Patent Application
20250015189
An embodiment of the present invention relates to a semiconductor device. In particular, an embodiment of the present invention relates to a semiconductor device using an oxide semiconductor as a channel.
In recent years, instead of a silicon semiconductor layer using amorphous silicon, low-temperature polysilicon, and single-crystal silicon, a semiconductor device in which an oxide semiconductor layer is used for a channel has been developed (for example, see Japanese laid-open patent publication Nos. 2021-141338, 2014-099601, 2021-153196, 2018-006730, 2016-184771, and 2021-108405). The semiconductor device including an oxide semiconductor layer can be fabricated with a simple structure and low-temperature process, similar to a semiconductor device including an amorphous silicon layer. Further, the semiconductor device including an oxide semiconductor layer is known to have higher mobility than the semiconductor device including an amorphous silicon layer.
It is essential to supply oxygen to an oxide semiconductor layer in the manufacturing process and to reduce the oxygen deficiencies formed in the oxide semiconductor layer in order for the semiconductor device in which the oxide semiconductor is used for the channel to perform a stable operation. For example, a technique of forming an insulating layer covering the oxide semiconductor layer under the condition that the insulating layer contains more oxygen is disclosed as one method of supplying oxygen to the oxide semiconductor layer.
A semiconductor device according to an embodiment of the present invention includes a metal oxide layer over an insulating surface, an oxide semiconductor layer over the metal oxide layer, and an insulating layer over the oxide semiconductor. The insulating layer includes a first region overlapping the oxide semiconductor layer. A first aluminum concentration of the first region is greater than or equal to 1×1017 atoms/cm3.
An insulating layer formed with more oxygen-containing conditions contains more defects. As a result, abnormal characteristics of the semiconductor device or a variation in characteristics in a reliability test occur, which are considered to be caused by electrons becoming trapped in the defect. On the other hand, when an insulating layer with fewer defects is used, oxygen in the insulating layer cannot be increased. Therefore, sufficient oxygen cannot be supplied from the insulating layer to the oxide semiconductor layer. As described above, there is a demand for realizing a structure capable of repairing oxygen deficiencies formed in the oxide semiconductor layer while reducing defects in the insulating layer that cause the variation in characteristics of the semiconductor device.
Further, it is well-known that a semiconductor device with high mobility can be obtained by relatively increasing a ratio of indium contained in the oxide semiconductor layer. However, when the ratio of indium contained in the oxide semiconductor layer is high, oxygen deficiencies are likely to be formed in the oxide semiconductor layer. Therefore, in order to realize high mobility while maintaining high reliability, it is necessary to devise a configuration of the insulating layer around the oxide semiconductor layer.
An embodiment of the present invention can provide a semiconductor device with high mobility and high reliability.
Hereinafter, embodiments of the present invention are described with reference to the drawings. The following invention is merely an example. A configuration that can be easily conceived by a person skilled in the art by appropriately changing the configuration of the embodiment while keeping the gist of the invention is naturally included in the scope of the present invention. In order to make the description clearer, the drawings may schematically show the widths, thicknesses, shapes, and the like of components in comparison with the actual embodiments. However, the illustrated shapes are merely examples, and do not limit the interpretation of the present invention. In the present specification and the drawings, the same reference signs are given to components similar to those described previously with respect to the above-described drawings, and detailed description thereof may be omitted as appropriate.
In the present specification and the like, a direction from a substrate toward an oxide semiconductor layer is referred to as “on” or “over” in each embodiment of the present invention. Conversely, a direction from the oxide semiconductor layer to the substrate is referred to as “under” or “below.” For convenience of explanation, the phrase “over” or “below” is used for description, but for example, the substrate and the oxide semiconductor layer may be arranged so that the vertical relationship is reversed from that shown in the drawings. Further, the expression “an oxide semiconductor layer on a substrate” merely describes the vertical relationship between the substrate and the oxide semiconductor layer as described above, and another member may be arranged between the substrate and the oxide semiconductor layer. The terms “over” or “below” mean a stacking order in which a plurality of layers is stacked, and may have a positional relationship in which a semiconductor device and a pixel electrode do not overlap in a plan view when expressed as “a pixel electrode over a semiconductor device.” On the other hand, the expression “a pixel electrode vertically over a semiconductor device” means a positional relationship in which the semiconductor device and the pixel electrode overlap in a plan view. In addition, a plan view refers to viewing from a direction perpendicular to a surface of the substrate.
