The disclosure of Japanese Patent Application No. 2018-067237 filed on Mar. 30, 2018 including the specification, drawings and abstract is incorporated herein by reference in its entirety.
The present invention relates to a semiconductor device, a control method thereof, and a coupling relation setting process program, and, for example, a semiconductor device, a control method thereof, and a coupling relation setting process program by which detection time of a detection target can be shortened without increasing the circuit scale.
A detection device (semiconductor device) for detecting the position of a detection target such as a touch pen or a finger used to operate a touch panel is mounted in the touch panel of a smartphone, a tablet terminal, or the like. The detection device has been required to reduce the circuit scale without deteriorating the detection accuracy.
A relevant technique is disclosed in Japanese Unexamined Patent Application Publication No. 2013-196675. A position detection device disclosed in Japanese Unexamined Patent Application Publication No. 2013-196675 includes a plurality of electrodes, a selection circuit that selectively outputs a set of electrodes among the electrodes, and a differential amplification circuit that amplifies a pair of signals received from the set of electrodes selected by the selection circuit. Accordingly, it is not necessary to provide an amplification circuit for each electrode in the position detection device, and thus it is possible to suppress the circuit scale from increasing.
However, detection time is disadvantageously increased in the configuration of Japanese Unexamined Patent Application Publication No. 2013-196675 because the position of a detection target is detected after all the electrodes are selected. The other problems and novel features will become apparent from the description of the specification and the accompanying drawings.
According to an embodiment, provided is a semiconductor device including: a plurality of first sensors that is arranged at predetermined intervals; a first measurement circuit that measures the added value of two or more first detection signals among those output from all the first sensors and outputs a first measurement result; a second measurement circuit that measures the added value of two or more first detection signals that are different from those measured by the first measurement circuit among the first detection signals and outputs a second measurement result; and an analysis circuit that analyzes the position of a detection target on the basis of the first and second measurement results, wherein the first sensors and the first and second measurement circuits are coupled to each other so that combinations of the first and second measurement results differ from each other depending on the position of the detection target.
According to another embodiment, provided is a control method of a semiconductor device including the steps of: setting coupling relations among a plurality of sensors arranged at predetermined intervals, a first measurement circuit, and a second measurement circuit; detecting a detection target using each of the sensors; measuring the added value of two or more detection signals among those output from all the sensors using the first measurement circuit; measuring the added value of two or more detection signals that are different from those measured by the first measurement circuit among those output from all the sensors using the second measurement circuit; and analyzing the position of the detection target on the basis of a first measurement result by the first measurement circuit and a second measurement result by the second measurement circuit, wherein in the step of setting the coupling relations, the first sensors and the first and second measurement circuits are coupled to each other so that combinations of the first and second measurement results differ from each other depending on the position of the detection target.
According to still another embodiment, in a semiconductor device including: a plurality of sensors that is arranged at predetermined intervals; a first measurement circuit that measures the added value of two or more detection signals among those output from all the sensors and outputs a first measurement result; a second measurement circuit that measures the added value of two or more detection signals that are different from those measured by the first measurement circuit among the detection signals and outputs a second measurement result; and an analysis circuit that analyzes the position of a detection target on the basis of the first and second measurement results, provided is a coupling relation setting process program allowing a computer to execute the processes of: extracting information of a coupling pattern in which the sensors and the first and second measurement circuits are coupled to each other so that combinations of the first and second measurement results differ from each other depending on the position of the detection target; and setting coupling relations among the sensors and the first and second measurement circuits on the basis of the extracted information of the coupling pattern.
According to the embodiment, it is possible to provide a semiconductor device, a control method thereof, and a coupling relation setting process program by which detection time of a detection target can be shortened without increasing the circuit scale.
