Patent Application
20220293740
The present disclosure relates to a semiconductor device that is useful as a power device and the like. Moreover, the present disclosure relates to a semiconductor system including the semiconductor device. Furthermore, the present disclosure relates to a method of producing the semiconductor device.
A semiconductor device using gallium oxide (Ga2O3) with a wide band gap receives attention as a next-generation switching element that can achieve high withstand voltage, low loss, and high heat resistance, and is expected to be applied to power semiconductor devices such as an inverter. In addition, it is also expected that this semiconductor device finds application as light-receiving or emitting devices such as an LED and a sensor due to a wide band gap thereof. Such gallium oxide makes band gap control possible by mixing thereinto indium or aluminum or a combination of indium and aluminum and constitutes a very attractive family of materials as InAlGaO-based semiconductors. Here, InAlGaO-based semiconductors indicate InXAlYGaZO3 (0≤X≤2, 0≤Y≤2, 0≤Z≤2, X+Y+Z=1.5 to 2.5) and may be regarded as a family of materials including gallium oxide.
In recent years, a gallium oxide-based p-type semiconductor has been studied, and it is known that a substrate exhibiting p-type conductivity can be obtained by forming a β-Ga2O3-based crystal by the FZ method using MgO (a p-type dopant source), for example. Moreover, it is known that a p-type semiconductor is formed by ion implanting a p-type dopant into an α-(AlxGa1-x)2O3 monocrystalline film formed by MBE. However, it is difficult to implement production of a p-type semiconductor by these methods and, in actuality, there is no report saying that a p-type semiconductor was successfully produced by these methods. For these reasons, a feasible p-type oxide semiconductor and a method of producing the p-type oxide semiconductor are eagerly anticipated.
Furthermore, using Rh2O3, ZnRh2O4 and the like, for example, in a p-type semiconductor has also been studied. When Rh2O3 is used, the problem is that the raw material concentration becomes particularly low at the time of film formation, which affects film formation, and it is difficult to produce a Rh2O3 monocrystal even with an organic solvent. Moreover, it has never been judged to be a p-type even by Hall effect measurement and the measurement itself has not been able to be conducted; in addition, as for measurement values, the Hall coefficient, for example, was less than or equal to a measurement limit (0.2 cm3/C), which posed a practical problem. Furthermore, ZnRh2O4 has low mobility and a narrow band gap, which makes it impossible to use ZnRh2O4 in LEDs and power devices. Thus, these are not necessarily satisfactory.
In addition to Rh2O3, ZnRh2O4 and the like, various p-type oxide semiconductors have been studied as a wide-band-gap semiconductor. When delafossite, oxychalcogenide and the like as a p-type semiconductoris used, these semiconductors have a mobility of about 1 cm2/V·s or lower and have poor electrical characteristics, resulting in a poor pn junction between these semiconductors and n-type next-generation oxide semiconductors such as α-Ga2O3.
It is to be noted that Ir2O3 is known. For example, it is known that Ir2O3 is used as an iridium catalyst. Moreover, it is known that Ir2O3 is used in a dielectric. Furthermore, it is known that Ir2O3 is used in an electrode. However, no cases are known in which Ir2O3 is used in a p-type semiconductor. The applicant and others have recently studied the use of Ir2O3 as a p-type semiconductor and conducted research and development.
Power devices such as a transistor require low on-resistance and high withstand voltage and there are still problems in electrical characteristics such as a leakage current. Gallium oxide (Ga2O3) in particular has a dielectric breakdown field strength of about 10 and low on-resistance and has good semiconductor characteristics; however, a problem in electrical characteristics makes it impossible to take full advantage of these semiconductor characteristics. An oxide semiconductor having a band gap of 3 eV or more has a similar problem. Specifically, for an oxide semiconductor, a junction leakage current that is likely to be generated by ion implantation affects electrical characteristics, for example. For these reasons, a semiconductor device that effectively uses a good semiconductor material such as gallium oxide (Ga2O3) by solving these problems of electrical characteristics and the like and can achieve high withstand voltage, low loss, and high heat resistance is eagerly anticipated. Moreover, a method by which a semiconductor device using such a semiconductor material can be easily produced is eagerly anticipated.
According to an example of the present disclosure, there is provided a semiconductor device comprising at least, a high-resistance oxide film, which is placed in a direction in which a current flows, the high-resistance oxide film having a resistance of 1.0×106 Ω·cm or higher.
According to an example of the present disclosure, there is provided a semiconductor device comprising at least, a gate electrode; a source electrode; a drain electrode; and a high-resistance oxide film, which is placed between the source electrode and the drain electrode and has a resistance of 1.0×106 Ω·cm or higher.