In the present specification and the like, a “display device” refers to a structure that displays an image using an electro-optic layer. For example, the term “display device” may refer to a display panel that includes the electro-optic layer, or may refer to a structure with other optical members (for example, a polarized member, a backlight, a touch panel, and the like) attached to a display cell. The “electro-optic layer” may include a liquid crystal layer, an electroluminescent (EL) layer, an electrochromic (EC) layer, or an electrophoretic layer, as long as there is no technical contradiction. Therefore, although a liquid crystal display device including a liquid crystal layer and an organic EL display device including an organic EL layer are exemplified as a display device in the following embodiments, the structure according to the present embodiment can be applied to a display device including the other electro-optic layers described above.
In the present specification and the like, the expression “a includes A, B, or C,” “a includes any of A, B, or C,” “a includes one selected from a group consisting of A, B and C,” and the like does not exclude the case where a includes a plurality of combinations of A to C unless otherwise specified. Further, these expressions do not exclude the case where a includes other components.
In addition, the following embodiments can be combined with each other as long as there is no technical contradiction.
A semiconductor device 10 according to an embodiment of the present invention is described with reference to
A configuration of the semiconductor device 10 according to an embodiment of the present invention is described with reference to
As shown in
The gate electrode 105 is provided over the substrate 100. The gate insulating layer 110 and the gate insulating layer 120 are provided over the substrate 100 and the gate electrode 105. The metal oxide layer 130 is provided over the gate insulating layer 120. The metal oxide layer 130 is in contact with the gate insulating layer 120. The oxide semiconductor layer 140 is provided over the metal oxide layer 130. The oxide semiconductor layer 140 is in contact with the metal oxide layer 130. In main surfaces of the oxide semiconductor layer 140, a surface in contact with the metal oxide layer 130 is referred to as a lower surface 142. An end portion of the metal oxide layer 130 is substantially aligned with an end portion of the oxide semiconductor layer 140.
In the present embodiment, no semiconductor layer or oxide semiconductor layer is provided between the metal oxide layer 130 and the substrate 100.
In the present embodiment, although a configuration in which the metal oxide layer 130 is in contact with the gate insulating layer 120 and the oxide semiconductor layer 140 is in contact with the metal oxide layer 130 is exemplified, the configuration is not limited thereto. Other layers may be provided between the gate insulating layer 120 and the metal oxide layer 130. Other layers may be provided between the metal oxide layer 130 and the oxide semiconductor layer 140.
In
The gate electrode 160 faces the oxide semiconductor layer 140. The gate insulating layer 150 is provided between the oxide semiconductor layer 140 and the gate electrode 160. The gate insulating layer 150 is in contact with the oxide semiconductor layer 140. In the main surfaces of the oxide semiconductor layer 140, a surface in contact with the gate insulating layer 150 is referred to as an upper surface 141. A surface between the upper surface 141 and the lower surface 142 is referred to as a side surface 143. The insulating layers 170 and 180 are provided over the gate insulating layer 150 and the gate electrode 160. Openings 171 and 173 that reach the oxide semiconductor layer 140 are provided in the insulating layers 170 and 180. The source electrode 201 is provided inside the opening 171. The source electrode 201 is in contact with the oxide semiconductor layer 140 at the bottom of the opening 171. The drain electrode 203 is provided inside the opening 173. The drain electrode 203 is in contact with the oxide semiconductor layer 140 at the bottom of the opening 173.
The gate electrode 105 has a function as a bottom-gate of the semiconductor device 10 and a function as a light-shielding film for the oxide semiconductor layer 140. The gate insulating layer 110 has a function as a barrier film for shielding impurities that diffuse from the substrate 100 toward the oxide semiconductor layer 140. The gate insulating layers 110 and 120 have a function as a gate insulating layer for the bottom-gate. The metal oxide layer 130 is a layer that contains a metal oxide containing aluminum as the main component, and has a function as a gas barrier film for shielding a gas such as oxygen or hydrogen.
The oxide semiconductor layer 140 is divided into a source region S, a drain region D, and a channel region CH. The channel region CH is a region of the oxide semiconductor layer 140 vertically below the gate electrode 160. The source region S is a region of the oxide semiconductor layer 140 that does not overlap the gate electrode 160 and is closer to the source electrode 201 than the channel region CH. The drain region D is a region of the oxide semiconductor layer 140 that does not overlap the gate electrode 160 and is closer to the drain electrode 203 than the channel region CH. The channel region CH in the oxide semiconductor layer 140 has physical properties of a semiconductor. The source region S and the drain region D in the oxide semiconductor layer 140 have physical properties of a conductor.
The gate electrode 160 has a function as a top-gate of the semiconductor device 10 and a light-shielding film for the oxide semiconductor layer 140. The gate insulating layer 150 has a function as a gate insulating layer for the top-gate, and has a function of releasing oxygen by a heat treatment in a manufacturing process. The insulating layers 170 and 180 insulate the gate electrode 160 and the source-drain electrode 200 and have a function of reducing parasitic capacitance therebetween. Operations of the semiconductor device 10 are controlled mainly by a voltage supplied to the gate electrode 160. An auxiliary voltage is supplied to the gate electrode 105. However, in the case of using the gate electrode 105 simply as a light-shielding film, a specific voltage is not supplied to the gate electrode 105, and the gate electrode 105 may be in a floating state. That is, the gate electrode 105 may simply be referred to as a “light-shielding film.”