In order to clarify the explanation, the following description and drawings are appropriately omitted and simplified. In addition, each element illustrated in the drawings as a functional block for performing various processes can be configured using a CPU (Central Processing Unit), a memory, or other circuits as hardware, and can be realized by a program or the like loaded to a memory as software. Thus, a person skilled in the art can understand that these functional blocks can be realized in various forms such as only hardware, only software, or a combination thereof, and are not limited to any one of these. It should be noted that the same elements are followed by the same signs in each drawing, and the duplicated explanation thereof is appropriately omitted.
Further, the above-described program can be stored and supplied to a computer using various types of non-transitory computer readable media. The non-transitory computer readable media include various types of tangible recording media. Examples of the non-transitory computer readable media include a magnetic recording medium (for example, a flexible disk, a magnetic tape, or a hard disk drive), a magneto-optical recording medium (for example, a magneto-optical disk), a CD-ROM (Read Only Memory), a CD-R, a CD-R/W, and a semiconductor memory (for example, a mask ROM, a PROM (Programmable ROM), an EPROM (Erasable PROM), a flash ROM, or a RAM (Random Access Memory)). Further, the program may be supplied to a computer by various types of transitory computer readable media. Examples of the transitory computer readable media include an electrical signal, an optical signal, and an electromagnetic wave. The program can be supplied to a computer by the transitory computer readable media via a wired communication path such as a wire or an optical fiber, or a wireless communication path.
Before describing a semiconductor device 1 according to a first embodiment, a semiconductor device 50 previously considered by the inventors will be described.
As shown in
The sensors S1_1 to S1_15 are electrostatic capacitance-type sensors that change the value of an electrostatic capacitance when the detection target T1 comes close thereto, and output a detection signal having intensity in accordance with a distance up to the detection target T1.
Here, the sensors S1_1 to S1_15 are arranged at predetermined intervals in the X-axis direction (for example, the row direction). Namely, the semiconductor device 50 detects the position of the detection target T1 in the X-axis direction using the sensors S1_1 to S1_15.
In the example, a case in which the common detection target T1 is detected by up to five sensors will be described. For example, the detection signal having the strongest intensity is output by the closest sensor to the detection target T1, the detection signal having the second strongest intensity is output by the second closest two sensors (two sensors adjacent to the closest sensor to the detection target T1) to the detection target T1, and the detection signal having the third strongest intensity is output by the third closest two sensors to the detection target T1. No detection signals are output by the other remaining sensors (in other words, 0-level detection signals are output by the other remaining sensors).
In addition, one sensor group is configured using the continuously-arranged five sensors in the example. Specifically, one sensor group is configured using the five sensors S1_1 to S1_5, one sensor group is configured using the five sensors S1_6 to S1_10, and one sensor group is configured using the five sensors S1_11 to S1_15.
The sensors S1_1 to S1_5 are coupled to the wires W1_1 to W1_5, respectively. The sensors S1_6 to S1_10 are coupled to the wires W1_1 to W1_5, respectively. The sensors S1_11 to S1_15 are coupled to the wires W1_1 to W1_5, respectively. Namely, the first sensor of each of the three sensor groups is coupled to the common wire W1_1, the second sensor of each of the three sensor groups is coupled to the common wire W1_2, and the third sensor of each of the three sensor groups is coupled to the common wire W1_3, the fourth sensor of each of the three sensor groups is coupled to the common wire W1_4, and the fifth sensor of each of the three sensor groups is coupled to the common wire W1_5.
The measurement circuit 11_1 measures the added value of the detection signals of the sensors S1_1, S1_6, and S1_11 supplied to the wire W1_1, and outputs a measurement result A1. The measurement circuit 11_2 measures the added value of the detection signals of the sensors S1_2, S1_7, and S1_12 supplied to the wire W1_2, and outputs a measurement result A2. The measurement circuit 11_3 measures the added value of the detection signals of the sensors S1_3, S1_8, and S1_13 supplied to the wire W1_3, and outputs a measurement result A3. The measurement circuit 11_4 measures the added value of the detection signals of the sensors S1_4, S1_9, and S1_14 supplied to the wire W1_4, and outputs a measurement result A4. The measurement circuit 11_5 measures the added value of the detection signals of the sensors S1_5, S1_10, and S1_15 supplied to the wire W1_5, and outputs a measurement result A5. Each of the measurement circuits 11_1 to 11_5 is configured using, for example, an amplification circuit or an AD converter.