According to an example of the present disclosure, there is provided a semiconductor device comprising at least, a gate electrode; a source electrode; a drain electrode; a high-resistance oxide film; and a substrate with the high-resistance oxide film being placed between the source electrode or/and the drain electrode and the substrate and having a resistance of 1.0×106 Ω·cm or higher.
Thus, a semiconductor device of the present disclosure is useful as a power device and the like and has good semiconductor characteristics.
The inventors of the present disclosure found out that a semiconductor device including a high-resistance oxide film, which is placed in a direction in which a current flows, the high-resistance oxide film having a resistance of 1.0×106 Ω·cm or higher, has significantly improved electrical characteristics. The inventors of the present disclosure successfully produced high-mobility transistors of a gallium oxide semiconductor and found out that the transistors may solve the above-mentioned conventional problems. According to an example of the present disclosure, there is provided a semiconductor device having semiconductor characteristics useful as a power device. According to an example of the present disclosure, there is provided an industrially advantageous method of producing a semiconductor device
Embodiments of the present disclosure will be described below with reference to the accompanying drawings. In the following description, the same parts and components are designated by the same reference numerals. The present embodiment includes, for example, the following disclosures.
A semiconductor device including at least: a high-resistance oxide film, which is placed in a direction in which a current flows, the high-resistance oxide film having a resistance of 1.0×106 Ω·cm or higher.
A semiconductor device including at least: a gate electrode; a source electrode; a drain electrode; and a high-resistance oxide film, which is placed between the source electrode and the drain electrode and has a resistance of 1.0×106 Ω·cm or higher.
A semiconductor device including at least: a gate electrode; a source electrode; a drain electrode; a high-resistance oxide film; and a substrate with the high-resistance oxide film being placed between the source electrode or/and the drain electrode and the substrate and having a resistance of 1.0×106 Ω·cm or higher.
The semiconductor device according to any one of [Structure 1] to [Structure 3], wherein the resistance of the high-resistance oxide film is 1.0×10 cm or higher.
The semiconductor device according to any one of [Structure 1] to [Structure 4], wherein the high-resistance oxide film is a current block layer.
The semiconductor device according to any one of [Structure 1] to [Structure 5], wherein the high-resistance oxide film has a corundum structure.
The semiconductor device according to any one of [Structure 1] to [Structure 6], wherein the high-resistance oxide film contains Ga2O3.
The semiconductor device according to any one of [Structure 1] to [Structure 7], wherein the high-resistance oxide film contains a p-type dopant.
The semiconductor device according to any one of [Structure 1] to [Structure 8], further including: a channel formation region, below which the high-resistance oxide film is placed.
The semiconductor device according to any one of [Structure 1] to [Structure 9], wherein field-effect mobility is 30 cm2/V·s or higher.
The semiconductor device according to any one of [Structure 1] to [Structure 10], further including: a semiconductor layer and a substrate, between which the high-resistance oxide film is placed.
The semiconductor device according to any one of [Structure 1] to [Structure 10], wherein the semiconductor device is a vertical device with the high-resistance oxide film having an opening.
The semiconductor device according to any one of [Structure 1] to [Structure 12], wherein the semiconductor device is a power device.
The semiconductor device according to any one of [Structure 1] to [Structure 13], wherein the semiconductor device is a MOSFET.
The semiconductor device according to any one of [Structure 1] to [Structure 14], wherein an on/off ratio is 1000 or more.
The semiconductor device according to any one of [Structure 1] to [Structure 15], wherein the semiconductor device is normally off
A semiconductor system including: a semiconductor device, which is the semiconductor device according to any one of [Structure 1] to [Structure 16].
A semiconductor device in an embodiment of the present disclosure is a semiconductor device including at least a high-resistance oxide film, which is placed in a direction in which a current flows, the high-resistance oxide film having a resistance of 1.0×106 Ω·cm or higher. It is to be noted that the resistance of the high-resistance oxide film here means the electric resistivity [Ω·cm] of the high-resistance oxide film. Moreover, a semiconductor device of the present disclosure is a semiconductor device including at least: a gate electrode; a source electrode; a drain electrode; and a high-resistance oxide film, which is placed between the source electrode and the drain electrode and has a resistance of 1.0×106 Ω·cm or higher. Furthermore, a semiconductor device of the present disclosure is a semiconductor device including at least: a gate electrode; a source electrode; a drain electrode; a high-resistance oxide film; and a substrate with the high-resistance oxide film being placed between the source electrode or/and the drain electrode and the substrate and having a resistance of 1.0×106 Ω·cm or higher.
