The present disclosure relates to laser diodes.
Fiber lasers are widely used in industrial processes (e.g., cutting, welding, cladding, heat treatment, etc.) In some fiber lasers, the optical gain medium includes one or more active optical fibers with cores doped with rare-earth element(s). The rare-earth element(s) may be optically excited (“pumped”) with light from one or more semiconductor laser sources. There is great demand for high power and high efficiency diode lasers, the former for power scaling and price reduction (measured in $/Watt) and the latter for reduced energy consumption and extended lifetime.
The accompanying drawings, wherein like reference numerals represent like elements, are incorporated in and constitute a part of this specification and, together with the description, explain the advantages and principles of the presently disclosed technology.
As used in this application and in the claims, the singular forms “a,” “an,” and “the” include the plural forms unless the context clearly dictates otherwise. Additionally, the term “includes” means “comprises.” Further, the term “coupled” does not exclude the presence of intermediate elements between the coupled items. The systems, apparatus, and methods described herein should not be construed as limiting in any way. Instead, the present disclosure is directed toward all novel and non-obvious features and aspects of the various disclosed embodiments, alone and in various combinations and sub-combinations with one another. The term “or” refers to “and/or,” not “exclusive or” (unless specifically indicated).
The disclosed systems, methods, and apparatus are not limited to any specific aspect or feature or combinations thereof, nor do the disclosed systems, methods, and apparatus require that any one or more specific advantages be present or problems be solved. Any theories of operation are to facilitate explanation, but the disclosed systems, methods, and apparatus are not limited to such theories of operation. Although the operations of some of the disclosed methods are described in a particular, sequential order for convenient presentation, it should be understood that this manner of description encompasses rearrangement, unless a particular ordering is required by specific language set forth below. For example, operations described sequentially may in some cases be rearranged or performed concurrently. Moreover, for the sake of simplicity, the attached figures may not show the various ways in which the disclosed systems, methods, and apparatus can be used in conjunction with other systems, methods, and apparatus.
Additionally, the description sometimes uses terms like “produce” and “provide” to describe the disclosed methods. These terms are high-level abstractions of the actual operations that are performed. The actual operations that correspond to these terms will vary depending on the particular implementation and are readily discernible by one of ordinary skill in the art. In some examples, values, procedures, or apparatus' are referred to as “lowest”, “best”, “minimum,” or the like. It will be appreciated that such descriptions are intended to indicate that a selection among many used functional alternatives can be made, and such selections need not be better, smaller, or otherwise preferable to other selections.
Examples are described with reference to directions indicated as “above,” “below,” “upper,” “lower,” and the like. These terms are used for convenient description, but do not imply any particular spatial orientation.
Yb-doped fiber lasers and amplifiers are becoming strong contenders as sources used in power-scalable spectrally beam combined and coherently beam combined high energy laser systems. Power levels well beyond 100 kW is anticipated for these applications, with pumping at ˜975 nm. The primary benefits for pumping a fiber laser/amplifier on this strong absorption peak are a reduction in cost due to the need for shorter fiber and higher threshold power for nonlinear effects such as Stimulated Raman Scattering (SRS) and Stimulated Brillouin Scattering (SBS). But the absorption band of Yb-doped fiber is very narrow (<5 nm at the FWHM) and very sharp drop-off occurs around the peak near ˜975 nm. An obvious drawback to pumping this narrow absorption band is that the emitting wavelength of the laser diodes must be tightly controlled to the specified wavelength. A small change in the emitting wavelength of the diodes results in a substantial reduction in the absorption cross-section and enormous amount of unabsorbed pump power will have to be managed making it very impractical in DEW systems. Since the emitting wavelength is directly related to the operating temperature, the coolant temperature must be tightly controlled in order to maintain the proper wavelength as the pump power is increased. This adds complexity to the system increasing cost and SWAP while also requiring setup and stabilization time for the coolant system which is not realistic in operational scenarios. High-power GaAs-based diode lasers produce optical power with extremely high efficiencies, but the spectrum of these Fabry Perot laser diodes is too broad for many applications (>4-5 nm with 95% power content). Narrow spectra (<0.5 nm) can be achieved using monolithically integrated gratings. However, it remains challenging to develop designs that simultaneously achieve high power, high efficiencies and narrow spectra over a wide operating temperature and electrical current (optical power) ranges.