It should be noted that the detection signal having the strongest intensity is represented as a value “3”, the detection signal having the second strongest intensity is represented as a value “2”, and the detection signal having the third strongest intensity is represented as a value “1” in the example. In addition, the other detection signals are represented as a value “0”.
Thus, for example, in the case where the value of the detection signal of the sensor S1_1 is “0”, the value of the detection signal of the sensor S1_6 is “2”, and the value of the detection signal of the sensor S1_11 is “0”, the measurement circuit 11_1 outputs the added value “2” as the measurement result A1.
The analysis circuit 12 is, for example, a microcomputer, and analyzes the position of the detection target T1 in the X-axis direction on the basis of a combination of the measurement results A1 to A5 by the measurement circuits 11_1 to 11_5.
As shown in
At this time, the measurement result A1 is “3” that is the result obtained by adding the detection results “0, 3, 0” by the sensors S1_1, S1_6, and S1_11. The measurement result A2 is “2” that is the result obtained by adding the detection results “0, 2, 0” by the sensors S1_2, S1_7, and S1_12. The measurement result A3 is “1” that is the result obtained by adding the detection results “0, 1, 0” by the sensors S1_3, S1_8, and S1_13. The measurement result A4 is “1” that is the result obtained by adding the detection results “1, 0, 0” by the sensors S1_4, S1_9, and S1_14. The measurement result A5 is “2” that is the result obtained by adding the detection results “2, 0, 0” by the sensors S1_5, S1_10, and S1_15. Namely, a combination of the measurement results A1 to A5 is “3, 2, 1, 1, 2”.
On the basis of the combination “3, 2, 1, 1, 2” of the measurement results A1 to A5, the analysis circuit 12 can determine that there is a high possibility that the detection target T1 is positioned directly above the sensor S1_6.
Namely, by using the measurement circuits 11_1 to 11_5 the number of which is small, the semiconductor device 50 can specify the candidate of the position of the detection target T1 in a short time without increasing the circuit scale.
However, in the configuration of the semiconductor device 50, a combination of the measurement results A1 to A5 in the case where the detection target T1 is positioned directly above the sensor S1_11 becomes the same as that of the measurement results A1 to A5 in the case where the detection target T1 is positioned directly above the sensor S1_6.
Specifically, in the case where the detection target T1 is positioned directly above the sensor S1_11, the value of the detection signal of the sensor S1_11 is “3”, the value of the detection signal of each of the sensors S1_10 and S1_12 is “2”, the value of the detection signal of each of the sensors S1_9 and S1_13 is “1”, and the value of the detection signal of each of the other sensors is “0”.
At this time, the measurement result A1 is “3” that is the result obtained by adding the detection results “0, 0, 3” by the sensors S1_1, S1_6, and S1_11. The measurement result A2 is “2” that is the result obtained by adding the detection results “0, 0, 2” by the sensors S1_2, S1_7, and S1_12. The measurement result A3 is “1” that is the result obtained by adding the detection results “0, 0, 1” by the sensors S1_3, S1_8, and S1_13. The measurement result A4 is “1” that is the result obtained by adding the detection results “0, 1, 0” by the sensors S1_4, S1_9, and S1_14. The measurement result A5 is “2” that is the result obtained by adding the detection results “0, 2, 0” by the sensors S1_5, S1_10, and S1_15. Namely, a combination of the measurement results A1 to A5 is “3, 2, 1, 1, 2”.
Therefore, there has been a problem that the analysis circuit 12 cannot specify whether the detection target T1 is positioned directly above the sensor S1_6 or the sensor S1_11 on the basis of the combination of “3, 2, 1, 1, 2” of the measurement results A1 to A5.