The high-resistance oxide film is not limited to a particular oxide film as long as the oxide film is an oxide film having a resistance of 1.0×106 Ω·cm or higher; in an embodiment of the present disclosure, the resistance of the high-resistance oxide film is preferably 1.0×1010 Ω·cm or higher and more preferably 1.0×1012 Ω·cm or higher. The resistance can be measured by forming measuring electrodes in the high-resistance oxide film and passing a current. The upper limit of the resistance is not limited to a particular upper limit and is preferably 1.0×1015 Ω·cm and more preferably 1.0×1014 Ω·cm. Moreover, in an embodiment of the present disclosure, it is preferable that the high-resistance oxide film is a current block layer. By using the high-resistance oxide film as a current block layer, it is possible to achieve better electrical characteristics.
A constituent material for the high-resistance oxide film is not limited to a particular constituent material; in an embodiment of the present disclosure, it is preferable that the constituent material for the high-resistance oxide film is a crystal film. The crystal film may be a polycrystalline film or a monocrystalline film. The crystal structure of the crystal film is also not limited to a particular crystal structure; in an embodiment of the present disclosure, it is preferable that the crystal film has a corundum structure. Moreover, the constituent material for the high-resistance oxide film also preferably contains gallium and more preferably contains Ga2O3. Furthermore, in an embodiment of the present disclosure, it is preferable that the high-resistance oxide film contains a p-type dopant. In addition, according to the present disclosure, it is preferable that the semiconductor device further includes a channel formation region, below which the high-resistance oxide film is placed. According to these preferred aspects, it is possible to easily achieve a high field-effect mobility of 30 cm2/V·s or higher (more preferably 60 cm2/V·s or higher). It is to be noted that the field-effect mobility generally means the maximum field-effect mobility and refers to the field-effect mobility of a semiconductor device such as a transistor, which is calculated using the output current data corresponding to the semiconductor device. Moreover, according to the above-described preferred aspects, it is possible to easily achieve an on/off ratio of 1000 or more (more preferably 100000 or more). It is to be noted that the “on/off ratio” refers to the ratio of an on current of the semiconductor device to an off current thereof. For example, when the semiconductor device includes at least a source electrode and a drain electrode, the off current refers to a current that flows between the source electrode and the drain electrode when the semiconductor device is off and the on current refers to a current that flows between the source electrode and the drain electrode when the semiconductor device is on.
It is preferable that the high-resistance oxide film is an oxide semiconductor film containing gallium oxide or a mixed crystal thereof as a major component. The oxide semiconductor film may be a p-type semiconductor film or an n-type semiconductor film. Examples of the gallium oxide include α-Ga2O3, β-Ga2O3, and ε-Ga2O3, of which α-Ga2O3 is preferable. Moreover, examples of the mixed crystal of the gallium oxide include a mixed crystal of the gallium oxide and one or two or more types of metal oxides, and suitable examples of the metal oxide include aluminum oxide, indium oxide, iridium oxide, rhodium oxide, and iron oxide. It is to be noted that, for example, when an oxide semiconductor film contains α-Ga2O3 as a “major component”, the oxide semiconductor film only has to contain α-Ga2O3 with the atom ratio of gallium in metallic elements of the oxide semiconductor film being 0.5 or more. In an embodiment of the present disclosure, the atom ratio of gallium in metallic elements of the oxide semiconductor film is preferably 0.7 or more and more preferably 0.8 or more. In addition, for example, when an oxide semiconductor film contains a mixed crystal of α-Ga2O3 and α-Al2O3 as a major component, the oxide semiconductor film only has to contain the mixed crystal with the total atom ratio of gallium and aluminum in metallic elements of the oxide semiconductor film being 0.5 or more; furthermore, in an embodiment of the present disclosure, the atom ratio of gallium in metallic elements of the oxide semiconductor film is preferably 0.5 or more and more preferably 0.7 or more.
Moreover, the film thickness of the high-resistance oxide film is not limited to a particular film thickness and may be 1 μm or less or 1 μm or more; in an embodiment of the present disclosure, the film thickness of the high-resistance oxide film is preferably 1 μm or more, more preferably 1 to 40 μm, and most preferably 1 to 25 μm. The surface area of the semiconductor film is not limited to a particular surface area and may be 1 mm2 or more or 1 mm2 or less. It is to be noted that the high-resistance oxide film may be a single layer film or a multilayer film.
It is preferable that the high-resistance oxide film is an oxide semiconductor film containing a dopant. The dopant is not limited to particular dopant unless it interferes with the present disclosure and may be publicly known dopant. Examples of the dopant include a p-type dopant such as Mg, Zn, Ca or the like. The content of the dopant in the composition of the oxide semiconductor film is preferably 0.00001 at % or more, more preferably 0.00001 to 20 at %, and most preferably 0.0001 to 20 at %.
It is to be noted that the p-type dopant is not limited to particular p-type dopant as long as the p-type dopant may provide the oxide semiconductor film with conductivity as a p-type semiconductor film and may be publicly known p-type dopant. Examples of the p-type dopant include Mg, H, Li, Na, K, Rb, Cs, Fr, Be, Ca, Sr, Ba, Ra, Mn, Fe, Co, Ni, Pd, Cu, Ag, Au, Zn, Cd, Hg, Tl, Pb, N, P and the like, two or more types of these elements and so forth; in an embodiment of the present disclosure, it is preferable that the p-type dopant is Mg, Zn, or Ca.