In the present embodiment, although a configuration using a dual-gate transistor in which the gate electrode is provided both over and below the oxide semiconductor layer as the semiconductor device 10 is exemplified, the configuration is not limited thereto. For example, a bottom-gate transistor in which the gate electrode is provided only below the oxide semiconductor layer or a top-gate transistor in which the gate electrode is provided only over the oxide semiconductor layer may be used as the semiconductor device 10. The above configuration is merely one embodiment, and the present invention is not limited to the above configuration.
As shown in
In the present embodiment, although a configuration in which all of the lower surface 142 of the oxide semiconductor layer 140 is covered with the metal oxide layer 130 is exemplified, the present invention is not limited thereto. For example, a part of the lower surface 142 of the oxide semiconductor layer 140 may not be in contact with the metal oxide layer 130. For example, the whole of the lower surface 142 of the channel region CH in the oxide semiconductor layer 140 may be covered with the metal oxide layer 130, and the whole or parts of the lower surface 142 of the source region S and the drain region D in the oxide semiconductor layer 140 may not be covered with the metal oxide layer 130. That is, the whole or parts of the lower surface 142 of the source region S and the drain region D in the oxide semiconductor layer 140 may not be in contact with the metal oxide layer 130. However, in the above configuration, a part of the lower surface 142 of the channel region CH in the oxide semiconductor layer 140 may not be covered with the metal oxide layer 130, and the other part of the lower surface 142 may be in contact with the metal oxide layer 130.
In the present embodiment, although the configuration in which the gate insulating layer 150 is formed on the entire surface and the openings 171 and 173 are provided in the gate insulating layer 150 is exemplified, the configuration is not limited thereto. The gate insulating layer 150 may be patterned. For example, the gate insulating layer 150 may be patterned to expose the whole or part of the source region S and the drain region D of the oxide semiconductor layer 140. That is, the gate insulating layer 150 on the source region S and the drain region D may be removed, and the source region S and the drain region D and the insulating layer 170 may be in contact with each other.
In
A rigid substrate having translucency, such as a glass substrate, a quartz substrate, a sapphire substrate, or the like, is used as the substrate 100. In the case where the substrate 100 needs to have flexibility, a substrate containing a resin such as a polyimide substrate, an acryl substrate, a siloxane substrate, or a fluororesin substrate is used as the substrate 100. In the case where the substrate containing a resin is used as the substrate 100, impurities may be introduced into the resin in order to improve the heat resistance of the substrate 100. In particular, in the case where the semiconductor device 10 is a top-emission display, since the substrate 100 does not need to be transparent, impurities that reduce the translucency of the substrate 100 may be used. In the case where the semiconductor device 10 is used for an integrated circuit that is not a display device, a substrate without translucency such as a semiconductor substrate such as a silicon substrate, a silicon carbide substrate, a compound semiconductor substrate, or a conductive substrate such as a stainless substrate is used as the substrate 100.
Common metal materials are used for the gate electrode 105, the gate electrode 160, and the source-drain electrode 200. For example, aluminum (Al), titanium (Ti), chromium (Cr), cobalt (Co), nickel (Ni), molybdenum (Mo), hafnium (Hf), tantalum (Ta), tungsten (W), bismuth (Bi), silver (Ag), copper (Cu), and alloys thereof or compounds thereof are used for the gate electrode 105, the gate electrode 160, and the source-drain electrode 200. The above-described materials may be used in a single layer or in a stacked layer for the gate electrode 105, the gate electrode 160, and the source-drain electrode 200.
In addition, the gate electrode 160 and the source/drain electrodes 200 may be made of the same metal material or different metal materials. For example, the gate electrode 160 may not contain aluminum, and the source-drain electrode 200 may contain aluminum.
Common insulating materials are used for the gate insulating layers 110 and 120 and the insulating layers 170 and 180. For example, inorganic insulating materials such as silicon oxide (SiOx), silicon oxynitride (SiOxNy), silicon nitride (SiNx), silicon nitride oxide (SiNxOy), aluminum oxide (AlOx), aluminum oxynitride (AlOxNy), aluminum nitride oxide (AlNxOy), and aluminum nitride (AlNx) are used for the gate insulating layers 110 and 120 and the insulating layers 170 and 180.