Accordingly, the inventors have found the semiconductor device 1 according to the first embodiment that can accurately specify the position of the detection target T1 in a short time without increasing the circuit scale by devising the coupling relations among the sensors S1_1 to S1_15 and the measurement circuits 11_1 to 11_5.
As shown in
The sensors S1_1 to S1_15 are electrostatic capacitance-type sensors that change the value of an electrostatic capacitance when the detection target T1 comes close thereto, and output a detection signal having intensity in accordance with a distance up to the detection target T1. It should be noted that the sensors S1_1 to S1_15 are not limited to electrostatic capacitance-type sensors, but may be sensors that output detection signals having intensity in accordance with the intensity of light or piezoelectric sensors that output detection signals having intensity in accordance with applied pressures.
The sensors S1_1 to S1_15 are arranged at predetermined intervals in the X-axis direction (for example, the row direction). Namely, the semiconductor device 1 detects the position of the detection target T1 in the X-axis direction using the sensors S1_1 to S1_15.
In the embodiment, a case in which the common detection target T1 is detected by up to five sensors will be described. For example, the detection signal having the strongest intensity is output by the closest sensor to the detection target T1, the detection signal having the second strongest intensity is output by the second closest two sensors (two sensors adjacent to the closest sensor to the detection target T1) to the detection target T1, and the detection signal having the third strongest intensity is output by the third closest two sensors to the detection target T1. No detection signals are output by the other remaining sensors (in other words, 0-level detection signals are output by the other remaining sensors).
In addition, a case in which one sensor group is configured using the continuously-arranged five sensors will be exemplified in the embodiment. Specifically, one sensor group is configured using the five sensors S1_1 to S1_5, one sensor group is configured using the five sensors S1_6 to S1_10, and one sensor group is configured using the five sensors S1_11 to S1_15.
As an example, the sensors S1_1 to S1_5 are coupled to the wires W1_1 to W1_5, respectively. The sensors S1_6 to S1_10 are coupled to the wires W1_1, W1_2, W1_3, W1_5, and W1_4, respectively. In addition, the sensors S1_11 to S1_15 are coupled to the wires W1_1, W1_2, W1_4, W1_3, and W1_5, respectively.
The measurement circuit 11_1 measures the added value of the detection signals of the sensors S1_1, S1_6, and S1_11 supplied to the wire W1_1, and outputs a measurement result A1. The measurement circuit 11_2 measures the added value of the detection signals of the sensors S1_2, S1_7, and S1_12 supplied to the wire W1_2, and outputs a measurement result A2. The measurement circuit 11_3 measures the added value of the detection signals of the sensors S1_3, S1_8, and S1_14 supplied to the wire W1_3, and outputs a measurement result A3. The measurement circuit 11_4 measures the added value of the detection signals of the sensors S1_4, S1_10, and S1_13 supplied to the wire W1_4, and outputs a measurement result A4. The measurement circuit 11_5 measures the added value of the detection signals of the sensors S1_5, S1_9, and S1_15 supplied to the wire W1_5, and outputs a measurement result A5.
Each of the measurement circuits 11_1 to 11_5 is configured using, for example, an amplification circuit or an AD converter. Here, all the measurement circuits 11_1 to 11_5 are configured to ideally perform the same operation. Specifically, the amplification circuit provided in each of the measurement circuits 11_1 to 11_5 is configured to ideally amplify the detection signal at the same amplification factor, and the AD converter provided in each of the measurement circuits 11_1 to 11_5 is configured to ideally AD-convert at the same resolution.
It should be noted that the detection signal having the strongest intensity is represented as a value “3”, the detection signal having the second strongest intensity is represented as a value “2”, and the detection signal having the third strongest intensity is represented as a value “1” in the example. In addition, the other detection signals are represented as a value “0”.
Thus, for example, in the case where the value of the detection signal of the sensor S1_1 is “0”, the value of the detection signal of the sensor S1_6 is “2”, and the value of the detection signal of the sensor S1_11 is “0”, the measurement circuit 11_1 outputs the added value “2” as the measurement result A1.