Yb-doped fiber lasers and amplifiers are becoming strong contenders as sources used in power-scalable spectrally beam combined and coherently beam combined high energy laser systems. Power levels well beyond 100 kW is anticipated for these applications. Pumping these fiber amplifiers at ˜975 nm has become an imperative. The primary benefits for pumping a fiber laser/amplifier on this strong absorption peak are a reduction in cost due to the need for shorter fiber and higher threshold power for nonlinear effects such as Stimulated Raman Scattering (SRS) and Stimulated Brillouin Scattering (SBS). But the absorption band of Yb-doped fiber is very narrow (<5 nm at the FWHM) and very sharp drop-off occurs around the peak near ˜975 nm. An obvious drawback to pumping this narrow absorption band is that the emitting wavelength of the laser diodes must be tightly controlled to the specified wavelength. A small change in the emitting wavelength of the diodes results in a substantial reduction in the absorption cross-section and enormous amount of unabsorbed pump power will have to be managed making it very impractical in DEW systems. Since the emitting wavelength is directly related to the operating temperature, the coolant temperature must be tightly controlled in order to maintain the proper wavelength as the pump power is increased. This adds complexity to the system increasing cost and SWAP while also requiring setup and stabilization time for the coolant system which is not realistic in operational scenarios. High-power GaAs-based diode lasers produce optical power with extremely high efficiencies, but the spectrum of these Fabry Perot laser diodes is too broad for many applications (>4-5 nm with 95% power content). Narrow spectra (<0.5 nm) can be achieved using monolithically integrated gratings. However, it remains challenging to develop designs that simultaneously achieve high power, high efficiencies and narrow spectra over a wide operating temperature and electrical current (optical power) ranges.
So, they are typically less efficient compared to the DFB and DBR lasers that incorporate 1st order gratings. Furthermore, these higher-order grating stabilized lasers must implement longer gratings to provide sufficient feedback at the Bragg wavelength to discriminate against the Fabry Perot modes in a semiconductor laser cavity to achieve the same operating temperature and current ranges. The following equation describes the coupling constant, κ, which is proportional to the product of the grating index contrast, Δn, the confinement factor in the grating, Γgrt and the Fourier-component for coupling (given by the sine-function of the fractional duty-cycle of the grating period given by the ratio of Λ1 i.e. fraction of the grating that has lower index to Λ (the period of the grating)) and the grating order, m, and neff is defined as the modal index or the effective index of the mode.
For the 1st order grating (m=1) and it is maximum at 50% duty cycle; the coupling constant, κ, is:
Whereas, for the 2nd order grating (m=2), the highest coupling constant is achieved when the duty cycle is 25% and the coupling constant, κ, is:
It is clear that even when the duty-cycle is optimized for a maximum coupling constant for a 2nd order grating, the coupling is two times lower when all else is equal. Therefore two times longer gratings are needed to provide the same threshold gain for a DFB laser with a 2nd order grating. The grating length gets progressively longer for higher order gratings.
Some prior designs, such as those described in U.S. Pat. No. 7,586,970, utilize second order partial gratings near the back of the laser diode cavity to minimize the diffraction loss since the total local power (sum of the forward and backward propagating intensity) is smaller in the laser diode compared to the front of the laser diode. Therefore, the net power loss per length of the grating is smaller when a grating is placed near the back. These lasers use partial reflectivity of 2% to 5% at the front facet. However, known designs do not address wavelength locking temperature and electrical current (optical power) ranging as a function of the grating design and/or may be based on a point design.