Unlike a conventional high-resistance oxide layer formed by ion implantation, the high-resistance oxide film is generally obtained by performing film formation using an epitaxial crystal growth method and a forming method and the like are not limited to particular method and the like. The epitaxial crystal growth method is not limited to a particular method unless it interferes with the present disclosure and may be a publicly known method. Examples of the epitaxial crystal growth method include CVD, MOCVD, MOVPE, mist CVD, mist epitaxy, MBE, HVPE, a pulse growth method or the like. In an embodiment of the present disclosure, it is preferable that the epitaxial crystal growth method is mist CVD or mist epitaxy.
A method of producing a semiconductor device in an embodiment of the present disclosure is a method of producing a semiconductor device including forming a high-resistance oxide film having a resistance of 1.0×106 Ω·cm or higher, which is performed by film formation in a direction in which a current flows. Moreover, a method of producing a semiconductor device in an embodiment of the present disclosure is a method of producing a semiconductor device including at least: forming a gate electrode; forming a source electrode; forming a drain electrode; and forming a high-resistance oxide film having a resistance of 1.0×106 Ω·cm or higher, which is performed by forming the high-resistance oxide film between the source electrode and the drain electrode. A method of producing a semiconductor device in an embodiment of the present disclosure is a method of producing a semiconductor device including at least: forming a gate electrode; forming a source electrode; forming a drain electrode; and forming a high-resistance oxide film, directly on the substrate or with another layer placed therebetween, which is performed by forming the high-resistance oxide film between the source electrode or/and the drain electrode and the substrate. The production method makes it possible to easily obtain a semiconductor device (for example, a semiconductor device containing an oxide semiconductor) having good electrical characteristics, which was difficult to achieve by ion implantation.
It is to be noted that the formation of the high-resistance oxide film is preferably performed by crystal growth and more preferably performed by lateral crystal growth. Moreover, in an embodiment of the present disclosure, it is preferable that the film formation is performed at 800° C. or lower and the high-resistance oxide film has a corundum structure. Furthermore, in an embodiment of the present disclosure, it is preferable that the formation of the high-resistance oxide film is performed using a raw material containing gallium and the high-resistance oxide film contains gallium, and the high-resistance oxide film more preferably contains α-Ga2O3. In addition, in an embodiment of the present disclosure, it is preferable that the formation of the high-resistance oxide film is performed using a raw material containing p-type dopant and the high-resistance oxide film contains the p-type dopant. Moreover, in an embodiment of the present disclosure, it is preferable that additionally a channel formation region is provided in the semiconductor device and the high-resistance oxide film is placed below the channel formation region. Such a preferred production method makes it easy to make the semiconductor device have a field-effect mobility of 30 cm2/V s or higher (preferably 60 cm2/V s or higher).
In an embodiment of the present disclosure, it is preferable that the film formation is performed by atomizing a raw material solution containing metal (an atomization process), conveying the obtained atomized droplets to an area near a base by carrier gas (a conveying process), and making the atomized droplets thermally react with each other (a film formation process).
The raw material solution is not limited to a particular raw material solution as long as the raw material solution contains metal as a film formation material and can be atomized, and may contain an inorganic material or an organic material. The metal may be elemental metal or a metal compound and is not limited to particular metal unless it interferes with the present disclosure, and examples thereof include one or two or more types of metal selected from gallium (Ga), iridium (Ir), indium (In), rhodium (Rh), aluminum (Al), gold (Au), silver (Ag), platinum (Pt), copper (Cu), iron (Fe), manganese (Mn), nickel (Ni), palladium (Pd), cobalt (Co), ruthenium (Ru), chromium (Cr), molybdenum (Mo), tungsten (W), tantalum (Ta), zinc (Zn), lead (Pb), rhenium (Re), titanium (Ti), tin (Sn), magnesium (Mg), calcium (Ca), and zirconium (Zr); in an embodiment of the present disclosure, the metal preferably contains at least one or two or more types of metal in the periods 4 to 6 in the periodic table, more preferably contains at least gallium, indium, aluminum, rhodium, or iridium, and most preferably contains at least gallium. By using such preferred metal, it is possible to form an epitaxial film that may be more suitably used in semiconductor devices and the like.
In an embodiment of the present disclosure, what is obtained by dissolving or dispersing the metal in an organic solvent or water in the form of a complex or salt may be suitably used as the raw material solution. Examples of the form of a complex include an acetylacetonato complex, a carbonyl complex, an ammine complex, and a hydrido complex. Examples of the form of salt include organometallic salt (for example, metallic acetate, metallic oxalate, and metallic citrate), metal sulfide salt, metal nitrate salt, metal phosphate salt, and metal halide salt (for example, metal chloride salt, metal bromide salt, and metal iodide salt).