The analysis circuit 12 is, for example, a microcomputer, and analyzes the position of the detection target T1 in the X-axis direction on the basis of a combination of the measurement results A1 to A5 by the measurement circuits 11_1 to 11_5.
As shown in
At this time, the measurement result A1 is “3” that is the result obtained by adding the detection results “0, 3, 0” by the sensors S1_1, S1_6, and S1_11. The measurement result A2 is “2” that is the result obtained by adding the detection results “0, 2, 0” by the sensors S1_2, S1_7, and S1_12. The measurement result A3 is “1” that is the result obtained by adding the detection results “0, 1, 0” by the sensors S1_3, S1_8, and S1_14. The measurement result A4 is “1” that is the result obtained by adding the detection results “1, 0, 0” by the sensors S1_4, S1_10, and S1_13. The measurement result A5 is “2” that is the result obtained by adding the detection results “2, 0, 0” by the sensors S1_5, S1_9, and S1_15. Namely, a combination of the measurement results A1 to A5 is “3, 2, 1, 1, 2”.
On the contrary, in the case where the detection target T1 is positioned directly above the sensor S1_11, the value of the detection signal of the sensor S1_11 is “3”, the value of the detection signal of each of the sensors S1_10 and S1_12 is “2”, the value of the detection signal of each of the sensors S1_9 and S1_13 is “1”, and the value of the detection signal of each of the other sensors is “0”.
At this time, the measurement result A1 is “3” that is the result obtained by adding the detection results “0, 0, 3” by the sensors S1_1, S1_6, and S1_11. The measurement result A2 is “2” that is the result obtained by adding the detection results “0, 0, 2” by the sensors S1_2, S1_7, and S1_12. The measurement result A3 is “0” that is the result obtained by adding the detection results “0, 0, 0” by the sensors S1_3, S1_8, and S1_14. The measurement result A4 is “3” that is the result obtained by adding the detection results “0, 2, 1” by the sensors S1_4, S1_10, and S1_13. The measurement result A5 is “1” that is the result obtained by adding the detection results “0, 1, 0” by the sensors S1_5, S1_9, and S1_15. Namely, a combination of the measurement results A1 to A5 is “3, 2, 0, 3, 1”.
As described above, unlike the case of the semiconductor device 50, for example, the combination of the measurement results A1 to A5 in the case where the detection target T1 is positioned directly above the sensor S1_6 is different from that in the case where the detection target T1 is positioned directly above the sensor S1_11 in the configuration of the semiconductor device 1. All the combinations, including the above, of the measurement results A1 to A5 in accordance with the position of the detection target T1 are different from each other. Namely, the coupling relations among the sensors S1_1 to S1_15 and the measurement circuits 11_1 to 11_5 are set in the semiconductor device 1 so that all the combinations of the measurement results A1 to A5 in accordance with the position of the detection target T1 are different from each other. Accordingly, the semiconductor device 1 can accurately detect the position of the detection target T1 in a short time without increasing the circuit scale. In addition, an increase in power consumption can be accordingly suppressed.
In addition, in the case where the sensors S1_1 to S1_15 are provided outside a chip of the semiconductor device 1, it is only necessary to couple the sensors S1_1 to S1_15 and the measurement circuits 11_1 to 11_5 to each other through five lines. Thus, the number of external coupling terminals provided on the chip can be reduced.
Next, a setting method of the coupling relations among the sensors S1_1 to S1_15 and the measurement circuits 11_1 to 11_5 will be described.
As shown in
For example, the input pattern in the case where the detection target T1 is positioned directly above the sensor S1_1 is defined as “3, 2, 1, 0, 0, 0, 0, 0, 0, 0, 0, 0”. The input pattern in the case where the detection target T1 is positioned directly above the sensor S1_2 is defined as “2, 3, 2, 1, 0, 0, 0, 0, 0, 0, 0, 0”. By defining as described above, the input patterns (16 input patterns in the example) from a case in which the detection target T1 is positioned directly above the sensor S1_1 to a case in which the detection target T1 is positioned directly above the sensor S1_15 are defined. It should be noted that the detail of each input pattern is shown in
Thereafter, all the coupling patterns (connection routes) among the sensors S1_1 to S1_15 and the measurement circuits 11_1 to 11_5 are extracted (Step S102). However, five sensors belonging to a common sensor group are coupled to the measurement circuits that are different from each other.