Some embodiments described herein utilize a first order grating and a shorter grating length (as compared to grating-stabilized semiconductor lasers with higher-order gratings) in a semiconductor laser device (e.g., a waveguide) to emit light from one end or both ends of the waveguide. These embodiments may provide sufficient feedback at the Bragg wavelength to suppress Fabry Perot modes.
According to various embodiments in which the semiconductor laser device is arranged to emit light from one end, this grating may be located at the front or rear facet of the semiconductor laser. For example, in a first example, the grating originates only from the rear facet and in a second example, the grating may originate only from the front facet. Further details of these two examples a details are as follows:
A semiconductor laser device arranged to emit light from one or both ends may provide operation of laser diode with fully locked and narrow spectral width (<0.5 nm) from threshold current to 25 Amperes and from 10 C to more than 70 C operating temperature. The operating current range and temperature range can be designed by choosing offset between the semiconductor laser gain peak and the Bragg wavelength. When the grating is located in the back as discussed in TYPE 1A (see above) and TYPE 1B (see above), the optimum grating length for achieving locked and narrow spectrum from threshold current to 25 Amperes and from 10 C to more than 70 C operating temperature may be a grating length in the range of 0.5 mm to 3 mm. When the grating is located in the front as discussed in TYPE 2 device (see above), the optimum grating length for achieving locked and narrow spectrum from threshold current to 25 Amperes and from 10 C to more than 70 C operating temperature may be a grating length in the range 0.05 mm to 0.5 mm.
In examples in which the semiconductor laser device is arranged to emit light from both ends, both the facets may have AR or PR coatings, and the diffraction grating may have two non-contiguous segments that extend to the front and rear facets, respectively.
According to various embodiments in which the semiconductor laser device is arranged to emit light from one end, unlike some known semiconductor laser devices in which the front facet is a partial reflector of typical reflectivity of ˜2% to 5% at the lasing wavelength, the front facet may be coated with antireflection coating. This anti-reflecting coating may have reflectivity in the range of 0.01% to less than 0.5% in the spectral range of ±5 nm or greater (and typically >±10 nm or >±15 nm) from the lasing Bragg wavelength such as the ˜975 nm.
Due to the combination of the grating and the antireflection coating, the effective reflectivity may be greater than 95% at the Bragg wavelength, e.g., ˜975 nm (effective reflectivity may be less elsewhere in the spectral range of the semiconductor gain bandwidth).
The buried grating 15 may be positioned within the resonator along only a portion of the length of the active layer 5. The buried grating 15 may extend to, e.g., may terminate at, the rear facet 10, as illustrated. This buried grating 15 may reside at the waveguide and cladding interface (as illustrated) or may reside substantially in the cladding or substantially in the waveguide.
The front facet 11 may have an AR-coating in the range of 0.01% to 0.5% or a PR-coating in the range of 0.5 to 5% in greater than ±5 nm from the laser operating Bragg wavelength of ˜975 nm. The rear facet 10 may have an HR-coating, which may have an effective reflectivity of ≥95% at the Bragg wavelength, e.g., ˜975 nm (effective reflectivity may be less elsewhere in the spectral range of the semiconductor gain bandwidth). In some examples, the HR-coating of the rear facet 10 may be further arranged to provide reflectivity lower than 93% at other wavelengths.
Cladding layer(s) 1 and cladding layer(s) 2 may be any n-cladding layer(s) or any p-cladding layer(s), now known or later developed. In some examples, cladding layer(s) 1 includes an n-cladding and cladding layer(s) 2 includes a p-cladding. Current blocking layer 3 may be any current blocking layer now known or later developed. Arrow “a” shows the width of the buried grating 15.