Silicon oxynitride (SiOxNy) and aluminum oxynitride (AlOxNy) are a silicon compound and an aluminum compound containing nitrogen (N) in a ratio (x>y) smaller than that of oxygen (O). Silicon nitride oxide (SiNxOy) and aluminum nitride oxide (AlNxOy) are a silicon compound and an aluminum compound containing oxygen (O) in a ratio (x>y) smaller than that of nitrogen (N).
Among the above-described inorganic insulating materials, the inorganic insulating material containing oxygen is used as the gate insulating layer 150. For example, an inorganic insulating material such as silicon oxide (SiOx), silicon oxynitride (SiOxNy), or the like is used for the gate insulating layer 150.
An insulating layer having a function of releasing oxygen by a heat treatment is used as the gate insulating layer 120. For example, the temperature of the heat treatment at which the gate insulating layer 120 releases oxygen is less than or equal to 600° C., less than or equal to 500° C., less than or equal to 450° C., or less than or equal to 400° C. That is, for example, in the case where the glass substrate is used as the substrate 100, the gate insulating layer 120 releases oxygen at the heat treatment temperature performed in the manufacturing process of the semiconductor device 10.
An insulating layer with few defects is used as the gate insulating layer 150. For example, when a composition ratio of oxygen in the gate insulating layer 150 is compared with a composition ratio of oxygen in an insulating layer (hereinafter referred to as “other insulating layer”) having a composition similar to that of the gate insulating layer 150, the composition ratio of oxygen in the gate insulating layer 150 is closer to the stoichiometric ratio with respect to the insulating layer than the composition ratio of oxygen in that other insulating layer. Specifically, in the case where silicon oxide (SiOx) is used for each of the gate insulating layer 150 and the insulating layer 180, the composition ratio of oxygen in the silicon oxide used as the gate insulating layer 150 is close to the stoichiometric ratio of silicon oxide as compared with the composition ratio of oxygen in the silicon oxide used as the insulating layer 180. For example, a layer in which no defects are observed when evaluated by the electron-spin resonance (ESR) may be used as the gate insulating layer 150.
A metal oxide containing aluminum as the main component is used for the metal oxide layer 130 and a metal oxide layer 190 used in the manufacturing process as described later. For example, an inorganic insulating material such as aluminum oxide (AlOx), aluminum oxynitride (AlOxNy), or the like is used for the metal oxide layer 130 (or the metal oxide layer 190). The “metal oxide layer containing aluminum as the main component” means that the ratio of aluminum contained in the metal oxide layer 130 (or the metal oxide layer 190) is greater than or equal to 1% of the total amount of the metal oxide layer 130 (or the metal oxide layer 190). The ratio of aluminum contained in the metal oxide layer 130 (or the metal oxide layer 190) may be greater than or equal to 5% and less than or equal to 70%, greater than or equal to 10% and less than or equal to 60%, or greater than or equal to 30% and less than or equal to 50% of the total amount of the metal oxide layer 130. The above ratio may be a mass ratio or a weight ratio.
Although details are described later, when the metal oxide layer 190 is deposited on the gate insulating layer 150 and oxidation annealing is performed, aluminum contained in the metal oxide layer 190 is diffused into the gate insulating layer 150. As a result, in a region near the surface of the gate insulating layer 150 (near the surface on the opposite side to the oxide semiconductor layer 140), the diffused aluminum can be detected by, for example, a Secondary Ion Mass Spectrometry (SIMS) analysis. In the semiconductor device 10 manufactured by the manufacturing method described later, the aluminum concentration detected in a region less than or equal to 50 nm from the surface of the gate insulating layer 150 is preferably greater than or equal to 1×1017 atoms/cm3. Since the metal oxide layer 190 is removed in the manufacturing process, the semiconductor device 10 does not include the metal oxide layer 190. However, since aluminum diffused from the metal oxide layer 190 remains in the gate insulating layer 150, it can be assumed that the semiconductor device 10 is manufactured by the manufacturing method described below by measuring the aluminum concentration in the gate insulating layer 150. In particular, when the aluminum concentration in the gate insulating layer 150 is greater than or equal to 1×1017 atoms/cm3, it can be assumed that oxidation annealing using the metal oxide layer 190 is performed effectively.
Further, since aluminum remaining in the gate insulating layer 150 is not a main component, the aluminum concentration in the gate insulating layer 150 is approximately equal to an impurity concentration. That is, the aluminum concentration in the gate insulating layer 150 is, for example, less than or equal to 1×1021 atoms/cm3, preferably less than or equal to 1×1020 atoms/cm3, and more preferably less than or equal to 1×1019 atoms/cm3.
In addition, since aluminum remaining in the gate insulating layer 150 does not degrade the electrical characteristics and reliability, the semiconductor device 10 has high mobility and high reliability.