Thereafter, one of the extracted coupling patterns is selected (Step S103). In addition, one of the input patterns is selected (Step S104). Then, the measurement results A1 to A5 corresponding to the input patterns (the detection results by the sensors S1_1 to S1_15) being selected in the case where the sensors S1_1 to S1_15 and the measurement circuits 11_1 to 11_5 are coupled to each other using the coupling patterns being selected are calculated (Step S105).
In the case where calculation of all the measurement results A1 to A5 for all the input patterns has not been completed (NO in Step S106), the input pattern that has not been selected yet is selected (Step S104). Then, the measurement results A1 to A5 corresponding to the input patterns (the detection results by the sensors S1_1 to S1_15) being selected in the case where the sensors S1_1 to S1_15 and the measurement circuits 11_1 to 11_5 are coupled to each other using the coupling patterns being selected are calculated (Step S105).
In the case where all the measurement results A1 to A5 for all the input patterns have been calculated (YES in Step S106), it is next determined whether or not duplicated combinations are present among those of the measurement results A1 to A5 (Step S107).
For example, in the case where duplicated combinations are present among those of the measurement results A1 to A5 (YES in Step S107), it is determined that the coupling pattern being selected is not suitable for the semiconductor device 1.
On the contrary, in the case where duplicated combinations are not present among those of the measurement results A1 to A5 (NO in Step S107), information of the coupling pattern being selected is output as information of the coupling pattern that is applicable to the semiconductor device 1 (Step S108).
Thereafter, it is determined whether or not selection of all the coupling patterns has been completed (Step S109). In the case where selection of all the coupling patterns has not been completed (NO in Step S109), the coupling pattern that has not been selected yet is selected (Step S103). Thereafter, the processes of Steps S104 to S109 are executed. Then, when selection of all the coupling patterns has been completed (YES in Step S109), the extraction of the candidates of the coupling patterns is finished. Here, the coupling relations among the sensors S1_1 to S1_15 and the measurement circuits 11_1 to 11_5 are set on the basis of the information of any one of the coupling patterns output from, for example, a control circuit (that is not shown in the drawing, but corresponds to the coupling relation setting processor 13).
As shown in
A case in which the semiconductor device 1 includes 15 sensors has been described in the embodiment, but the present invention is not limited to this. The semiconductor device 1 can be appropriately changed to a configuration in which the sensors the arbitrary number of which is larger than that of the measurement circuits are provided.
In addition, a case in which the common detection target T1 is detected by up to five sensors has been described in the embodiment, but the present invention is not limited to this. The common detection target T1 may be detected by an arbitrary number of sensors. For example, the common detection target T1 may be detected by up to three or seven sensors.
In addition, a case in which the semiconductor device 1 includes five measurement circuits has been described as an example in the embodiment, but the present invention is not limited to this. The semiconductor device 1 can be appropriately changed to a configuration in which an arbitrary number (two or more) of measurement circuits are provided. It should be noted that the number of sensors belonging to a common sensor group is the same as that of measurement circuits.
Further, a case in which the detection signal having the strongest intensity is represented as the value “3”, the detection signal having the second strongest intensity is represented as the value “2”, the detection signal having the third strongest intensity is represented as the value “1” and the other detection signals are represented as the value “0” has been described as an example in the embodiment, but the present invention is not limited to this. An arbitrary value may be set in accordance with the intensity of the detection signal.