With the buried grating 25 extending to the front facet 21 as shown, the front facet 21 may be coated, not with a partial reflector of typical reflectivity of ˜2% to 5% at the lasing wavelength as with some other front facets, but an antireflection coating with reflectivity in the range of 0.01% to less than 0.3% in the spectral range of ±5 nm or greater (and typically ±10 nm or ±15 nm) from the operating center wavelength such as the ˜975 nm. Furthermore, the effective reflectivity at the Bragg wavelength e.g. ˜975 nm due to the combination of the grating and the AR-coating may be in the range of 0.5% to 5% and less than that value elsewhere in the spectral range of ±5 nm or greater from the lasing Bragg wavelength.
The surface semiconductor grating 35 may be formed by etching grating features and then depositing a current blocking layer such as a dielectric oxide layer on top of the etched grating features. The coupling strength generated from the difference in index of refraction between the semiconductor and the oxide index layer (based on any formula described herein) may generate the desired feedback.
It should be appreciated that, in other examples, the surface semiconductor grating 35 may be used in the semiconductor laser device shown in
The surface semiconductor grating 45 may be formed by etching grating features and then depositing a low loss metal film (e.g., silver or gold or some other low loss metal film) thereon. The metal may be deposited on the semiconductor that is doped properly to form a good Ohmic contact between the semiconductor and the metal so that the grating is “active” i.e. current is not blocked underneath of it. Or, the semiconductor can be terminated with a very low or no doping so that a Schottky contact is formed between the metal and the semiconductor and, therefore, blocks the current entering the underlying grating. The coupling strength generated by the semiconductor to metal index difference may generate the desired feedback.
In some embodiments, silver further optimize the design instead of gold because the real part of the index of refraction of silver is lower than gold, which provides a higher index contrast between the semiconductor and metal (e.g., a higher coupling constant). The penetration of the electric field inside the silver may be smaller due to lower real index. As a result, although the extinction coefficient (imaginary part of the index of refraction) is about the same for these two metals as shown below, the lower field penetration may lead to lower loss for silver.
The surface semiconductor grating 45 also may be AR-coated with reflectivity in the range of 0.01% to 0.5% in greater than ±5 nm from the laser operating Bragg wavelength of ˜975 nm. The effective reflectivity of front facet at the Bragg lasing wavelength, with grating located at the front facet and AR-coating applied to it with reflectivity of 0.01% to 0.5% in greater than ±5 nm from the Bragg lasing wavelength (e.g. ˜975 nm), may be in the range of 0.5% to 5%.
It should be appreciated that, in other examples, the surface semiconductor grating 45 may be used in the semiconductor laser device shown in
The buried gratings 55a and 55b may be similar in any respect to buried gratings 15 (
Surface semiconductor gratings 65a and 65b may have AR coatings with reflectivity in the range of 0.01% to less than 5%. The combination of these surface semiconductor grating coatings and the AR-coated or PR-coated facets may produce an effective reflectivity in the range of 0.5% to 15% at the Bragg lasing wavelength on each side.
This embodiment includes an asymmetric cladding whereby the cladding where the grating resides is thinner compared to the cladding on the other side of the waveguide. This allows formation of the surface semiconductor grating 85 with semiconductor-oxide grating or semiconductor-metal grating and obviates regrowth necessary for the buried grating. The thin cladding layer 72 may be a p-cladding and the other cladding layer 71 may be an n-cladding layer.
In view of the many possible embodiments to which the principles of the disclosed technology may be applied, it should be recognized that the illustrated embodiments are only preferred examples and should not be taken as limiting the scope of the disclosure. We claim as our invention all that comes within the scope and spirit of the appended claims.
This application is a US national phase application, which claims priority to PCT Application No. PCT/US2021/059007, filed Nov. 11, 2021, which claims priority to U.S. Provisional Application No. 63/116,742 filed on Nov. 20, 2020, entitled SEMICONDUCTOR LASER DEVICE WITH FIRST ORDER DIFFRACTION GRATING EXTENDING TO FACET, which is incorporated by reference herein.
Filing Document | Filing Date | Country | Kind |
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PCT/US2021/059007 | 11/11/2021 | WO |
Number | Date | Country | |
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63116742 | Nov 2020 | US |