A metal oxide having semiconductor properties is used for the oxide semiconductor layer 140. For example, an oxide semiconductor containing two or more metal elements including indium (In) is used for the oxide semiconductor layer 140. In the oxide semiconductor layer 140, the ratio of indium to two or more metal elements is greater than or equal to 50%. Gallium (Ga), zinc (Zn), aluminum (Al), hafnium (Hf), yttrium (Y), zirconia (Zr), and lanthanoids are used as a metal element of the oxide semiconductor layer 140 in addition to indium. Metal elements other than those described above may be used for the oxide semiconductor layer 140.
The oxide semiconductor layer 140 may be amorphous or crystalline. The oxide semiconductor layer 140 may be a mixed phase of amorphous and crystalline. Oxygen deficiencies are likely to be formed in the oxide semiconductor layer 140 in which the ratio of indium is greater than or equal to 50%, as described below. Oxygen deficiencies are less likely to be formed in a crystalline oxide semiconductor as compared with an amorphous oxide semiconductor. Therefore, it is preferable that the oxide semiconductor layer 140 is crystalline.
In the case where the ratio of indium in the oxide semiconductor layer 140 is greater than or equal to 50%, the semiconductor device 10 with high mobility is realized. On the other hand, since the oxygen contained in the oxide semiconductor layer 140 is easily reduced in such an oxide semiconductor layer 140, oxygen deficiencies are easily formed in the oxide semiconductor layer 140.
In the semiconductor device 10, hydrogen is released from a layer (for example, the gate insulating layers 110 and 120) provided closer to the substrate 100 than the oxide semiconductor layer 140 in the heat treatment step of the manufacturing process. When hydrogen reaches the oxide semiconductor layer 140, oxygen deficiencies occur in the oxide semiconductor layer 140. The occurrence of the oxygen deficiencies is more pronounced as the pattern size of the oxide semiconductor layer 140 becomes larger. In order to suppress the occurrence of such oxygen deficiencies, it is necessary to suppress hydrogen from reaching the lower surface 142 of the oxide semiconductor layer 140. This is the first problem.
Apart from the above problem, there is the second problem shown below. The upper surface 141 of the oxide semiconductor layer 140 is affected by a process (for example, a patterning process or an etching process) after the oxide semiconductor layer 140 is formed. On the other hand, the lower surface 142 of the oxide semiconductor layer 140 (the surface of the oxide semiconductor layer 140 facing the substrate 100) is not affected as described above.
Therefore, there are more oxygen deficiencies formed close to the upper surface 141 of the oxide semiconductor layer 140 than the oxygen deficiencies formed close to the lower surface 142 of the oxide semiconductor layer 140. That is, the oxygen deficiencies in the oxide semiconductor layer 140 do not exist uniformly in a thickness direction of the oxide semiconductor layer 140, but exist in a non-uniform distribution in the thickness direction of the oxide semiconductor layer 140. Specifically, there are fewer oxygen deficiencies in the oxide semiconductor layer 140 on the side of the lower surface 142 of the oxide semiconductor layer 140 and more oxygen deficiencies on the side of the upper surface 141 of the oxide semiconductor layer 140.
In the case where an oxygen supplying treatment is uniformly performed on the oxide semiconductor layer 140 having the oxygen deficiency distribution as described above, oxygen is excessively supplied to the lower surface 142 of the oxide semiconductor layer 140 when supplying oxygen in an amount required to repair the oxygen deficiencies formed on the upper surface 141 of the oxide semiconductor layer 140. As a result, a defect level different from the oxygen deficiencies is formed on the lower surface 142 due to the excess oxygen. As a result, phenomenon such as variation in characteristics in the reliability test or a decrease in field-effect mobility occurs. Therefore, in order to suppress such phenomenon, it is necessary to supply oxygen to the upper surface 141 of the oxide semiconductor layer 140 while suppressing the oxygen supply to the lower surface 142 of the oxide semiconductor layer 140.
The above problems are newly recognized in the process of reaching the present invention but are not problems that have been conventionally recognized. In the conventional configuration and manufacturing method, there was a trade-off relationship between the initial characteristics and the reliability test, in which the variation in characteristics according to the reliability test occurs even when the initial characteristics of the semiconductor device are improved by the oxygen supply process to the oxide semiconductor layer. However, with the configuration according to the present embodiment, the above problems are solved, and it is possible to obtain good initial characteristics and a reliability test of the semiconductor device 10.
A method for manufacturing the semiconductor device 10 according to an embodiment of the present invention will be described with reference to
As shown in
When silicon nitride is used for the gate insulating layer 110, the gate insulating layer 110 can block impurities that diffuse, for example, from the substrate 100 toward the oxide semiconductor layer 140. The silicon oxide used for the gate insulating layer 120 is silicon oxide having a physical property of releasing oxygen by a heat treatment.