It should be noted that the coupling relation setting processor 13 used in the semiconductor device 1 can be realized using, for example, a general computer system. Hereinafter, the coupling relation setting processor 13 will be briefly described using
The HDD 105 stores an OS (Operating System) (not shown) and a coupling relation setting process program 106. The coupling relation setting process program 106 is a computer program in which a coupling relation setting process according to the embodiment is implemented.
The CPU 101 controls various processes in the computer 100 and access to the RAM 102, the ROM 103, the IF 104, and the HDD 105. The computer 100 allows the CPU 101 to read and execute the OS and the coupling relation setting process program 106 stored in the HDD 105. Accordingly, the computer 100 realizes the coupling relation setting processor 13 according to the embodiment.
As shown in
The sensors S1_1 to S1_15 are installed in the 15 houses H1 to H15, respectively. For example, the detection signal having the strongest intensity is output by the sensor S1_6 installed in the house H6 where a fire has occurred, the detection signal having the second strongest intensity is output by the sensors S1_5 and S1_7 installed in the houses H5 and H7, respectively, adjacent to the house H6, and the detection signal having the third strongest intensity is output by the sensors S1_4 and S1_8 installed in the houses H4 and H8, respectively, adjacent to the houses H5 and H7. No detection signals are output by the other remaining sensors (in other words, 0-level detection signals are output by the other remaining sensors). The other configurations and operations of the semiconductor device 1 have been described above, and thus will be omitted.
The fire detection system SYS1 can accurately detect a house where a fire has occurred in a short time while suppressing the circuit scale from increasing by using a small number of measurement circuits 11_1 to 11_5.
As shown in
As similar to the case of the sensors S1_1 to S1_15, the sensors S2_1 to S2_15 are electrostatic capacitance-type sensors that change the value of an electrostatic capacitance when the detection target T1 comes close thereto, and output a detection signal having intensity in accordance with a distance up to the detection target T1. It should be noted that the sensors S1_1 to S1_15 are not limited to electrostatic capacitance-type sensors, but may be sensors that output detection signals having intensity in accordance with the intensity of light or piezoelectric sensors that output detection signals having intensity in accordance with applied pressures.
The sensors S1_1 to S1_15 are provided while extending in the Y-axis direction (for example, the column direction), and are arranged at predetermined intervals in the X-axis direction (for example, the row direction). The sensors S2_1 to S2_15 are provided while extending in the X-axis direction (for example, the row direction), and are arranged at predetermined intervals in the Y-axis direction (for example, the column direction). Namely, the sensors S1_1 to S1_15 and the sensors S2_1 to S2_15 are provided while being orthogonal to each other.
Accordingly, the semiconductor device 2 can detect the position of the detection target T1 in the X-axis direction using the sensors S1_1 to S1_15, and can detect the position of the detection target T1 in the Y-axis direction using the sensors S2_1 to S2_15.
A setting method of the coupling relations among the sensors S2_1 to S2_15 and the measurement circuits 21_1 to 21_5 is the same as that of the coupling relations among the sensors S1_1 to S1_15 and the measurement circuits 11_1 to 11_5.
As an example, the sensors S2_1 to S2_5 are coupled to the wires W2_1 to W2_5, respectively. The sensors S2_6 to S2_10 are coupled to the wires W2_1, W2_2, W2_3, W2_5, and W2_4, respectively. In addition, the sensors S2_11 to S2_15 are coupled to the wires W2_1, W2_2, W2_4, W2_3, and W2_5, respectively.
The measurement circuit 21_1 measures the added value of the detection signals of the sensors S2_1, S2_6, and S2_11 supplied to the wire W2_1, and outputs a measurement result B1. The measurement circuit 21_2 measures the added value of the detection signals of the sensors S2_2, S2_7, and S2_12 supplied to the wire W2_2, and outputs a measurement result B2. The measurement circuit 21_3 measures the added value of the detection signals of the sensors S2_3, S2_8, and S2_14 supplied to the wire W2_3, and outputs a measurement result B3. The measurement circuit 21_4 measures the added value of the detection signals of the sensors S2_4, S2_10, and S2_13 supplied to the wire W2_4, and outputs a measurement result 4. The measurement circuit 21_5 measures the added value of the detection signals of the sensors S2_5, S2_9, and S2_15 supplied to the wire W2_5, and outputs a measurement result B5. The configuration of each of the measurement circuits 21_1 to 21_5 is the same as the case of the measurement circuits 11_1 to 11_5, and thus the explanation thereof will be omitted.