A solvent of the raw material solution is not limited to a particular solvent unless it interferes with the present disclosure, and may be an inorganic solvent such as water, an organic solvent such as alcohol, or a mixed solvent of an inorganic solvent and an organic solvent. In an embodiment of the present disclosure, it is preferable that the solvent contains water.
Moreover, an additive such as hydrohalic acid or oxidizer may be mixed into the raw material solution. Examples of the hydrohalic acid include hydrobromic acid, hydrochloric acid, and hydriodic acid. Examples of the oxidizer include peroxides such as hydrogen peroxide (H2O2), sodium peroxide (Na2O2), barium peroxide (BaO2), and benzoyl peroxide (C6H5CO)2O2, hypochlorous acid (HClO), perchloric acid, nitric acid, ozone water, and organic peroxides such as peroxyacetic acid and nitrobenzene. The percentage of the additive in the raw material solution is not limited to a particular percentage and preferably 0.001 to 50 vol % and more preferably 0.01 to 30 vol % of the raw material solution.
The raw material solution may contain a dopant. The dopant is not limited to particular dopant unless it interferes with the present disclosure. Examples of the dopant include the above-described n-type dopant or p-type dopant. In general, the concentration of the dopant may be about 1×1016/cm3 to 1×1022/cm3 and the concentration of the dopant may be set at a low concentration of about 1×1017/cm3 or less, for example. Furthermore, according to the present disclosure, the raw material solution may be made to contain the dopant at a high concentration of about 1×1020/cm3 or more.
The atomization process adjusts a raw material solution containing metal, atomizes the raw material solution, and generates atomized droplets. The proportion of the metal in the raw material solution is not limited to a particular proportion and is preferably 0.0001 to 20 mol/L in the whole of the raw material solution. An atomization method is not limited to a particular method as long as the method can atomize the raw material solution and may be a publicly known atomization method; in an embodiment of the present disclosure, an atomization method using ultrasonic vibrations is preferable. The atomized droplets (for example, mist) that are used in the present disclosure are more preferably atomized droplets that are suspended in the air with zero initial velocity which allows them to be conveyed while being suspended in the space, not being sprayed like a spray, for example. The droplet size of the atomized droplets is not limited to a particular size and may be a droplet of about a few mm; the droplet size is preferably 50 μm or less and more preferably 1 to 10 μm.
In the conveying process, the atomized droplets are conveyed to the base by the carrier gas. The type of carrier gas is not limited to a particular type unless it interferes with the present disclosure and suitable examples thereof include oxygen, ozone, inert gas (for example, nitrogen and argon), reducing gas (hydrogen gas, forming gas and the like) or the like. Moreover, one type of carrier gas may be used; two or more types of carrier gas may be used and dilution gas (for example, 10-fold dilution gas) obtained by changing carrier gas concentration, for example, may be additionally used as second carrier gas. Furthermore, instead of one carrier gas supply point, two or more carrier gas supply points may be provided. The flow rate of carrier gas is not limited to a particular flow rate and is preferably 0.01 to 20 LPM and more preferably 0.1 to 10 LPM.
In the film formation process, a film is formed on the base by making the atomized droplets react with each other. The reaction is not limited to a particular reaction as long as it is a reaction by which a film is formed from the atomized droplets; in an embodiment of the present disclosure, a thermal reaction is preferable. The thermal reaction only has to make the atomized droplets react with each other by heat, and the reaction conditions and so forth are also not limited to particular reaction conditions and so forth unless they interfere with the present disclosure. In this process, the thermal reaction is generally carried out at a temperature equal to or higher than the evaporation temperature of a solvent of a raw material solution; the temperature is preferably not too high temperatures or lower, more preferably 850° C. or lower, and most preferably 650° C. or lower. Moreover, the thermal reaction may be carried out under any one of the following atmospheres: under vacuum, under a non-oxygen atmosphere, under a reducing gas atmosphere, and under an oxygen atmosphere and may be carried out under any one of the following conditions: under atmospheric pressure, under increased pressure, and under reduced pressure unless it interferes with the present disclosure; in an embodiment of the present disclosure, it is preferable that the thermal reaction is carried out under atmospheric pressure because, for example, this makes it easier to perform the calculation of the evaporation temperature and makes it possible to simplify the equipment and so forth. Furthermore, a film thickness may be set by adjusting the film formation time.