As shown in
For example, a thickness of the metal oxide layer 130 is greater than or equal to 1 nm and less than or equal to 100 nm, greater than or equal to 1 nm and less than or equal to 50 nm, greater than or equal to 1 nm and less than or equal to 30 nm, or greater than or equal to 1 nm and less than or equal to 10 nm. In the present embodiment, aluminum oxide is used for the metal oxide layer 130. Aluminum oxide has a high barrier property against gas. In the present embodiment, aluminum oxide used for the metal oxide layer 130 blocks hydrogen and oxygen released from the gate insulating layer 120, and suppresses the released hydrogen and oxygen from reaching the oxide semiconductor layer 140.
For example, a thickness of the oxide semiconductor layer 140 is greater than or equal to 10 nm and less than or equal to 100 nm, greater than or equal to 15 nm and less than or equal to 70 nm, or greater than or equal to 20 nm and less than or equal to 40 nm. In the present embodiment, an oxide containing indium (In) and gallium (Ga) is used for the oxide semiconductor layer 140. The oxide semiconductor layer 140 before the heat treatment (OS annealing) described later is amorphous.
When the oxide semiconductor layer 140 is crystallized by the OS annealing described later, it is preferable that the oxide semiconductor layer 140 after the deposition and before the OS annealing is in an amorphous state (a state in which there are less low crystalline components of the oxide semiconductor). That is, the deposition conditions of the oxide semiconductor layer 140 are preferred to be such that the oxide semiconductor layer 140 immediately after the deposition does not crystallize as much as possible. For example, in the case where the oxide semiconductor layer 140 is deposited by the sputtering method, the oxide semiconductor layer 140 is deposited in a state where the temperature of the object to be deposited (the substrate 100 and structures formed thereon) is controlled.
In the case where the deposition is performed on the object to be deposited by a sputtering method, ions generated in the plasma and atoms recoiled by a sputtering target collide with the object to be deposited. Thus, the temperature of the object to be deposited rises with the deposition process. When the temperature of the object to be deposited rises during the deposition process, microcrystals are included in the oxide semiconductor layer 140 immediately after the deposition process. The microcrystals inhibit crystallization by a subsequent OS annealing. For example, in order to control the temperature of the object to be deposited as described above, deposition may be performed while cooling the object to be deposited. For example, the object to be deposited may be cooled from a surface opposite to a deposited surface so that the temperature of the deposited surface of the object to be deposited (hereinafter, referred to as “deposition temperature”) is less than or equal to 100° C., less than or equal to 70° C., less than or equal to 50° C., or less than or equal to 30° C. As described above, when the oxide semiconductor layer 140 is deposited while cooling the object to be deposited, it is possible to deposit the oxide semiconductor layer 140 with few crystalline components in a state immediately after the deposition.
As shown in
A heat treatment (“OS Annealing” in step S2004 of
As shown in
As shown in
For example, a thickness of the metal oxide layer 190 is greater than or equal to 5 nm and less than or equal to 100 nm, greater than or equal to 5 nm and less than or equal to 50 nm, greater than or equal to 5 nm and less than or equal to 30 nm, or greater than or equal to 7 nm and less than or equal to 15 nm. In the present embodiment, aluminum oxide is used for the metal oxide layer 190. Aluminum oxide has a high barrier property against gas. In the present embodiment, aluminum oxide used for the metal oxide layer 190 suppresses the oxygen implanted into the gate insulating layer 150 at the time of the deposition of the metal oxide layer 190 from diffusing outward.
For example, in the case where the metal oxide layer 190 is deposited by a sputtering method, a process gas used in the sputtering method remains in the metal oxide layer 190. For example, in the case where Ar is used as the process gas for the sputtering method, Ar may remain in the metal oxide layer 190. The remaining Ar can be detected by a SIMS analysis on the metal oxide layer 190.
A heat treatment for supplying oxygen to the oxide semiconductor layer 140 is performed in a state where the gate insulating layer 150 is deposited on the oxide semiconductor layer 140 and the metal oxide layer 190 is deposited on the gate insulating layer 150 (“Oxidation Annealing” in step S2008 of
Oxygen released from the gate insulating layer 120 by the oxidation annealing is blocked by the metal oxide layer 130. Therefore, oxygen is less likely to be supplied to the lower surface 142 of the oxide semiconductor layer 140. The oxygen released from the gate insulating layer 120 diffuses from a region where the metal oxide layer 130 is not formed to the gate insulating layer 150 arranged on the gate insulating layer 120 and reaches the oxide semiconductor layer 140 through the gate insulating layer 150. As a result, the oxygen released from the gate insulating layer 120 is less likely to be supplied to the lower surface 142 of the oxide semiconductor layer 140, and is mainly supplied to the side surface 143 and the upper surface 141 of the oxide semiconductor layer 140. Further, the oxidation annealing makes it possible to supply oxygen released from the gate insulating layer 150 to the upper surface 141 and the side surface 143 of the oxide semiconductor layer 140. Although the oxidation annealing may release hydrogen from the gate insulating layers 110 and 120, the released hydrogen is blocked by the metal oxide layer 130.
