BRIEF DESCRIPTION OF DRAWINGS
FIG. 1 is a diagram showing a structure of a semiconductor device in Embodiment Mode 1.
FIG. 2 is a diagram showing a structure of a semiconductor device in Embodiment Mode 1.
FIGS. 3A to 3E are views showing a structure of a semiconductor device in Embodiment Mode 1.
FIGS. 4A and 4B are diagrams showing a structure of a semiconductor device in Embodiment Mode 1.
FIG. 5 is a view showing a structure of a semiconductor device in Embodiment Mode 1.
FIG. 6 is a diagram showing a structure of a semiconductor device in Embodiment Mode 1.
FIGS. 7A and 7B are views showing a structure of a semiconductor device in Embodiment Mode 1.
FIGS. 8A and 8B are views each showing a structure of a semiconductor device in Embodiment Mode 1.
FIGS. 9A to 9E are views showing a structure of a semiconductor device in Embodiment Mode 1.
FIGS. 10A to 10C are diagrams showing a structure of a semiconductor device in Embodiment Mode 1.
FIG. 11 is a view showing a structure of a semiconductor device in Embodiment Mode 1.
FIGS. 12A and 12B are each views showing a structure of a semiconductor device in Embodiment Mode 1.
FIGS. 13A and 13B are views each showing a structure of a semiconductor device in Embodiment Mode 1.
FIG. 14 is a diagram showing a structure of a semiconductor device in Embodiment Mode 2.
FIG. 15 is a diagram showing a structure of a semiconductor device in Embodiment Mode 2.
FIGS. 16A and 16B are views showing a structure of a semiconductor device in Embodiment Mode 2.
FIGS. 17A to 17D are views showing a structure of a semiconductor device in Embodiment Mode 3.
FIGS. 18A to 18C are views showing a structure of a semiconductor device in Embodiment Mode 3.
FIGS. 19A and 19B are views showing a structure of a semiconductor device in Embodiment Mode 3.
FIGS. 20A and 20B are views showing a structure of a semiconductor device in Embodiment Mode 3.
FIGS. 21A and 21B are views showing a structure of a semiconductor device in Embodiment Mode 3.
FIGS. 22A to 22D are views showing a structure of a semiconductor device in Embodiment Mode 4.
FIGS. 23A and 23B are views showing a structure of a semiconductor device in Embodiment Mode 4.
FIGS. 24A and 24B are a view showing a structure of a semiconductor device in Embodiment Mode 4.
FIG. 25 is a view showing a structure of a semiconductor device in Embodiment Mode 4.
FIGS. 26A and 26B are views showing a structure of a semiconductor device in Embodiment Mode 4.
FIG. 27 is a view showing a structure of a semiconductor device in Embodiment Mode 4.
FIGS. 28A to 28E are views showing Embodiment 1.
FIG. 29 is a diagram showing a conventional structure.
FIG. 30 is a diagram showing a conventional structure.