The analysis circuit 22 is, for example, a microcomputer, and analyzes the position of the detection target T1 in the Y-axis direction on the basis of a combination of the measurement results B1 to B5 by the measurement circuits 21_1 to 21_5.
For example, in the case where the detection target T1 is positioned directly above the sensor S2_6, the combination of the measurement results B1 to B5 is “3, 2, 1, 1, 2”. On the contrary, in the case where the detection target T1 is positioned directly above the sensor S2_11, the combination of the measurement results B1 to B5 is “3, 2, 0, 3, 1”.
Namely, unlike the case of the semiconductor device 50, for example, the combination of the measurement results B1 to B5 in the case where the detection target T1 is positioned directly above the sensor S2_6 is different from that in the case where the detection target T1 is positioned directly above the sensor S2_11 in the configuration of the semiconductor device 2. All the combinations, including the above, of the measurement results B1 to B5 in accordance with the position of the detection target T1 are different from each other.
The other configurations and operations of the semiconductor device 2 are the same as the case of the semiconductor device 1, and thus the explanation thereof will be omitted.
As described above, as similar to the case of the semiconductor device 1, the semiconductor device 2 can accurately detect the position of the detection target T1 in a short time while suppressing the circuit scale from the increasing. In particular, the semiconductor device 2 can detect not only the position of the detection target T1 in the X-axis direction, but also the position of the detection target T1 in the Y-axis direction.
The configuration of each of the sensors S3_1 to S3_15 and the measurement circuits 31_1 to 31_5 is the same as the case of the sensors S1_1 to S1_15 and the measurement circuits 11_1 to 11_5, and thus the explanation thereof will be omitted. In addition, a setting method of the coupling relations among the sensors S3_1 to S3_15 and the measurement circuits 31_1 to 31_5 is the same as that of the coupling relations among the sensors S1_1 to S1_15 and the measurement circuits 11_1 to 11_5, and thus the explanation thereof will be omitted.
Here, the sensors S1_1 to S1_15 and the sensors S3_1 to S3_15 are alternately arranged along the X-axis direction by each sensor group having five sensors. Accordingly, the semiconductor device 3 can easily make all the combinations of the measurement results A1 to A5 in accordance with the position of the detection target T1 different from each other as compared to the case of the semiconductor device 1.
As described above, in the semiconductor devices 1 to 3 according to the first to third embodiments, the coupling relations among the sensors S1_1 to S1_15 and the measurement circuits 11_1 to 11_5 are set so that all the combinations of the measurement results A1 to A5 (B1 to B5) in accordance with the position of the detection target T1 differ from each other. Accordingly, each of the semiconductor devices 1 to 3 according to the first to third embodiments can accurately detect the position of the detection target T1 in a short time without increasing the circuit scale. In addition, an increase in power consumption can be accordingly suppressed.
The invention achieved by the inventors has been concretely described above on the basis of the embodiments. However, it is obvious that the present invention is not limited to the above-described embodiments, and can be variously changed without departing from the scope thereof.
In each of the first to third embodiments, for example, a case in which the coupling relations among the sensors S1_1 to S1_15 and the measurement circuits 11_1 to 11_5 are set so that all the combinations of the measurement results A1 to A5 in accordance with the position of the detection target T1 differ from each other has been described, but the present invention is not limited to this. It is possible to improve the accuracy of detecting the position of the detection target T1 only by reducing the number of duplicated combinations among all the combinations of the measurement results A1 to A5 in accordance with the position of the detection target T1 as compared to a case in which no countermeasures are taken.
Number | Date | Country | Kind |
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2018-067237 | Mar 2018 | JP | national |