The base is not limited to a particular base as long as the base can support the film. A material for the base is also not limited to a particular material unless it interferes with the present disclosure and the base may be a publicly known base, and the material for the base may be an organic compound or an inorganic compound. The base may have any shape and is effective for any shape, and examples of the shape thereof include a plate-like shape such as a flat plate-like shape or a disk-like shape, a fiber-like shape, a rod-like shape, a columnar shape, a prismatic shape, a tubular shape, a spiral shape, a spherical shape, and a ring-like shape; in an embodiment of the present disclosure, a substrate is preferable. The thickness of a substrate is not limited to a particular thickness in an embodiment of the present disclosure.
The substrate is not limited to a particular substrate as long as the substrate is a plate-like substrate and serves as a support of the semiconductor film. The substrate may be an insulator substrate, a semiconductor substrate, a metal substrate, or a conductive substrate; it is preferable that the substrate is an insulator substrate and it is also preferable that the substrate is a substrate having a metal film on the front surface thereof. Examples of the substrate include an underlying substrate containing a substrate material with a corundum structure as a main component, an underlying substrate containing a substrate material with a β-gallia structure as a main component, an underlying substrate containing a substrate material with a hexagonal structure as a main component, or the like. A “main component” here means that a substrate material with the above-described particular crystal structure constitutes preferably 50% or more, more preferably 70% or more, and further preferably 90% or more of all the components of a substrate material in terms of atom ratio, and a substrate material with the above-described particular crystal structure may constitute 100% of all the components of a substrate material in terms of atom ratio.
A substrate material is not limited to a particular substrate material unless it interferes with the present disclosure and may be a publicly known substrate material. Suitable examples of the substrate material with a corundum structure include α-Al2O3 (a sapphire substrate), α-Ga2O3 or the like, and more suitable examples include an a-plane sapphire substrate, an m-plane sapphire substrate, an r-plane sapphire substrate, a c-plane sapphire substrate, and an α-type gallium oxide substrate (a-plane, m-plane, or r-plane). Examples of an underlying substrate of which main component is a substrate material with a β-gallia structure include a β-Ga2O3 substrate, a mixed crystal substrate containing Ga2O3 and Al2O3, the content of Al2O3 being more than 0 wt % and 60 wt % or less, or the like. Moreover, examples of an underlying substrate of which main component is a substrate material with a hexagonal structure include a SiC substrate, a ZnO substrate, and a GaN substrate.
In an embodiment of the present disclosure, annealing treatment may be performed after the film formation process. The annealing treatment temperature is not limited to a particular temperature unless it interferes with the present disclosure, and the annealing treatment temperature is generally 300 to 650° C. and preferably 350 to 550° C. Moreover, the annealing treatment time is generally 1 minute to 48 hours, preferably 10 minutes to 24 hours, and more preferably 30 minutes to 12 hours. It is to be noted that the annealing treatment may be carried out under any atmosphere unless it interferes with the present disclosure; the annealing treatment is carried out preferably under a non-oxygen atmosphere and more preferably under a nitrogen atmosphere.
Moreover, in an embodiment of the present disclosure, the semiconductor film may be provided directly on the base or may be provided on the base with another layer such as a buffer layer or a stress relaxation layer placed therebetween. A method of forming each layer is not limited to a particular method and may be a publicly known method; in an embodiment of the present disclosure, mist CVD or mist epitaxy is preferable.
Hereinafter, film forming equipment 19 that is suitably used in mist CVD or mist epitaxy described above will be described using the drawing. The film forming equipment 19 of
Then, the raw material solution 24a is housed in the mist generation source 24 as shown in
In an embodiment of the present disclosure, the film obtained by the film formation process may be used in a semiconductor device as it is, or the film may be used in a semiconductor device after using a publicly known method such as separating the film from the base or the like.
It is preferable that the semiconductor device includes a semiconductor layer and a substrate, between which the high-resistance oxide film is placed. This preferred semiconductor device makes it possible to obtain a horizontal semiconductor device with better electrical characteristics and more suitably use the horizontal semiconductor device as a power device.
Moreover, it is also preferable that the semiconductor device is a vertical device with the high-resistance oxide film having an opening, and this preferred semiconductor device makes it possible to obtain a horizontal semiconductor device with better electrical characteristics that may achieve high withstand voltage and high current and more suitably use the horizontal semiconductor device as a power device.
The semiconductor device is especially useful for power devices. Examples of the semiconductor device include transistors, of which a MOSFET is preferable. Moreover, it is preferable that the semiconductor device is normally off.
Examples of the transistors include a semiconductor device including at least a high-resistance oxide film, a gate insulating film, a gate electrode, a source electrode, and a drain electrode. In an embodiment of the present disclosure, the high-resistance oxide film may be used as a semiconductor layer. Moreover, the semiconductor device preferably includes a channel formation region and more preferably includes an inversion channel formation region.
