions. The two resistive portions R1 and R2 of the compound resistor must be designed such that their thermal isolation complies with the condition: G1/G2=−[R22(y)/R12(x)]*[β(y)/α(x)], over the trim ranges (x,y) of interest.
In practice, it may be difficult to obtain variations of resistance and TCR over a trim range such that this ratio is exactly maintained, since it is unlikely that thermal trimming would appreciably change the thermal isolations G1, G2. However, awareness and simulation using this equation should allow minimization or optimization of self-heating-induced resistance changes over a trim range of interest.
For example, in the case of a series-connected compound resistor, where only R1 is thermally-trimmable, then zero self-heating-induced resistance modulation is theoretically possible over a trim range only when the two resistive portions R1 and R2 of the compound resistor are designed so that their thermal isolation complies with a condition:
G
1
/G
2
=−[R
20
2
/R
1
2(x)][βo/α(x)], over the trim range (x) of interest.
In practice, it is problematic to keep ΔR=0 over a significant trim range, since the variations α(x) may vary arbitrarily. For example, α(x) may be approximately of the form α(x)=αo+γ1(x) x. Therefore, a typical goal is to keep ΔR as small as possible over the desired trim range, and the “optimum” may vary delicately depending on the criteria and trim range.
As an example, consider a compound resistor consisting of a first trimmable portion with initial resistance R10=10000Ω, TCR α0=320 ppm/K and a second un-trimmable portion connected in series, having resistance R20=0.25·R10=2500Ω and TCR β0=−1300 ppm/K. The first portion is located on a thermally isolated platform with thermal isolation G1=50 K/mW. During trimming, resistance of the first resistor and its TCR vary as:
R
1(x)=R10(1+x) α(x)=α0−γ1(1+ξx)x
where x (−0.4<x<0) is the trimming fraction of R1, γ1=700 ppm/K is TCT (coefficient of variation of TCR with trim-fraction), and ξ=1 is a coefficient describing non-linear variation of TCR vs. trim fraction. When electric current passes through this compound resistor, the self-heating effect causes a change of resistance. The amount of the change depends on overheating temperature of each resistive portion with positive and negative TCR. Assume that the second resistor has thermal isolation G2.
The greatest resistance variation corresponds to the case when G2=0 (no self-heating of the second resistance portion). When the second portion is placed on a thermally isolated platform with a thermal isolation G2 3.94 times higher than G1 (calculated from
no resistance change occurs at x=0. However, trimming of the portion R1 decreases its resistance value, which results in reduction of its self-heating and unbalances the self-heating compensation such that the overall self-heating-induced ΔR is negative, as seen in the figure. To reduce resistance change due to self-heating over the whole trimming range, one may adjust the ratio G2/G1 to a different value. The remaining curve in
Also, the thermal isolation ratio may have limited selection. For example, if it is desired to use substantially the same thermally-isolated platforms, which each have approximately the same thermal isolation, one may approximate the ratio 1:3 by using 3 platforms for R1 and 1 platform for R2. (R1 has effectively 3 times less thermal isolation, since its dissipated power is divided among three platforms, leading to three times less temperature rise for a given power input.)
There may be different types of constraints impinging on the design problem. Often, α(x) and βo are given, fixed due to other (materials-availability) constraints. Perhaps even R10, R1(x) and R20 may be fixed due to constraints related to the variation of TCR with trim in the compound resistor. If these types of prior constraints are treated as a higher priority than the compensation of self-heating, then a simple procedure is mandated. If one takes as given α(x) βo, R10, R1(x) and R20 then one simply works with the resulting formula G1/G2=−[R202/R12(x)]*[βo/α(x)], over the trim range (x) of interest. This formula may be a closed-form mathematical prescription, or may reduce to an experimentally-generated lookup table at discrete values of x, perhaps with uncertainties at each value of x. By examining the result of this formula at a set of x-values, one simply chooses and implements the G1/G2 ratio which meets (or approximates) one's criteria of “optimum” over one's desired trim range.
For example, if the G1/G2 ratio varies from 2.5 to 3.8 over the trim range of interest, then one may want to choose a ratio of 3.2, and implement such a number using one or more of the methods described earlier. On the other hand, one may also decide that a ratio of 3.0 is sufficient, and use identical cantilevers in a ratio of 1:3.
If the parameters α(x) βo, R10, R1(x) and R20 are not necessarily fixed, then one may also co-design trimming behavior with compensation of self-heating. If, for example α(x), βo, were fixed due to materials-availability constraints, but R10 and R20 were free to be varied somewhat, then these resistances could be varied as well as G1/G2 to obtain a better self-heating behavior over the desired trim range.
Consider a compound resistor with two resistive portions R1 and R2, connected in parallel and having corresponding thermal isolation G1 and G2 (measured in K/mW). Voltage U applied to the compound resistor results in resistance change of the two portions and the whole resistor:
In this parallel-connected case, zero self-heating-induced resistance modulation is theoretically possible when the two resistive portions R1 and R2 of the compound resistor are designed so that their thermal isolation complies with a condition:
G
1
/G
2
=−[R
1(X)2/R202][βo/α(x)]
which again only has physical meaning if α(x) and βo have opposite signs.
The above analyses hold for the case where one portion is trimmed while the other is not. It is also possible to design a compound thermally-trimmable resistor where both portions may be trimmed, having (in general) different TCR and TCT. In this case, the self-heating-induced resistance change may vary differently depending on which portion is trimmed.
The embodiment(s) of the invention described above is(are) intended to be exemplary only. The scope of the invention is therefore intended to be limited solely by the scope of the appended claims.
This application claims priority of U.S. Provisional Patent Application No. 60/784,784 filed on Mar. 23, 2006.
Filing Document | Filing Date | Country | Kind | 371c Date |
---|---|---|---|---|
PCT/CA2007/000481 | 3/23/2007 | WO | 00 | 9/23/2008 |
Number | Date | Country | |
---|---|---|---|
60784784 | Mar 2006 | US |