As described above, in the oxidation annealing, it is possible to supply oxygen to the upper surface 141 and the side surface 143 of the oxide semiconductor layer 140 having a large amount of oxygen deficiencies while suppressing the supply of oxygen to the lower surface 142 of the oxide semiconductor layer 140 having a small amount of oxygen deficiencies.
Similarly, in the oxidation annealing described above, the oxygen implanted in the gate insulating layer 150 is blocked by the metal oxide layer 190. Therefore, the oxygen is suppressed from being released to the atmosphere. As a result, oxygen is efficiently supplied to the oxide semiconductor layer 140 by the oxidation annealing, and the oxygen deficiencies are repaired.
As shown in
When the oxidation annealing is performed, aluminum contained in the metal oxide layer 190 is diffused into the gate insulating layer 150. Therefore, even when the metal oxide layer 190 is removed, aluminum diffused from the metal oxide layer 190 remains in the gate insulating layer 150.
As shown in
When the gate electrode 160 is etched, a part of the gate insulating layer 150 may also be etched. That is, the gate insulating layer 150 includes regions having different thicknesses. Specifically, the gate insulating layer 150 includes a first region overlapping the gate electrode 160 and a second region not overlapping the gate electrode 160. The first region overlaps the channel region CH of the oxide semiconductor layer 140. The second region overlaps the source region S or the drain region D of the oxide semiconductor layer 140. The thickness of the second region is smaller than the thickness of the first region. In this case, since a part of the region containing aluminum diffused from the metal oxide layer 190 is etched in the second region, the aluminum concentration of the second region is smaller than the aluminum concentration of the first region even when the aluminum concentration of the first region is greater than or equal to 1×1017 atoms/cm3.
Resistances of the source region S and the drain region D of the oxide semiconductor layer 140 are reduced (“Reducing Resistance of SD” in step S2011 of
As shown in
As shown in
With respect to the semiconductor device 10 manufactured by the above-described manufacturing method, it is possible to obtain electrical characteristics having a mobility greater than or equal to 50 cm2/Vs, greater than or equal to 55 cm2/Vs, or greater than or equal to 60 cm2/Vs in a range where the channel length L of the channel region CH is greater than or equal to 2 μm and less than or equal to 4 μm and the channel width of the channel region CH is greater than or equal to 2 μm and less than or equal to 25 μm. The mobility in the present embodiment is the field-effect mobility in a saturation region in the electrical characteristics of the semiconductor device 10. Specifically, the mobility means the maximum value of the field-effect mobility in a region where a potential difference (Vd) between the source electrode and the drain electrode is greater than a value (Vg−Vth) obtained by subtracting a threshold-voltage (Vth) of the semiconductor device 10 from a voltage (Vg) supplied to the gate electrode.
A display device 20 using a semiconductor device 10 according to an embodiment of the present invention is described with reference to
A sealing region 24 where the sealing portion 310 is provided is a region surrounding the liquid crystal region 22. The FPC 330 is provided in a terminal region 26. The terminal region 26 is a region where the array substrate 300 is exposed from the counter substrate 320 and is provided outside the sealing region 24. The outside of the sealing region 24 means the outside of the region where the sealing portion 310 is provided and the region surrounded by the sealing portion 310. The IC chip 340 is provided on the FPC 330. The IC chip 340 supplies a signal for driving each pixel circuit 301.
A source wiring 304 extends from the source driver circuit 302 in the direction D1 and is connected to the plurality of pixel circuits 301 arranged in the direction D1. A gate wiring 305 extends from the gate driver circuit 303 in the direction D2 and is connected to the plurality of pixel circuits 301 arranged in the direction D2.
A terminal portion 306 is provided in the terminal region 26. The terminal portion 306 and the source driver circuit 302 are connected to each other by a connection wiring 307. Similarly, the terminal portion 306 and the gate driver circuit 303 are connected to each other by the connection wiring 307. By connecting the FPC 330 to the terminal portion 306, an external device which is connected to the FPC 330 and the display device 20 are connected to each other, and a signal from the external device drives each pixel circuit 301 arranged in the display device 20.
The semiconductor device 10 shown in the First Embodiment is used as a transistor included in the pixel circuit 301, the source driver circuit 302, and the gate driver circuit 303.
An insulating layer 360 is provided on the source electrode 201 and the drain electrode 203. A common electrode 370 provided in common for the plurality of pixels is provided on the insulating layer 360. An insulating layer 380 is provided on the common electrode 370. An opening 381 is provided in the insulating layers 360 and 380. A pixel electrode 390 is provided on the insulating layer 380 and inside the opening 381. The pixel electrode 390 is connected to the drain electrode 203.