The inversion channel formation region is generally provided between semiconductor regions exhibiting conductivity of a different type. For example, when the inversion channel formation region is provided in a p-type semiconductor layer, the inversion channel formation region is generally provided in a p-type semiconductor layer between semiconductor regions of an n-type semiconductor; when the inversion channel formation region is provided in an n-type semiconductor layer, the inversion channel formation region is generally provided in an n-type semiconductor layer between semiconductor regions of a p-type semiconductor. It is to be noted that a method of forming each semiconductor region may be similar to the method of forming the high-resistance oxide film.
Moreover, in an embodiment of the present disclosure, it is preferable that an oxide film containing at least one type of element of group 15 of the periodic table is stacked on the inversion channel formation region. Examples of the element include nitrogen (N) and phosphorus (P); in an embodiment of the present disclosure, the element is preferably nitrogen (N) or phosphorus (P) and more preferably phosphorus (P). For example, between a gate insulating film and the inversion channel formation region, by stacking an oxide film containing at least phosphorus on the inversion channel formation region, it is possible to prevent hydrogen from being diffused into an oxide semiconductor film and also reduce the interface state, which makes it possible to provide a semiconductor device, especially a semiconductor device of a wide-band-gap semiconductor, with better semiconductor characteristics. It is to be noted that, in an embodiment of the present disclosure, the oxide film more preferably contains at least the at least one type of element of group 15 of the periodic table and one or two or more types of metal of group 13 of the periodic table. Examples of the metal include aluminum (Al), gallium (Ga), and indium (In), of which Ga and/or Al is preferable and Ga is more preferable. Moreover, the oxide film is preferably a thin film, more preferably has a film thickness of 100 nm or less, and most preferably has a film thickness of 50 nm or less. By stacking such an oxide film, it is possible to more effectively suppress gate leakage and achieve better semiconductor characteristics. Examples of a method of forming the oxide film include a publicly known method and more specific examples thereof include a dry process and a wet process; it is preferable that the method is surface treatment performed on the inversion channel formation region by using phosphoric acid or the like.
Furthermore, in an embodiment of the present disclosure, it is preferable that a gate electrode is provided on the inversion channel formation region with a gate insulating film placed therebetween and it is also preferable that a gate electrode is provided on the inversion channel formation region and the oxide film with a gate insulating film placed therebetween. These configurations make it easy to prevent diffusion of hydrogen, for example, and make it possible to achieve better semiconductor characteristics.
The gate insulating film is not limited to a particular gate insulating film unless it interferes with the present disclosure and may be a publicly known insulating film. Suitable examples of the gate insulating film include an oxide film such as an oxide film containing at least SiO2, Si3N4, Al2O3, GaO, AlGaO, InAlGaO, AlInZnGaO4, AlN, Hf2O3, SiN, SiON, MgO, GdO, or phosphorus. A method of forming the gate insulating film may be a publicly known method and examples of such a publicly known forming method include a dry process and a wet process. Examples of the dry process include publicly known methods such as sputtering, vacuum evaporation, CVD, and PLD. Examples of the wet process include coating methods such as screen printing and die coating.
The gate electrode may be a publicly known gate electrode and such an electrode material may be a conductive inorganic material or a conductive organic material. In an embodiment of the present disclosure, the electrode material is preferably metal. The metal is not limited to particular metal and suitable examples thereof include at least one type of metal selected from groups 4 to 11 of the periodic table. Examples of metals of group 4 of the periodic table include titanium (Ti), zirconium (Zr), and hafnium (Hf), of which Ti is preferable. Examples of metals of group 5 of the periodic table include vanadium (V), niobium (Nb), and tantalum (Ta). Examples of metals of group 6 of the periodic table include one or two or more types of metal selected from chromium (Cr), molybdenum (Mo), and tungsten (W); in an embodiment of the present disclosure, Cr is preferable because Cr makes semiconductor characteristics such as switching characteristics better. Examples of metals of group 7 of the periodic table include manganese (Mn), technetium (Tc), and rhenium (Re). Examples of metals of group 8 of the periodic table include iron (Fe), ruthenium (Ru), and osmium (Os). Examples of metals of group 9 of the periodic table include cobalt (Co), rhodium (Rh), and iridium (Ir). Examples of metals of group 10 of the periodic table include nickel (Ni), palladium (Pd), and platinum (Pt), of which Pt is preferable. Examples of metals of group 11 of the periodic table include copper (Cu), silver (Ag), and gold (Au). Examples of a method of forming the gate electrode include a publicly known method and more specific examples thereof include a dry process and a wet process. Examples of the dry process include publicly known methods such as sputtering, vacuum evaporation, and CVD. Examples of the wet process include screen printing and die coating.
It is to be noted that, in an embodiment of the present disclosure, not only a gate electrode, but also a source electrode and a drain electrode are provided; like the gate electrode, each of the source electrode and the drain electrode may be a publicly known electrode and a method of forming each electrode may be a publicly known method.
