Semiconductor laser device, semiconductor laser device mounting structure, semiconductor laser device manufacturing method and semiconductor laser device mounting method

Abstract

An n-type GaAs buffer layer 4, an n-type GaInP intermediate layer 6, an n-type AlGaInP cladding layer 8, a non-doped MQW active layer 10, a p-type AlGaInP cladding layer 12, a p-type AlGaInP cladding layer 14 and a p-type GaAs cap layer 16 are formed on an n-type GaAs substrate 2. The p-type cladding layer 14 and the p-type cap layer 16 are formed in a ridge portion 15, and a narrow width portion 17 is formed including an upper portion of the n-type substrate 2 and the layers there above. An SiO2 film 18 is formed on the side surfaces of the ridge portion 15, the surfaces of the narrow width portion 17 and the surface of a step portion 2a of the n-type substrate 2. A p-side electrode layer 23 is formed on the surfaces of the SiO2 film 18 formed on ridge portion 15 and the narrow width portion 17.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention will become more fully understood from the detailed description given hereinbelow and the accompanying drawings which are given by way of illustration only, and thus are not intended to limit the present invention, and wherein:

FIG. 1 is a sectional view showing the semiconductor laser device of a first embodiment;

FIGS. 2A through 2D are views showing manufacturing processes of the semiconductor laser device of the first embodiment;

FIGS. 3E to 3H are views showing manufacturing processes of the semiconductor laser device subsequent to FIG. 2D;

FIG. 4 is a view showing manufacturing processes of the semiconductor laser device subsequent to FIG. 3H;

FIG. 5 is a view showing the appearance of the semiconductor laser device mounted on a submount;

FIG. 6 is a sectional view showing the semiconductor laser device of a second embodiment;

FIG. 7 is a sectional view showing the semiconductor laser device of a third embodiment;

FIGS. 8A and 8B are sectional views showing conventional semiconductor laser devices; and

FIGS. 9A and 9B are sectional views showing the appearances of the conventional semiconductor laser devices mounted on respective submounts.

Claims

1. A semiconductor laser device comprising: a substrate;a lower cladding layer formed on the substrate;an active layer formed on the lower cladding layer;a first upper cladding layer formed on the active layer;a dielectric that covers side surfaces of the first upper cladding layer, the active layer and the lower cladding layer; andan electrode layer that covers the dielectric while being electrically connected to the first upper cladding layer.

2. The semiconductor laser device as claimed in claim 1, wherein the electrode layer has a thickness of not smaller than 1 μm and not greater than 50 μm.

3. The semiconductor laser device as claimed in claim 1, wherein a ridge portion including a second upper cladding layer and a cap layer is provided between the first upper cladding layer and the electrode layer.

4. The semiconductor laser device as claimed in claim 1, wherein a narrow width portion having a width smaller than a width of a lower portion of the substrate includes the first upper cladding layer, the active layer and the lower cladding layer and the dielectric covers side surfaces of the narrow width portion.

5. The semiconductor laser device as claimed in claim 4, wherein the narrow width portion includes an upper portion of the substrate.

6. The semiconductor laser device as claimed in claim 5, wherein the dielectric covers a surface of a step portion continuous to the narrow width portion and covers the surface of the step portion between the upper portion and a lower portion of the substrate.

7. The semiconductor laser device as claimed in claim 6, wherein the electrode layer covers at least part of a portion of the dielectric that covers the surface of the step portion.

8. A semiconductor laser device mounting structure comprising: the semiconductor laser device claimed in claim 1; anda submount having a recess on an inner surface of which an electrode is formed, whereinthe portion where the electrode layer of the semiconductor laser device is formed is inserted in the recess of the submount, and the electrode layer of the semiconductor laser device and the electrode of the submount are electrically connected together.

9. The semiconductor laser device mounting structure as claimed in claim 8, comprising: a brazing material that is provided in the recess and brazes the electrode layer of the semiconductor laser device to the electrode of the submount.

10. The semiconductor laser device mounting structure as claimed in claim 8, wherein a length of the submount in a direction parallel to a direction of a resonator length of the semiconductor laser device is shorter than the resonator length of the semiconductor laser device.

11. A semiconductor laser device manufacturing method comprising: a step for forming a lower cladding layer on a wafer;a step for forming an active layer on the lower cladding layer;a step for forming a first upper cladding layer on the active layer;a groove forming step for forming a groove that reaches at least the lower cladding layer;a dielectric forming process for forming a dielectric on an inner surface of the groove;a step for forming an electrode layer, which is electrically connected to the first upper cladding layer, on a surface of the dielectric; anda step for dividing the wafer, on which the lower cladding layer, the active layer, the first upper cladding layer, the dielectric and the electrode layer are formed, along a bottom surface of the groove.

12. A semiconductor laser device mounting method comprising: a step for arranging a brazing material in a recess of a submount wherein an electrode is formed on an inner surface of the recess;a step for inserting a portion, in which the electrode layer of the semiconductor laser device claimed in claim 1 is formed, into the recess of the submount; anda step for brazing the electrode layer of the semiconductor laser device to the electrode of the submount by heating the brazing material.