In the display device 20, a wiring layer 162 is provided in the same layer as the gate electrode 160. The wiring layer 162 contains the same material as the gate electrode 160. The wiring layer 162 is provided on an insulating layer corresponding to the gate insulating layer 150. The metal oxide layer 190 is also deposited on the insulating layer, and the oxidation annealing is performed. Therefore, it is preferable that an aluminum concentration of the region of the insulating layer overlapping the wiring layer 162 is greater than or equal to 1×1017 atoms/cm3. Further, an aluminum concentration of a region of the insulating layer not overlapping the wiring layer 162 is smaller than the aluminum concentration of the region of the insulating layer overlapping the wiring layer 162.
A display device 20 using the semiconductor device 10 according to an embodiment of the present invention is described with reference to
As shown in
In the Second Embodiment and the Third Embodiment, although the configuration in which the semiconductor device 10 described in the First Embodiment is applied to a liquid crystal display device and an organic EL display device is described, the semiconductor device 10 may be applied to display devices (for example, a self-luminous display device or an electronic paper display device other than an organic EL display device) other than these display devices. Further, the semiconductor device 10 described above can be applied without any particular limitation from a small sized display device to a large sized display device.
As an Example, the semiconductor device 10 described in the First Embodiment was fabricated, and an evaluation was performed on the semiconductor device 10. Further, as a Comparative Example, a semiconductor device in which the metal oxide layer 130 in contact with the oxide semiconductor layer 140 was not provided was fabricated.
Further, in the Example, before the gate electrode GE was formed, an aluminum oxide layer was deposited as the metal oxide layer 190 by a sputtering method, and the aluminum oxide layer was removed after the oxidation annealing was performed. On the other hand, in the Comparative Example, the formation of the metal oxide layer 190 and the oxidation annealing were not performed.
The SIMS analysis was performed using a so-called SSDP-SIMS, which measures from the substrate side. Further, in
As shown in
As shown in
As shown in
Table 3 shows that the conditions for measuring the electrical characteristics of the semiconductor device 10 before and after the application of stress.
As shown in
As can be seen from the above electrical characteristics and reliability tests of the semiconductor device 10, the semiconductor device 10 has not only high mobility but also stable reliability. The semiconductor device 10 having such high mobility and high reliability can be obtained by crystallizing the oxide semiconductor layer 140 and supplying sufficient oxygen into the oxide semiconductor layer 140. Therefore, the OS annealing and the oxidation annealing are important in the manufacturing method of the semiconductor device 10. In particular, in the oxidation annealing, the heat treatment is performed in a state in which the metal oxide layer 130 is provided below the oxide semiconductor layer 140 and the metal oxide layer 190 is further deposited on the gate insulating layer 150. The metal oxide layers 130 and 190 can prevent hydrogen from entering the oxide semiconductor layer 140. Further, since the side surface 143 and the upper surface 141 of the oxide semiconductor layer 140 are in contact with the gate insulating layer 150, oxygen from the gate insulating layer 150 is efficiently supplied to the side surface 143 and the upper surface 141 of the oxide semiconductor layer 140 which have a large amount of oxygen deficiencies, so that the oxygen deficiencies in the oxide semiconductor layer 140 can be repaired.
Although the metal oxide layer 190 is removed in a subsequent step of removing AlOx, the aluminum contained in the metal oxide layer 190 diffuses into the gate insulating layer 150 by the oxidation annealing and remains therein. Therefore, it is possible to detect aluminum by a composition analysis of the gate insulating layer 150 of the manufactured semiconductor device 10. It can also be seen from the graphs shown in
Each of the embodiments described above as the embodiments of the present invention can be appropriately combined and implemented as long as no contradiction is caused. Further, the addition, deletion, or design change of components, or the addition, deletion, or condition change of processes as appropriate by those skilled in the art based on each of embodiments are also included in the scope of the present invention as long as they are provided with the gist of the present invention.
Further, it is understood that, even if the effect is different from those provided by each of the above-described embodiments, the effect obvious from the description in the specification or easily predicted by persons ordinarily skilled in the art is apparently derived from the present invention.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2022-057458 | Mar 2022 | JP | national |
This application is a Continuation of International Patent Application No. PCT/JP2023/009637, filed on Mar. 13, 2023, which claims the benefit of priority to Japanese Patent Application No. 2022-057458, filed on Mar. 30, 2022, the entire contents of which are incorporated herein by reference.
| Number | Date | Country | |
|---|---|---|---|
| Parent | PCT/JP2023/009637 | Mar 2023 | WO |
| Child | 18894346 | US |