Hereinafter, preferred embodiments in the present disclosure will be described more specifically using the drawings; the present disclosure is not limited to these embodiments.
Specific examples of the semiconductor device of the present disclosure include a MOSFET shown in
In an on-state of the MOSFET of
An embodiment of a MOSFET is shown in
An embodiment of a MOSFET is shown in
An embodiment of a MOSFET is shown in
By using a publicly known method in addition to the above-described matter, the semiconductor device of the present disclosure is suitably used as a power module, an inverter, or a converter and is suitably used in a semiconductor system or the like using a power supply device, for example. The power supply device can be fabricated from the semiconductor device or as the semiconductor device by connecting it to a wiring pattern or the like using a publicly known method. An example of a power supply system is shown in
1. Formation of p-Type Semiconductor Layer (High-Resistance Oxide Film)
The film forming equipment 19 of
A 0.1 M aqueous solution of gallium bromide was made to contain 20% hydrobromic acid in terms of volume ratio and Mg was then added to the solution such that the solution contains 10 vol % Mg, and the obtained solution was used as a raw material solution.
The raw material solution 24a obtained in 1-2. above was housed in the mist generation source 24. Then, a sapphire substrate was placed on a susceptor 21 as the substrate 20 and the temperature inside the film formation chamber 30 was raised to 520° C. by activating the heater 28. Next, the carrier gas was supplied to the inside of the film formation chamber 30 from the carrier gas supply sources 22a and 22b, which are carrier gas sources, by opening the flow control valves 23a and 23b and the atmosphere inside the film formation chamber 30 was sufficiently replaced with the carrier gas, and then the flow rate of the carrier gas was adjusted to 1 LPM and the flow rate of the carrier gas (dilute) was adjusted to 1 LPM. It is to be noted that nitrogen was used as the carrier gas.
Next, the ultrasonic vibrator 26 was vibrated at 2.4 MHz and the vibrations were transferred to the raw material solution 24a through the water 25a, whereby the raw material solution 24a was atomized and mist was generated. This mist was introduced into the film formation chamber 30 by the carrier gas and reacted with each other inside the film formation chamber 30 at 520° C. under atmospheric pressure, whereby a p-type semiconductor layer (a high-resistance oxide film) was formed on the substrate 20. It is to be noted that a film thickness was 0.6 μm and the film formation time was 15 minutes.
An identification of the phase of the film obtained in 1-4. above, which was made using an XRD diffraction instrument, revealed that the obtained film was α-Ga2O3.
2. Formation of n+-Type Semiconductor Region
An n+-type semiconductor film was formed on the p-type semiconductor layer obtained in 1. above in a manner similar to that described in 1. above except that a 0.1 M aqueous solution of gallium bromide was made to contain 10% hydrobromic acid and 8% tin bromide in terms of volume ratio and the obtained solution was used as a raw material solution and the film formation temperature was set at 580° C. and the film formation time was set at 5 minutes. An identification of the phase of the obtained film, which was made using the XRD diffraction instrument, revealed that the obtained film was α-Ga2O3.
After the n+-type semiconductor layer in a region (between 1b and 1c) corresponding to a gate portion was etched by phosphoric acid and treatment using phosphoric acid was performed such that an oxide film containing at least phosphorus was formed on the p-type semiconductor layer, a film of SiO2 was formed as a gate insulating film using TEOS. It is to be noted that measurement of the resistance of the high-resistance oxide film, which was conducted by forming measuring electrodes in the high-resistance oxide film and passing a current, revealed that the resistance was 1.0×1012 Ω·cm or higher. Moreover, photolithography, etching processing, electron-beam evaporation and so forth were performed, whereby a MOSFET was produced as shown in
IV measurement was performed on the obtained MOSFETs. The IV measurement results are shown in
The semiconductor device of the present disclosure may be used in all the fields such as semiconductors (for example, a compound semiconductor electronic device), electronic parts, electrical apparatus parts, optical and electronic photograph-related equipment, and industrial components, and is particularly useful for power devices.
The embodiments of the present invention are exemplified in all respects, and the scope of the present invention includes all modifications within the meaning and scope equivalent to the scope of claims.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2019-217100 | Nov 2019 | JP | national |
| 2019-217101 | Nov 2019 | JP | national |
This application is a continuation-in-part application of International Patent Application No. PCT/JP2020/043517 (filed on Nov. 20, 2020), which claims the benefit of priority from Japanese Patent Applications No. 2019-217100 (filed on Nov. 29, 2019) and No. 2019-217101 (filed on Nov. 29, 2019). The entire contents of the above applications, which the present application is based on, are incorporated herein by reference.
| Number | Date | Country | |
|---|---|---|---|
| Parent | PCT/JP2020/043517 | Nov 2020 | US |
| Child | 17826435 | US |
